8/18/2011	12:01:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2011	12:01:24 AM	Recipe started at 12:01 AM
8/18/2011	12:01:24 AM	Helium valve closed
8/18/2011	12:01:24 AM	H2 valve closed
8/18/2011	12:01:24 AM	BCl3 valve closed
8/18/2011	12:01:24 AM	PH3 valve closed
8/18/2011	12:01:24 AM	SiCl4 pre valve closed
8/18/2011	12:01:24 AM	SiCl4 post valve closed
8/18/2011	12:01:24 AM	Main Vac valve closed
8/18/2011	12:01:24 AM	Bubbler valve closed
8/18/2011	12:01:24 AM	Bypass valve opened
8/18/2011	12:01:24 AM	Helium MFC set to  0.000000
8/18/2011	12:01:24 AM	H2 MFC set to  0.000000
8/18/2011	12:01:24 AM	BCl3 MFC set to  0.000000
8/18/2011	12:01:24 AM	PHl3 MFC set to  0.000000
8/18/2011	12:01:24 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:01:24 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:01:24 AM	Tube furnace set to 0
8/18/2011	12:02:26 AM	Helium valve closed
8/18/2011	12:02:26 AM	H2 valve closed
8/18/2011	12:02:26 AM	BCl3 valve closed
8/18/2011	12:02:26 AM	PH3 valve closed
8/18/2011	12:02:26 AM	SiCl4 pre valve closed
8/18/2011	12:02:26 AM	SiCl4 post valve closed
8/18/2011	12:02:26 AM	Main Vac valve closed
8/18/2011	12:02:26 AM	Bubbler valve closed
8/18/2011	12:02:26 AM	Bypass valve opened
8/18/2011	12:02:26 AM	Helium MFC set to  0.000000
8/18/2011	12:02:26 AM	H2 MFC set to  0.000000
8/18/2011	12:02:26 AM	BCl3 MFC set to  0.000000
8/18/2011	12:02:26 AM	PHl3 MFC set to  0.000000
8/18/2011	12:02:26 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:02:26 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:02:26 AM	Tube furnace set to 0
8/18/2011	12:03:26 AM	Helium valve closed
8/18/2011	12:03:26 AM	H2 valve closed
8/18/2011	12:03:26 AM	BCl3 valve closed
8/18/2011	12:03:26 AM	PH3 valve closed
8/18/2011	12:03:26 AM	SiCl4 pre valve closed
8/18/2011	12:03:26 AM	SiCl4 post valve closed
8/18/2011	12:03:27 AM	Bypass valve closed
8/18/2011	12:03:27 AM	Bubbler valve closed
8/18/2011	12:03:27 AM	Main Vac valve opened
8/18/2011	12:03:27 AM	Helium MFC set to  0.000000
8/18/2011	12:03:27 AM	H2 MFC set to  0.000000
8/18/2011	12:03:27 AM	BCl3 MFC set to  0.000000
8/18/2011	12:03:27 AM	PHl3 MFC set to  0.000000
8/18/2011	12:03:27 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:03:27 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:03:27 AM	Tube furnace set to 0
8/18/2011	12:03:28 AM	Run finished at 12:03 AM
8/18/2011	12:03:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2011	12:16:44 AM	Recipe started at 12:16 AM
8/18/2011	12:16:45 AM	Helium valve closed
8/18/2011	12:16:45 AM	H2 valve closed
8/18/2011	12:16:45 AM	BCl3 valve closed
8/18/2011	12:16:45 AM	PH3 valve closed
8/18/2011	12:16:45 AM	SiCl4 pre valve closed
8/18/2011	12:16:45 AM	SiCl4 post valve closed
8/18/2011	12:16:45 AM	Bypass valve closed
8/18/2011	12:16:45 AM	Bubbler valve closed
8/18/2011	12:16:45 AM	Main Vac valve opened
8/18/2011	12:16:45 AM	Helium MFC set to  0.000000
8/18/2011	12:16:45 AM	H2 MFC set to  0.000000
8/18/2011	12:16:45 AM	BCl3 MFC set to  0.000000
8/18/2011	12:16:45 AM	PHl3 MFC set to  0.000000
8/18/2011	12:16:45 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:16:45 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:16:45 AM	Tube furnace set to 0
8/18/2011	12:17:15 AM	H2 valve closed
8/18/2011	12:17:15 AM	BCl3 valve closed
8/18/2011	12:17:15 AM	PH3 valve closed
8/18/2011	12:17:15 AM	SiCl4 pre valve closed
8/18/2011	12:17:15 AM	SiCl4 post valve closed
8/18/2011	12:17:15 AM	Bypass valve closed
8/18/2011	12:17:15 AM	Bubbler valve closed
8/18/2011	12:17:15 AM	Helium valve opened
8/18/2011	12:17:15 AM	Main Vac valve opened
8/18/2011	12:17:15 AM	Helium MFC set to  20.000000
8/18/2011	12:17:15 AM	H2 MFC set to  0.000000
8/18/2011	12:17:15 AM	BCl3 MFC set to  0.000000
8/18/2011	12:17:15 AM	PHl3 MFC set to  0.000000
8/18/2011	12:17:15 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:17:15 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:17:15 AM	Tube furnace set to 0
8/18/2011	12:17:45 AM	Helium valve closed
8/18/2011	12:17:45 AM	H2 valve closed
8/18/2011	12:17:45 AM	BCl3 valve closed
8/18/2011	12:17:45 AM	PH3 valve closed
8/18/2011	12:17:45 AM	SiCl4 pre valve closed
8/18/2011	12:17:45 AM	SiCl4 post valve closed
8/18/2011	12:17:45 AM	Bypass valve closed
8/18/2011	12:17:45 AM	Bubbler valve closed
8/18/2011	12:17:45 AM	Main Vac valve opened
8/18/2011	12:17:45 AM	Helium MFC set to  0.000000
8/18/2011	12:17:45 AM	H2 MFC set to  0.000000
8/18/2011	12:17:45 AM	BCl3 MFC set to  0.000000
8/18/2011	12:17:45 AM	PHl3 MFC set to  0.000000
8/18/2011	12:17:45 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:17:45 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:17:45 AM	Tube furnace set to 0
8/18/2011	12:18:15 AM	H2 valve closed
8/18/2011	12:18:15 AM	BCl3 valve closed
8/18/2011	12:18:15 AM	PH3 valve closed
8/18/2011	12:18:15 AM	SiCl4 pre valve closed
8/18/2011	12:18:15 AM	SiCl4 post valve closed
8/18/2011	12:18:15 AM	Bypass valve closed
8/18/2011	12:18:15 AM	Bubbler valve closed
8/18/2011	12:18:15 AM	Helium valve opened
8/18/2011	12:18:15 AM	Main Vac valve opened
8/18/2011	12:18:15 AM	Helium MFC set to  20.000000
8/18/2011	12:18:15 AM	H2 MFC set to  0.000000
8/18/2011	12:18:15 AM	BCl3 MFC set to  0.000000
8/18/2011	12:18:15 AM	PHl3 MFC set to  0.000000
8/18/2011	12:18:15 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:18:15 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:18:15 AM	Tube furnace set to 0
8/18/2011	12:18:45 AM	Helium valve closed
8/18/2011	12:18:45 AM	H2 valve closed
8/18/2011	12:18:45 AM	BCl3 valve closed
8/18/2011	12:18:45 AM	PH3 valve closed
8/18/2011	12:18:45 AM	SiCl4 pre valve closed
8/18/2011	12:18:45 AM	SiCl4 post valve closed
8/18/2011	12:18:45 AM	Bypass valve closed
8/18/2011	12:18:45 AM	Bubbler valve closed
8/18/2011	12:18:45 AM	Main Vac valve opened
8/18/2011	12:18:45 AM	Helium MFC set to  0.000000
8/18/2011	12:18:45 AM	H2 MFC set to  0.000000
8/18/2011	12:18:45 AM	BCl3 MFC set to  0.000000
8/18/2011	12:18:45 AM	PHl3 MFC set to  0.000000
8/18/2011	12:18:45 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:18:45 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:18:45 AM	Tube furnace set to 0
8/18/2011	12:19:15 AM	H2 valve closed
8/18/2011	12:19:15 AM	BCl3 valve closed
8/18/2011	12:19:15 AM	PH3 valve closed
8/18/2011	12:19:15 AM	SiCl4 pre valve closed
8/18/2011	12:19:15 AM	SiCl4 post valve closed
8/18/2011	12:19:15 AM	Bypass valve closed
8/18/2011	12:19:15 AM	Bubbler valve closed
8/18/2011	12:19:15 AM	Helium valve opened
8/18/2011	12:19:16 AM	Main Vac valve opened
8/18/2011	12:19:16 AM	Helium MFC set to  20.000000
8/18/2011	12:19:16 AM	H2 MFC set to  0.000000
8/18/2011	12:19:16 AM	BCl3 MFC set to  0.000000
8/18/2011	12:19:16 AM	PHl3 MFC set to  0.000000
8/18/2011	12:19:16 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:19:16 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:19:16 AM	Tube furnace set to 0
8/18/2011	12:19:46 AM	Helium valve closed
8/18/2011	12:19:46 AM	H2 valve closed
8/18/2011	12:19:46 AM	BCl3 valve closed
8/18/2011	12:19:46 AM	PH3 valve closed
8/18/2011	12:19:46 AM	SiCl4 pre valve closed
8/18/2011	12:19:46 AM	SiCl4 post valve closed
8/18/2011	12:19:46 AM	Bypass valve closed
8/18/2011	12:19:46 AM	Bubbler valve closed
8/18/2011	12:19:46 AM	Main Vac valve opened
8/18/2011	12:19:46 AM	Helium MFC set to  0.000000
8/18/2011	12:19:46 AM	H2 MFC set to  0.000000
8/18/2011	12:19:46 AM	BCl3 MFC set to  0.000000
8/18/2011	12:19:46 AM	PHl3 MFC set to  0.000000
8/18/2011	12:19:46 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:19:46 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:19:46 AM	Tube furnace set to 0
8/18/2011	12:20:16 AM	H2 valve closed
8/18/2011	12:20:16 AM	BCl3 valve closed
8/18/2011	12:20:16 AM	PH3 valve closed
8/18/2011	12:20:16 AM	SiCl4 pre valve closed
8/18/2011	12:20:16 AM	SiCl4 post valve closed
8/18/2011	12:20:16 AM	Bypass valve closed
8/18/2011	12:20:16 AM	Bubbler valve closed
8/18/2011	12:20:16 AM	Helium valve opened
8/18/2011	12:20:16 AM	Main Vac valve opened
8/18/2011	12:20:16 AM	Helium MFC set to  20.000000
8/18/2011	12:20:16 AM	H2 MFC set to  0.000000
8/18/2011	12:20:16 AM	BCl3 MFC set to  0.000000
8/18/2011	12:20:16 AM	PHl3 MFC set to  0.000000
8/18/2011	12:20:16 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:20:16 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:20:16 AM	Tube furnace set to 0
8/18/2011	12:20:46 AM	Helium valve closed
8/18/2011	12:20:46 AM	H2 valve closed
8/18/2011	12:20:46 AM	BCl3 valve closed
8/18/2011	12:20:46 AM	PH3 valve closed
8/18/2011	12:20:46 AM	SiCl4 pre valve closed
8/18/2011	12:20:46 AM	SiCl4 post valve closed
8/18/2011	12:20:46 AM	Bypass valve closed
8/18/2011	12:20:46 AM	Bubbler valve closed
8/18/2011	12:20:46 AM	Main Vac valve opened
8/18/2011	12:20:46 AM	Helium MFC set to  0.000000
8/18/2011	12:20:46 AM	H2 MFC set to  0.000000
8/18/2011	12:20:46 AM	BCl3 MFC set to  0.000000
8/18/2011	12:20:46 AM	PHl3 MFC set to  0.000000
8/18/2011	12:20:46 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:20:46 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:20:46 AM	Tube furnace set to 0
8/18/2011	12:21:16 AM	H2 valve closed
8/18/2011	12:21:16 AM	BCl3 valve closed
8/18/2011	12:21:16 AM	PH3 valve closed
8/18/2011	12:21:16 AM	SiCl4 pre valve closed
8/18/2011	12:21:16 AM	SiCl4 post valve closed
8/18/2011	12:21:16 AM	Bypass valve closed
8/18/2011	12:21:16 AM	Bubbler valve closed
8/18/2011	12:21:16 AM	Helium valve opened
8/18/2011	12:21:16 AM	Main Vac valve opened
8/18/2011	12:21:16 AM	Helium MFC set to  20.000000
8/18/2011	12:21:16 AM	H2 MFC set to  0.000000
8/18/2011	12:21:16 AM	BCl3 MFC set to  0.000000
8/18/2011	12:21:16 AM	PHl3 MFC set to  0.000000
8/18/2011	12:21:16 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:21:16 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:21:16 AM	Tube furnace set to 0
8/18/2011	12:21:46 AM	Helium valve closed
8/18/2011	12:21:46 AM	H2 valve closed
8/18/2011	12:21:46 AM	BCl3 valve closed
8/18/2011	12:21:46 AM	PH3 valve closed
8/18/2011	12:21:46 AM	SiCl4 pre valve closed
8/18/2011	12:21:46 AM	SiCl4 post valve closed
8/18/2011	12:21:46 AM	Bypass valve closed
8/18/2011	12:21:46 AM	Bubbler valve closed
8/18/2011	12:21:46 AM	Main Vac valve opened
8/18/2011	12:21:46 AM	Helium MFC set to  0.000000
8/18/2011	12:21:46 AM	H2 MFC set to  0.000000
8/18/2011	12:21:46 AM	BCl3 MFC set to  0.000000
8/18/2011	12:21:46 AM	PHl3 MFC set to  0.000000
8/18/2011	12:21:46 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:21:46 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:21:47 AM	Tube furnace set to 0
8/18/2011	12:22:17 AM	H2 valve closed
8/18/2011	12:22:17 AM	BCl3 valve closed
8/18/2011	12:22:17 AM	PH3 valve closed
8/18/2011	12:22:17 AM	SiCl4 pre valve closed
8/18/2011	12:22:17 AM	SiCl4 post valve closed
8/18/2011	12:22:17 AM	Bypass valve closed
8/18/2011	12:22:17 AM	Bubbler valve closed
8/18/2011	12:22:17 AM	Helium valve opened
8/18/2011	12:22:17 AM	Main Vac valve opened
8/18/2011	12:22:17 AM	Helium MFC set to  20.000000
8/18/2011	12:22:17 AM	H2 MFC set to  0.000000
8/18/2011	12:22:17 AM	BCl3 MFC set to  0.000000
8/18/2011	12:22:17 AM	PHl3 MFC set to  0.000000
8/18/2011	12:22:17 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:22:17 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:22:17 AM	Tube furnace set to 0
8/18/2011	12:22:47 AM	Helium valve closed
8/18/2011	12:22:47 AM	H2 valve closed
8/18/2011	12:22:47 AM	BCl3 valve closed
8/18/2011	12:22:47 AM	PH3 valve closed
8/18/2011	12:22:47 AM	SiCl4 pre valve closed
8/18/2011	12:22:47 AM	SiCl4 post valve closed
8/18/2011	12:22:47 AM	Bypass valve closed
8/18/2011	12:22:47 AM	Bubbler valve closed
8/18/2011	12:22:47 AM	Main Vac valve opened
8/18/2011	12:22:47 AM	Helium MFC set to  0.000000
8/18/2011	12:22:47 AM	H2 MFC set to  0.000000
8/18/2011	12:22:47 AM	BCl3 MFC set to  0.000000
8/18/2011	12:22:47 AM	PHl3 MFC set to  0.000000
8/18/2011	12:22:47 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:22:47 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:22:47 AM	Tube furnace set to 0
8/18/2011	12:23:17 AM	H2 valve closed
8/18/2011	12:23:17 AM	BCl3 valve closed
8/18/2011	12:23:17 AM	PH3 valve closed
8/18/2011	12:23:17 AM	SiCl4 pre valve closed
8/18/2011	12:23:17 AM	SiCl4 post valve closed
8/18/2011	12:23:17 AM	Bypass valve closed
8/18/2011	12:23:17 AM	Bubbler valve closed
8/18/2011	12:23:17 AM	Helium valve opened
8/18/2011	12:23:17 AM	Main Vac valve opened
8/18/2011	12:23:17 AM	Helium MFC set to  20.000000
8/18/2011	12:23:17 AM	H2 MFC set to  0.000000
8/18/2011	12:23:17 AM	BCl3 MFC set to  0.000000
8/18/2011	12:23:17 AM	PHl3 MFC set to  0.000000
8/18/2011	12:23:17 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:23:17 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:23:17 AM	Tube furnace set to 0
8/18/2011	12:23:47 AM	Helium valve closed
8/18/2011	12:23:47 AM	H2 valve closed
8/18/2011	12:23:47 AM	BCl3 valve closed
8/18/2011	12:23:47 AM	PH3 valve closed
8/18/2011	12:23:47 AM	SiCl4 pre valve closed
8/18/2011	12:23:47 AM	SiCl4 post valve closed
8/18/2011	12:23:47 AM	Bypass valve closed
8/18/2011	12:23:47 AM	Bubbler valve closed
8/18/2011	12:23:47 AM	Main Vac valve opened
8/18/2011	12:23:47 AM	Helium MFC set to  0.000000
8/18/2011	12:23:47 AM	H2 MFC set to  0.000000
8/18/2011	12:23:47 AM	BCl3 MFC set to  0.000000
8/18/2011	12:23:47 AM	PHl3 MFC set to  0.000000
8/18/2011	12:23:47 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:23:47 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:23:47 AM	Tube furnace set to 0
8/18/2011	12:24:17 AM	H2 valve closed
8/18/2011	12:24:17 AM	BCl3 valve closed
8/18/2011	12:24:17 AM	PH3 valve closed
8/18/2011	12:24:17 AM	SiCl4 pre valve closed
8/18/2011	12:24:17 AM	SiCl4 post valve closed
8/18/2011	12:24:17 AM	Bypass valve closed
8/18/2011	12:24:17 AM	Bubbler valve closed
8/18/2011	12:24:17 AM	Helium valve opened
8/18/2011	12:24:17 AM	Main Vac valve opened
8/18/2011	12:24:17 AM	Helium MFC set to  20.000000
8/18/2011	12:24:17 AM	H2 MFC set to  0.000000
8/18/2011	12:24:17 AM	BCl3 MFC set to  0.000000
8/18/2011	12:24:17 AM	PHl3 MFC set to  0.000000
8/18/2011	12:24:17 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:24:17 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:24:18 AM	Tube furnace set to 0
8/18/2011	12:24:48 AM	Helium valve closed
8/18/2011	12:24:48 AM	H2 valve closed
8/18/2011	12:24:48 AM	BCl3 valve closed
8/18/2011	12:24:48 AM	PH3 valve closed
8/18/2011	12:24:48 AM	SiCl4 pre valve closed
8/18/2011	12:24:48 AM	SiCl4 post valve closed
8/18/2011	12:24:48 AM	Bypass valve closed
8/18/2011	12:24:48 AM	Bubbler valve closed
8/18/2011	12:24:48 AM	Main Vac valve opened
8/18/2011	12:24:48 AM	Helium MFC set to  0.000000
8/18/2011	12:24:48 AM	H2 MFC set to  0.000000
8/18/2011	12:24:48 AM	BCl3 MFC set to  0.000000
8/18/2011	12:24:48 AM	PHl3 MFC set to  0.000000
8/18/2011	12:24:48 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:24:48 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:24:48 AM	Tube furnace set to 0
8/18/2011	12:25:18 AM	H2 valve closed
8/18/2011	12:25:18 AM	BCl3 valve closed
8/18/2011	12:25:18 AM	PH3 valve closed
8/18/2011	12:25:18 AM	SiCl4 pre valve closed
8/18/2011	12:25:18 AM	SiCl4 post valve closed
8/18/2011	12:25:18 AM	Bypass valve closed
8/18/2011	12:25:18 AM	Bubbler valve closed
8/18/2011	12:25:18 AM	Helium valve opened
8/18/2011	12:25:18 AM	Main Vac valve opened
8/18/2011	12:25:18 AM	Helium MFC set to  20.000000
8/18/2011	12:25:18 AM	H2 MFC set to  0.000000
8/18/2011	12:25:18 AM	BCl3 MFC set to  0.000000
8/18/2011	12:25:18 AM	PHl3 MFC set to  0.000000
8/18/2011	12:25:18 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:25:18 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:25:18 AM	Tube furnace set to 0
8/18/2011	12:25:48 AM	Helium valve closed
8/18/2011	12:25:48 AM	H2 valve closed
8/18/2011	12:25:48 AM	BCl3 valve closed
8/18/2011	12:25:48 AM	PH3 valve closed
8/18/2011	12:25:48 AM	SiCl4 pre valve closed
8/18/2011	12:25:48 AM	SiCl4 post valve closed
8/18/2011	12:25:48 AM	Bypass valve closed
8/18/2011	12:25:48 AM	Bubbler valve closed
8/18/2011	12:25:48 AM	Main Vac valve opened
8/18/2011	12:25:48 AM	Helium MFC set to  0.000000
8/18/2011	12:25:48 AM	H2 MFC set to  0.000000
8/18/2011	12:25:48 AM	BCl3 MFC set to  0.000000
8/18/2011	12:25:48 AM	PHl3 MFC set to  0.000000
8/18/2011	12:25:48 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:25:48 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:25:48 AM	Tube furnace set to 200
8/18/2011	12:26:18 AM	H2 valve closed
8/18/2011	12:26:18 AM	BCl3 valve closed
8/18/2011	12:26:18 AM	PH3 valve closed
8/18/2011	12:26:18 AM	SiCl4 pre valve closed
8/18/2011	12:26:18 AM	SiCl4 post valve closed
8/18/2011	12:26:18 AM	Bypass valve closed
8/18/2011	12:26:18 AM	Bubbler valve closed
8/18/2011	12:26:18 AM	Helium valve opened
8/18/2011	12:26:18 AM	Main Vac valve opened
8/18/2011	12:26:18 AM	Helium MFC set to  20.000000
8/18/2011	12:26:18 AM	H2 MFC set to  0.000000
8/18/2011	12:26:18 AM	BCl3 MFC set to  0.000000
8/18/2011	12:26:18 AM	PHl3 MFC set to  0.000000
8/18/2011	12:26:18 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:26:18 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:26:18 AM	Tube furnace set to 200
8/18/2011	12:26:48 AM	Helium valve closed
8/18/2011	12:26:48 AM	H2 valve closed
8/18/2011	12:26:48 AM	BCl3 valve closed
8/18/2011	12:26:48 AM	PH3 valve closed
8/18/2011	12:26:48 AM	SiCl4 pre valve closed
8/18/2011	12:26:48 AM	SiCl4 post valve closed
8/18/2011	12:26:48 AM	Bypass valve closed
8/18/2011	12:26:48 AM	Bubbler valve closed
8/18/2011	12:26:49 AM	Main Vac valve opened
8/18/2011	12:26:49 AM	Helium MFC set to  0.000000
8/18/2011	12:26:49 AM	H2 MFC set to  0.000000
8/18/2011	12:26:49 AM	BCl3 MFC set to  0.000000
8/18/2011	12:26:49 AM	PHl3 MFC set to  0.000000
8/18/2011	12:26:49 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:26:49 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:26:49 AM	Tube furnace set to 200
8/18/2011	12:27:19 AM	H2 valve closed
8/18/2011	12:27:19 AM	BCl3 valve closed
8/18/2011	12:27:19 AM	PH3 valve closed
8/18/2011	12:27:19 AM	SiCl4 pre valve closed
8/18/2011	12:27:19 AM	SiCl4 post valve closed
8/18/2011	12:27:19 AM	Bypass valve closed
8/18/2011	12:27:19 AM	Bubbler valve closed
8/18/2011	12:27:19 AM	Helium valve opened
8/18/2011	12:27:19 AM	Main Vac valve opened
8/18/2011	12:27:19 AM	Helium MFC set to  20.000000
8/18/2011	12:27:19 AM	H2 MFC set to  0.000000
8/18/2011	12:27:19 AM	BCl3 MFC set to  0.000000
8/18/2011	12:27:19 AM	PHl3 MFC set to  0.000000
8/18/2011	12:27:19 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:27:19 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:27:19 AM	Tube furnace set to 200
8/18/2011	12:27:49 AM	Helium valve closed
8/18/2011	12:27:49 AM	H2 valve closed
8/18/2011	12:27:49 AM	BCl3 valve closed
8/18/2011	12:27:49 AM	PH3 valve closed
8/18/2011	12:27:49 AM	SiCl4 pre valve closed
8/18/2011	12:27:49 AM	SiCl4 post valve closed
8/18/2011	12:27:49 AM	Bypass valve closed
8/18/2011	12:27:49 AM	Bubbler valve closed
8/18/2011	12:27:49 AM	Main Vac valve opened
8/18/2011	12:27:49 AM	Helium MFC set to  0.000000
8/18/2011	12:27:49 AM	H2 MFC set to  0.000000
8/18/2011	12:27:49 AM	BCl3 MFC set to  0.000000
8/18/2011	12:27:49 AM	PHl3 MFC set to  0.000000
8/18/2011	12:27:49 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:27:49 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:27:49 AM	Tube furnace set to 200
8/18/2011	12:28:19 AM	H2 valve closed
8/18/2011	12:28:19 AM	BCl3 valve closed
8/18/2011	12:28:19 AM	PH3 valve closed
8/18/2011	12:28:19 AM	SiCl4 pre valve closed
8/18/2011	12:28:19 AM	SiCl4 post valve closed
8/18/2011	12:28:19 AM	Bypass valve closed
8/18/2011	12:28:19 AM	Bubbler valve closed
8/18/2011	12:28:19 AM	Helium valve opened
8/18/2011	12:28:19 AM	Main Vac valve opened
8/18/2011	12:28:19 AM	Helium MFC set to  20.000000
8/18/2011	12:28:19 AM	H2 MFC set to  0.000000
8/18/2011	12:28:19 AM	BCl3 MFC set to  0.000000
8/18/2011	12:28:19 AM	PHl3 MFC set to  0.000000
8/18/2011	12:28:19 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:28:19 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:28:19 AM	Tube furnace set to 200
8/18/2011	12:28:49 AM	Helium valve closed
8/18/2011	12:28:49 AM	H2 valve closed
8/18/2011	12:28:49 AM	BCl3 valve closed
8/18/2011	12:28:49 AM	PH3 valve closed
8/18/2011	12:28:49 AM	SiCl4 pre valve closed
8/18/2011	12:28:49 AM	SiCl4 post valve closed
8/18/2011	12:28:49 AM	Bypass valve closed
8/18/2011	12:28:49 AM	Bubbler valve closed
8/18/2011	12:28:49 AM	Main Vac valve opened
8/18/2011	12:28:49 AM	Helium MFC set to  0.000000
8/18/2011	12:28:49 AM	H2 MFC set to  0.000000
8/18/2011	12:28:49 AM	BCl3 MFC set to  0.000000
8/18/2011	12:28:49 AM	PHl3 MFC set to  0.000000
8/18/2011	12:28:49 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:28:49 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:28:50 AM	Tube furnace set to 200
8/18/2011	12:29:20 AM	H2 valve closed
8/18/2011	12:29:20 AM	BCl3 valve closed
8/18/2011	12:29:20 AM	PH3 valve closed
8/18/2011	12:29:20 AM	SiCl4 pre valve closed
8/18/2011	12:29:20 AM	SiCl4 post valve closed
8/18/2011	12:29:20 AM	Bypass valve closed
8/18/2011	12:29:20 AM	Bubbler valve closed
8/18/2011	12:29:20 AM	Helium valve opened
8/18/2011	12:29:20 AM	Main Vac valve opened
8/18/2011	12:29:20 AM	Helium MFC set to  20.000000
8/18/2011	12:29:20 AM	H2 MFC set to  0.000000
8/18/2011	12:29:20 AM	BCl3 MFC set to  0.000000
8/18/2011	12:29:20 AM	PHl3 MFC set to  0.000000
8/18/2011	12:29:20 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:29:20 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:29:20 AM	Tube furnace set to 200
8/18/2011	12:29:50 AM	Helium valve closed
8/18/2011	12:29:50 AM	H2 valve closed
8/18/2011	12:29:50 AM	BCl3 valve closed
8/18/2011	12:29:50 AM	PH3 valve closed
8/18/2011	12:29:50 AM	SiCl4 pre valve closed
8/18/2011	12:29:50 AM	SiCl4 post valve closed
8/18/2011	12:29:50 AM	Bypass valve closed
8/18/2011	12:29:50 AM	Bubbler valve closed
8/18/2011	12:29:50 AM	Main Vac valve opened
8/18/2011	12:29:50 AM	Helium MFC set to  0.000000
8/18/2011	12:29:50 AM	H2 MFC set to  0.000000
8/18/2011	12:29:50 AM	BCl3 MFC set to  0.000000
8/18/2011	12:29:50 AM	PHl3 MFC set to  0.000000
8/18/2011	12:29:50 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:29:50 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:29:50 AM	Tube furnace set to 200
8/18/2011	12:30:20 AM	H2 valve closed
8/18/2011	12:30:20 AM	BCl3 valve closed
8/18/2011	12:30:20 AM	PH3 valve closed
8/18/2011	12:30:20 AM	SiCl4 pre valve closed
8/18/2011	12:30:20 AM	SiCl4 post valve closed
8/18/2011	12:30:20 AM	Bypass valve closed
8/18/2011	12:30:20 AM	Bubbler valve closed
8/18/2011	12:30:20 AM	Helium valve opened
8/18/2011	12:30:20 AM	Main Vac valve opened
8/18/2011	12:30:20 AM	Helium MFC set to  20.000000
8/18/2011	12:30:20 AM	H2 MFC set to  0.000000
8/18/2011	12:30:20 AM	BCl3 MFC set to  0.000000
8/18/2011	12:30:20 AM	PHl3 MFC set to  0.000000
8/18/2011	12:30:20 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:30:20 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:30:20 AM	Tube furnace set to 200
8/18/2011	12:30:50 AM	Helium valve closed
8/18/2011	12:30:50 AM	H2 valve closed
8/18/2011	12:30:50 AM	BCl3 valve closed
8/18/2011	12:30:50 AM	PH3 valve closed
8/18/2011	12:30:50 AM	SiCl4 pre valve closed
8/18/2011	12:30:50 AM	SiCl4 post valve closed
8/18/2011	12:30:50 AM	Bypass valve closed
8/18/2011	12:30:50 AM	Bubbler valve closed
8/18/2011	12:30:50 AM	Main Vac valve opened
8/18/2011	12:30:50 AM	Helium MFC set to  0.000000
8/18/2011	12:30:50 AM	H2 MFC set to  0.000000
8/18/2011	12:30:50 AM	BCl3 MFC set to  0.000000
8/18/2011	12:30:50 AM	PHl3 MFC set to  0.000000
8/18/2011	12:30:50 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:30:50 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:30:50 AM	Tube furnace set to 200
8/18/2011	12:31:20 AM	H2 valve closed
8/18/2011	12:31:20 AM	BCl3 valve closed
8/18/2011	12:31:20 AM	PH3 valve closed
8/18/2011	12:31:20 AM	SiCl4 pre valve closed
8/18/2011	12:31:20 AM	SiCl4 post valve closed
8/18/2011	12:31:20 AM	Bypass valve closed
8/18/2011	12:31:20 AM	Bubbler valve closed
8/18/2011	12:31:20 AM	Helium valve opened
8/18/2011	12:31:20 AM	Main Vac valve opened
8/18/2011	12:31:20 AM	Helium MFC set to  20.000000
8/18/2011	12:31:20 AM	H2 MFC set to  0.000000
8/18/2011	12:31:20 AM	BCl3 MFC set to  0.000000
8/18/2011	12:31:20 AM	PHl3 MFC set to  0.000000
8/18/2011	12:31:20 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:31:20 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:31:21 AM	Tube furnace set to 200
8/18/2011	12:31:51 AM	Helium valve closed
8/18/2011	12:31:51 AM	H2 valve closed
8/18/2011	12:31:51 AM	BCl3 valve closed
8/18/2011	12:31:51 AM	PH3 valve closed
8/18/2011	12:31:51 AM	SiCl4 pre valve closed
8/18/2011	12:31:51 AM	SiCl4 post valve closed
8/18/2011	12:31:51 AM	Bypass valve closed
8/18/2011	12:31:51 AM	Bubbler valve closed
8/18/2011	12:31:51 AM	Main Vac valve opened
8/18/2011	12:31:51 AM	Helium MFC set to  0.000000
8/18/2011	12:31:51 AM	H2 MFC set to  0.000000
8/18/2011	12:31:51 AM	BCl3 MFC set to  0.000000
8/18/2011	12:31:51 AM	PHl3 MFC set to  0.000000
8/18/2011	12:31:51 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:31:51 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:31:51 AM	Tube furnace set to 0
8/18/2011	12:31:52 AM	Run finished at 12:31 AM
8/18/2011	12:43:11 AM	Main Vac valve closed
8/18/2011	12:43:21 AM	Main Vac valve opened
8/18/2011	12:44:14 AM	Recipe started at 12:44 AM
8/18/2011	12:44:14 AM	Helium valve closed
8/18/2011	12:44:14 AM	H2 valve closed
8/18/2011	12:44:14 AM	BCl3 valve closed
8/18/2011	12:44:14 AM	PH3 valve closed
8/18/2011	12:44:14 AM	SiCl4 pre valve closed
8/18/2011	12:44:14 AM	SiCl4 post valve closed
8/18/2011	12:44:14 AM	Main Vac valve closed
8/18/2011	12:44:14 AM	Bypass valve closed
8/18/2011	12:44:14 AM	Bubbler valve closed
8/18/2011	12:44:14 AM	Helium MFC set to  0.000000
8/18/2011	12:44:14 AM	H2 MFC set to  0.000000
8/18/2011	12:44:14 AM	BCl3 MFC set to  0.000000
8/18/2011	12:44:14 AM	PHl3 MFC set to  0.000000
8/18/2011	12:44:14 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:44:14 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:44:14 AM	Tube furnace set to 0
8/18/2011	12:44:17 AM	Helium valve closed
8/18/2011	12:44:17 AM	BCl3 valve closed
8/18/2011	12:44:17 AM	PH3 valve closed
8/18/2011	12:44:17 AM	SiCl4 pre valve closed
8/18/2011	12:44:17 AM	SiCl4 post valve closed
8/18/2011	12:44:17 AM	Main Vac valve closed
8/18/2011	12:44:17 AM	Bypass valve closed
8/18/2011	12:44:17 AM	Bubbler valve closed
8/18/2011	12:44:17 AM	H2 valve opened
8/18/2011	12:44:17 AM	Helium MFC set to  0.000000
8/18/2011	12:44:17 AM	H2 MFC set to  500.000000
8/18/2011	12:44:17 AM	BCl3 MFC set to  0.000000
8/18/2011	12:44:17 AM	PHl3 MFC set to  0.000000
8/18/2011	12:44:17 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:44:17 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:44:18 AM	Tube furnace set to 0
8/18/2011	12:45:21 AM	Helium valve closed
8/18/2011	12:45:21 AM	BCl3 valve closed
8/18/2011	12:45:21 AM	PH3 valve closed
8/18/2011	12:45:21 AM	SiCl4 pre valve closed
8/18/2011	12:45:21 AM	SiCl4 post valve closed
8/18/2011	12:45:21 AM	Main Vac valve closed
8/18/2011	12:45:21 AM	Bypass valve closed
8/18/2011	12:45:21 AM	H2 valve opened
8/18/2011	12:45:21 AM	Bubbler valve opened
8/18/2011	12:45:21 AM	Helium MFC set to  0.000000
8/18/2011	12:45:21 AM	H2 MFC set to  500.000000
8/18/2011	12:45:21 AM	BCl3 MFC set to  0.000000
8/18/2011	12:45:21 AM	PHl3 MFC set to  0.000000
8/18/2011	12:45:21 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:45:21 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:45:21 AM	Tube furnace set to 0
8/18/2011	12:45:22 AM	Helium valve closed
8/18/2011	12:45:22 AM	BCl3 valve closed
8/18/2011	12:45:22 AM	PH3 valve closed
8/18/2011	12:45:22 AM	SiCl4 pre valve closed
8/18/2011	12:45:22 AM	SiCl4 post valve closed
8/18/2011	12:45:22 AM	Main Vac valve closed
8/18/2011	12:45:22 AM	Bypass valve closed
8/18/2011	12:45:22 AM	H2 valve opened
8/18/2011	12:45:22 AM	Bubbler valve opened
8/18/2011	12:45:22 AM	Helium MFC set to  0.000000
8/18/2011	12:45:22 AM	H2 MFC set to  500.000000
8/18/2011	12:45:22 AM	BCl3 MFC set to  0.000000
8/18/2011	12:45:22 AM	PHl3 MFC set to  0.000000
8/18/2011	12:45:22 AM	SiCl4 MFC set to  0.000000
8/18/2011	12:45:22 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:45:22 AM	Tube furnace set to 1000
8/18/2011	1:05:22 AM	Helium valve closed
8/18/2011	1:05:22 AM	BCl3 valve closed
8/18/2011	1:05:22 AM	Main Vac valve closed
8/18/2011	1:05:22 AM	Bypass valve closed
8/18/2011	1:05:22 AM	H2 valve opened
8/18/2011	1:05:22 AM	PH3 valve opened
8/18/2011	1:05:22 AM	SiCl4 pre valve opened
8/18/2011	1:05:22 AM	SiCl4 post valve opened
8/18/2011	1:05:22 AM	Bubbler valve opened
8/18/2011	1:05:22 AM	Helium MFC set to  0.000000
8/18/2011	1:05:22 AM	H2 MFC set to  500.000000
8/18/2011	1:05:22 AM	BCl3 MFC set to  0.000000
8/18/2011	1:05:22 AM	PHl3 MFC set to  1.000000
8/18/2011	1:05:22 AM	SiCl4 MFC set to  50.000000
8/18/2011	1:05:22 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:05:22 AM	Tube furnace set to 1000
8/18/2011	1:20:22 AM	Helium valve closed
8/18/2011	1:20:22 AM	BCl3 valve closed
8/18/2011	1:20:22 AM	PH3 valve closed
8/18/2011	1:20:22 AM	SiCl4 pre valve closed
8/18/2011	1:20:22 AM	SiCl4 post valve closed
8/18/2011	1:20:22 AM	Main Vac valve closed
8/18/2011	1:20:22 AM	Bypass valve closed
8/18/2011	1:20:22 AM	H2 valve opened
8/18/2011	1:20:22 AM	Bubbler valve opened
8/18/2011	1:20:22 AM	Helium MFC set to  0.000000
8/18/2011	1:20:22 AM	H2 MFC set to  500.000000
8/18/2011	1:20:22 AM	BCl3 MFC set to  0.000000
8/18/2011	1:20:22 AM	PHl3 MFC set to  0.000000
8/18/2011	1:20:22 AM	SiCl4 MFC set to  0.000000
8/18/2011	1:20:22 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:20:22 AM	Tube furnace set to 950
8/18/2011	1:22:23 AM	Helium valve closed
8/18/2011	1:22:23 AM	BCl3 valve closed
8/18/2011	1:22:23 AM	PH3 valve closed
8/18/2011	1:22:23 AM	SiCl4 pre valve closed
8/18/2011	1:22:23 AM	SiCl4 post valve closed
8/18/2011	1:22:23 AM	Main Vac valve closed
8/18/2011	1:22:23 AM	Bypass valve closed
8/18/2011	1:22:23 AM	H2 valve opened
8/18/2011	1:22:23 AM	Bubbler valve opened
8/18/2011	1:22:23 AM	Helium MFC set to  0.000000
8/18/2011	1:22:23 AM	H2 MFC set to  500.000000
8/18/2011	1:22:23 AM	BCl3 MFC set to  0.000000
8/18/2011	1:22:23 AM	PHl3 MFC set to  0.000000
8/18/2011	1:22:23 AM	SiCl4 MFC set to  0.000000
8/18/2011	1:22:23 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:22:23 AM	Tube furnace set to 900
8/18/2011	1:24:23 AM	Helium valve closed
8/18/2011	1:24:23 AM	BCl3 valve closed
8/18/2011	1:24:23 AM	PH3 valve closed
8/18/2011	1:24:23 AM	SiCl4 pre valve closed
8/18/2011	1:24:23 AM	SiCl4 post valve closed
8/18/2011	1:24:23 AM	Main Vac valve closed
8/18/2011	1:24:23 AM	Bypass valve closed
8/18/2011	1:24:23 AM	H2 valve opened
8/18/2011	1:24:23 AM	Bubbler valve opened
8/18/2011	1:24:23 AM	Helium MFC set to  0.000000
8/18/2011	1:24:23 AM	H2 MFC set to  500.000000
8/18/2011	1:24:23 AM	BCl3 MFC set to  0.000000
8/18/2011	1:24:23 AM	PHl3 MFC set to  0.000000
8/18/2011	1:24:23 AM	SiCl4 MFC set to  0.000000
8/18/2011	1:24:23 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:24:23 AM	Tube furnace set to 850
8/18/2011	1:26:23 AM	H2 valve closed
8/18/2011	1:26:23 AM	BCl3 valve closed
8/18/2011	1:26:23 AM	PH3 valve closed
8/18/2011	1:26:23 AM	SiCl4 pre valve closed
8/18/2011	1:26:23 AM	SiCl4 post valve closed
8/18/2011	1:26:23 AM	Main Vac valve closed
8/18/2011	1:26:23 AM	Bypass valve closed
8/18/2011	1:26:23 AM	Helium valve opened
8/18/2011	1:26:23 AM	Bubbler valve opened
8/18/2011	1:26:23 AM	Helium MFC set to  500.000000
8/18/2011	1:26:23 AM	H2 MFC set to  0.000000
8/18/2011	1:26:23 AM	BCl3 MFC set to  0.000000
8/18/2011	1:26:23 AM	PHl3 MFC set to  0.000000
8/18/2011	1:26:23 AM	SiCl4 MFC set to  0.000000
8/18/2011	1:26:23 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:26:23 AM	Tube furnace set to 800
8/18/2011	1:28:23 AM	H2 valve closed
8/18/2011	1:28:23 AM	BCl3 valve closed
8/18/2011	1:28:23 AM	PH3 valve closed
8/18/2011	1:28:23 AM	SiCl4 pre valve closed
8/18/2011	1:28:23 AM	SiCl4 post valve closed
8/18/2011	1:28:23 AM	Main Vac valve closed
8/18/2011	1:28:23 AM	Bypass valve closed
8/18/2011	1:28:23 AM	Helium valve opened
8/18/2011	1:28:23 AM	Bubbler valve opened
8/18/2011	1:28:23 AM	Helium MFC set to  500.000000
8/18/2011	1:28:23 AM	H2 MFC set to  0.000000
8/18/2011	1:28:23 AM	BCl3 MFC set to  0.000000
8/18/2011	1:28:23 AM	PHl3 MFC set to  0.000000
8/18/2011	1:28:23 AM	SiCl4 MFC set to  0.000000
8/18/2011	1:28:23 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:28:23 AM	Tube furnace set to 750
8/18/2011	1:30:23 AM	H2 valve closed
8/18/2011	1:30:23 AM	BCl3 valve closed
8/18/2011	1:30:23 AM	PH3 valve closed
8/18/2011	1:30:23 AM	SiCl4 pre valve closed
8/18/2011	1:30:23 AM	SiCl4 post valve closed
8/18/2011	1:30:23 AM	Main Vac valve closed
8/18/2011	1:30:23 AM	Bypass valve closed
8/18/2011	1:30:23 AM	Helium valve opened
8/18/2011	1:30:23 AM	Bubbler valve opened
8/18/2011	1:30:23 AM	Helium MFC set to  500.000000
8/18/2011	1:30:23 AM	H2 MFC set to  0.000000
8/18/2011	1:30:23 AM	BCl3 MFC set to  0.000000
8/18/2011	1:30:23 AM	PHl3 MFC set to  0.000000
8/18/2011	1:30:23 AM	SiCl4 MFC set to  0.000000
8/18/2011	1:30:23 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:30:23 AM	Tube furnace set to 0
8/18/2011	1:50:23 AM	Helium valve closed
8/18/2011	1:50:23 AM	H2 valve closed
8/18/2011	1:50:23 AM	BCl3 valve closed
8/18/2011	1:50:23 AM	PH3 valve closed
8/18/2011	1:50:23 AM	SiCl4 pre valve closed
8/18/2011	1:50:23 AM	SiCl4 post valve closed
8/18/2011	1:50:23 AM	Main Vac valve closed
8/18/2011	1:50:23 AM	Bypass valve closed
8/18/2011	1:50:23 AM	Bubbler valve closed
8/18/2011	1:50:23 AM	Helium MFC set to  0.000000
8/18/2011	1:50:23 AM	H2 MFC set to  0.000000
8/18/2011	1:50:23 AM	BCl3 MFC set to  0.000000
8/18/2011	1:50:23 AM	PHl3 MFC set to  0.000000
8/18/2011	1:50:23 AM	SiCl4 MFC set to  0.000000
8/18/2011	1:50:23 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:50:24 AM	Tube furnace set to 0
8/18/2011	1:50:25 AM	Run finished at 1:50 AM
8/18/2011	2:00:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2011	2:00:41 AM	Recipe started at 2:00 AM
8/18/2011	2:00:41 AM	Helium valve closed
8/18/2011	2:00:41 AM	H2 valve closed
8/18/2011	2:00:41 AM	BCl3 valve closed
8/18/2011	2:00:41 AM	PH3 valve closed
8/18/2011	2:00:41 AM	SiCl4 pre valve closed
8/18/2011	2:00:41 AM	SiCl4 post valve closed
8/18/2011	2:00:41 AM	Main Vac valve closed
8/18/2011	2:00:41 AM	Bypass valve closed
8/18/2011	2:00:41 AM	Bubbler valve closed
8/18/2011	2:00:41 AM	Helium MFC set to  0.000000
8/18/2011	2:00:41 AM	H2 MFC set to  0.000000
8/18/2011	2:00:41 AM	BCl3 MFC set to  0.000000
8/18/2011	2:00:41 AM	PHl3 MFC set to  0.000000
8/18/2011	2:00:41 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:00:41 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:00:41 AM	Tube furnace set to 0
8/18/2011	2:00:44 AM	H2 valve closed
8/18/2011	2:00:44 AM	BCl3 valve closed
8/18/2011	2:00:44 AM	PH3 valve closed
8/18/2011	2:00:44 AM	SiCl4 pre valve closed
8/18/2011	2:00:44 AM	SiCl4 post valve closed
8/18/2011	2:00:44 AM	Main Vac valve closed
8/18/2011	2:00:44 AM	Bypass valve closed
8/18/2011	2:00:44 AM	Bubbler valve closed
8/18/2011	2:00:44 AM	Helium valve opened
8/18/2011	2:00:44 AM	Helium MFC set to  500.000000
8/18/2011	2:00:44 AM	H2 MFC set to  0.000000
8/18/2011	2:00:44 AM	BCl3 MFC set to  0.000000
8/18/2011	2:00:44 AM	PHl3 MFC set to  0.000000
8/18/2011	2:00:44 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:00:44 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:00:44 AM	Tube furnace set to 0
8/18/2011	2:00:47 AM	Helium valve closed
8/18/2011	2:00:47 AM	H2 valve closed
8/18/2011	2:00:47 AM	BCl3 valve closed
8/18/2011	2:00:47 AM	PH3 valve closed
8/18/2011	2:00:47 AM	SiCl4 pre valve closed
8/18/2011	2:00:47 AM	SiCl4 post valve closed
8/18/2011	2:00:47 AM	Main Vac valve closed
8/18/2011	2:00:47 AM	Bypass valve closed
8/18/2011	2:00:47 AM	Bubbler valve closed
8/18/2011	2:00:47 AM	Helium MFC set to  0.000000
8/18/2011	2:00:47 AM	H2 MFC set to  0.000000
8/18/2011	2:00:47 AM	BCl3 MFC set to  0.000000
8/18/2011	2:00:47 AM	PHl3 MFC set to  0.000000
8/18/2011	2:00:47 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:00:47 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:00:47 AM	Tube furnace set to 0
8/18/2011	2:00:48 AM	Run finished at 2:00 AM
8/18/2011	2:00:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2011	2:02:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2011	2:02:39 AM	Recipe started at 2:02 AM
8/18/2011	2:02:39 AM	Helium valve closed
8/18/2011	2:02:39 AM	H2 valve closed
8/18/2011	2:02:39 AM	BCl3 valve closed
8/18/2011	2:02:39 AM	PH3 valve closed
8/18/2011	2:02:39 AM	SiCl4 pre valve closed
8/18/2011	2:02:39 AM	SiCl4 post valve closed
8/18/2011	2:02:39 AM	Main Vac valve closed
8/18/2011	2:02:39 AM	Bubbler valve closed
8/18/2011	2:02:39 AM	Bypass valve opened
8/18/2011	2:02:39 AM	Helium MFC set to  0.000000
8/18/2011	2:02:39 AM	H2 MFC set to  0.000000
8/18/2011	2:02:39 AM	BCl3 MFC set to  0.000000
8/18/2011	2:02:39 AM	PHl3 MFC set to  0.000000
8/18/2011	2:02:39 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:02:39 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:02:40 AM	Tube furnace set to 0
8/18/2011	2:03:41 AM	Helium valve closed
8/18/2011	2:03:41 AM	H2 valve closed
8/18/2011	2:03:41 AM	BCl3 valve closed
8/18/2011	2:03:41 AM	PH3 valve closed
8/18/2011	2:03:41 AM	SiCl4 pre valve closed
8/18/2011	2:03:41 AM	SiCl4 post valve closed
8/18/2011	2:03:41 AM	Main Vac valve closed
8/18/2011	2:03:41 AM	Bubbler valve closed
8/18/2011	2:03:41 AM	Bypass valve opened
8/18/2011	2:03:41 AM	Helium MFC set to  0.000000
8/18/2011	2:03:41 AM	H2 MFC set to  0.000000
8/18/2011	2:03:41 AM	BCl3 MFC set to  0.000000
8/18/2011	2:03:41 AM	PHl3 MFC set to  0.000000
8/18/2011	2:03:41 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:03:41 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:03:41 AM	Tube furnace set to 0
8/18/2011	2:04:41 AM	Helium valve closed
8/18/2011	2:04:41 AM	H2 valve closed
8/18/2011	2:04:41 AM	BCl3 valve closed
8/18/2011	2:04:41 AM	PH3 valve closed
8/18/2011	2:04:41 AM	SiCl4 pre valve closed
8/18/2011	2:04:41 AM	SiCl4 post valve closed
8/18/2011	2:04:41 AM	Bypass valve closed
8/18/2011	2:04:41 AM	Bubbler valve closed
8/18/2011	2:04:41 AM	Main Vac valve opened
8/18/2011	2:04:41 AM	Helium MFC set to  0.000000
8/18/2011	2:04:41 AM	H2 MFC set to  0.000000
8/18/2011	2:04:41 AM	BCl3 MFC set to  0.000000
8/18/2011	2:04:41 AM	PHl3 MFC set to  0.000000
8/18/2011	2:04:41 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:04:41 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:04:42 AM	Tube furnace set to 0
8/18/2011	2:04:43 AM	Run finished at 2:04 AM
8/18/2011	2:04:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2011	2:22:04 AM	Recipe started at 2:21 AM
8/18/2011	2:22:04 AM	Helium valve closed
8/18/2011	2:22:04 AM	H2 valve closed
8/18/2011	2:22:04 AM	BCl3 valve closed
8/18/2011	2:22:04 AM	PH3 valve closed
8/18/2011	2:22:04 AM	SiCl4 pre valve closed
8/18/2011	2:22:04 AM	SiCl4 post valve closed
8/18/2011	2:22:04 AM	Bypass valve closed
8/18/2011	2:22:04 AM	Bubbler valve closed
8/18/2011	2:22:04 AM	Main Vac valve opened
8/18/2011	2:22:04 AM	Helium MFC set to  0.000000
8/18/2011	2:22:04 AM	H2 MFC set to  0.000000
8/18/2011	2:22:04 AM	BCl3 MFC set to  0.000000
8/18/2011	2:22:04 AM	PHl3 MFC set to  0.000000
8/18/2011	2:22:04 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:22:04 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:22:04 AM	Tube furnace set to 0
8/18/2011	2:22:34 AM	H2 valve closed
8/18/2011	2:22:34 AM	BCl3 valve closed
8/18/2011	2:22:34 AM	PH3 valve closed
8/18/2011	2:22:34 AM	SiCl4 pre valve closed
8/18/2011	2:22:34 AM	SiCl4 post valve closed
8/18/2011	2:22:34 AM	Bypass valve closed
8/18/2011	2:22:34 AM	Bubbler valve closed
8/18/2011	2:22:34 AM	Helium valve opened
8/18/2011	2:22:34 AM	Main Vac valve opened
8/18/2011	2:22:34 AM	Helium MFC set to  20.000000
8/18/2011	2:22:34 AM	H2 MFC set to  0.000000
8/18/2011	2:22:34 AM	BCl3 MFC set to  0.000000
8/18/2011	2:22:34 AM	PHl3 MFC set to  0.000000
8/18/2011	2:22:34 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:22:34 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:22:34 AM	Tube furnace set to 0
8/18/2011	2:23:04 AM	Helium valve closed
8/18/2011	2:23:04 AM	H2 valve closed
8/18/2011	2:23:04 AM	BCl3 valve closed
8/18/2011	2:23:04 AM	PH3 valve closed
8/18/2011	2:23:04 AM	SiCl4 pre valve closed
8/18/2011	2:23:04 AM	SiCl4 post valve closed
8/18/2011	2:23:04 AM	Bypass valve closed
8/18/2011	2:23:04 AM	Bubbler valve closed
8/18/2011	2:23:04 AM	Main Vac valve opened
8/18/2011	2:23:04 AM	Helium MFC set to  0.000000
8/18/2011	2:23:04 AM	H2 MFC set to  0.000000
8/18/2011	2:23:04 AM	BCl3 MFC set to  0.000000
8/18/2011	2:23:04 AM	PHl3 MFC set to  0.000000
8/18/2011	2:23:04 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:23:04 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:23:04 AM	Tube furnace set to 0
8/18/2011	2:23:34 AM	H2 valve closed
8/18/2011	2:23:34 AM	BCl3 valve closed
8/18/2011	2:23:34 AM	PH3 valve closed
8/18/2011	2:23:34 AM	SiCl4 pre valve closed
8/18/2011	2:23:34 AM	SiCl4 post valve closed
8/18/2011	2:23:34 AM	Bypass valve closed
8/18/2011	2:23:34 AM	Bubbler valve closed
8/18/2011	2:23:34 AM	Helium valve opened
8/18/2011	2:23:34 AM	Main Vac valve opened
8/18/2011	2:23:34 AM	Helium MFC set to  20.000000
8/18/2011	2:23:34 AM	H2 MFC set to  0.000000
8/18/2011	2:23:34 AM	BCl3 MFC set to  0.000000
8/18/2011	2:23:34 AM	PHl3 MFC set to  0.000000
8/18/2011	2:23:34 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:23:34 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:23:34 AM	Tube furnace set to 0
8/18/2011	2:24:04 AM	Helium valve closed
8/18/2011	2:24:04 AM	H2 valve closed
8/18/2011	2:24:04 AM	BCl3 valve closed
8/18/2011	2:24:04 AM	PH3 valve closed
8/18/2011	2:24:04 AM	SiCl4 pre valve closed
8/18/2011	2:24:04 AM	SiCl4 post valve closed
8/18/2011	2:24:04 AM	Bypass valve closed
8/18/2011	2:24:04 AM	Bubbler valve closed
8/18/2011	2:24:04 AM	Main Vac valve opened
8/18/2011	2:24:04 AM	Helium MFC set to  0.000000
8/18/2011	2:24:04 AM	H2 MFC set to  0.000000
8/18/2011	2:24:04 AM	BCl3 MFC set to  0.000000
8/18/2011	2:24:04 AM	PHl3 MFC set to  0.000000
8/18/2011	2:24:04 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:24:04 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:24:05 AM	Tube furnace set to 0
8/18/2011	2:24:35 AM	H2 valve closed
8/18/2011	2:24:35 AM	BCl3 valve closed
8/18/2011	2:24:35 AM	PH3 valve closed
8/18/2011	2:24:35 AM	SiCl4 pre valve closed
8/18/2011	2:24:35 AM	SiCl4 post valve closed
8/18/2011	2:24:35 AM	Bypass valve closed
8/18/2011	2:24:35 AM	Bubbler valve closed
8/18/2011	2:24:35 AM	Helium valve opened
8/18/2011	2:24:35 AM	Main Vac valve opened
8/18/2011	2:24:35 AM	Helium MFC set to  20.000000
8/18/2011	2:24:35 AM	H2 MFC set to  0.000000
8/18/2011	2:24:35 AM	BCl3 MFC set to  0.000000
8/18/2011	2:24:35 AM	PHl3 MFC set to  0.000000
8/18/2011	2:24:35 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:24:35 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:24:35 AM	Tube furnace set to 0
8/18/2011	2:25:05 AM	Helium valve closed
8/18/2011	2:25:05 AM	H2 valve closed
8/18/2011	2:25:05 AM	BCl3 valve closed
8/18/2011	2:25:05 AM	PH3 valve closed
8/18/2011	2:25:05 AM	SiCl4 pre valve closed
8/18/2011	2:25:05 AM	SiCl4 post valve closed
8/18/2011	2:25:05 AM	Bypass valve closed
8/18/2011	2:25:05 AM	Bubbler valve closed
8/18/2011	2:25:05 AM	Main Vac valve opened
8/18/2011	2:25:05 AM	Helium MFC set to  0.000000
8/18/2011	2:25:05 AM	H2 MFC set to  0.000000
8/18/2011	2:25:05 AM	BCl3 MFC set to  0.000000
8/18/2011	2:25:05 AM	PHl3 MFC set to  0.000000
8/18/2011	2:25:05 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:25:05 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:25:05 AM	Tube furnace set to 0
8/18/2011	2:25:35 AM	H2 valve closed
8/18/2011	2:25:35 AM	BCl3 valve closed
8/18/2011	2:25:35 AM	PH3 valve closed
8/18/2011	2:25:35 AM	SiCl4 pre valve closed
8/18/2011	2:25:35 AM	SiCl4 post valve closed
8/18/2011	2:25:35 AM	Bypass valve closed
8/18/2011	2:25:35 AM	Bubbler valve closed
8/18/2011	2:25:35 AM	Helium valve opened
8/18/2011	2:25:35 AM	Main Vac valve opened
8/18/2011	2:25:35 AM	Helium MFC set to  20.000000
8/18/2011	2:25:35 AM	H2 MFC set to  0.000000
8/18/2011	2:25:35 AM	BCl3 MFC set to  0.000000
8/18/2011	2:25:35 AM	PHl3 MFC set to  0.000000
8/18/2011	2:25:35 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:25:35 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:25:35 AM	Tube furnace set to 0
8/18/2011	2:26:05 AM	Helium valve closed
8/18/2011	2:26:05 AM	H2 valve closed
8/18/2011	2:26:05 AM	BCl3 valve closed
8/18/2011	2:26:05 AM	PH3 valve closed
8/18/2011	2:26:05 AM	SiCl4 pre valve closed
8/18/2011	2:26:05 AM	SiCl4 post valve closed
8/18/2011	2:26:05 AM	Bypass valve closed
8/18/2011	2:26:05 AM	Bubbler valve closed
8/18/2011	2:26:05 AM	Main Vac valve opened
8/18/2011	2:26:05 AM	Helium MFC set to  0.000000
8/18/2011	2:26:05 AM	H2 MFC set to  0.000000
8/18/2011	2:26:05 AM	BCl3 MFC set to  0.000000
8/18/2011	2:26:05 AM	PHl3 MFC set to  0.000000
8/18/2011	2:26:05 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:26:05 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:26:05 AM	Tube furnace set to 0
8/18/2011	2:26:35 AM	H2 valve closed
8/18/2011	2:26:35 AM	BCl3 valve closed
8/18/2011	2:26:35 AM	PH3 valve closed
8/18/2011	2:26:35 AM	SiCl4 pre valve closed
8/18/2011	2:26:35 AM	SiCl4 post valve closed
8/18/2011	2:26:35 AM	Bypass valve closed
8/18/2011	2:26:35 AM	Bubbler valve closed
8/18/2011	2:26:35 AM	Helium valve opened
8/18/2011	2:26:35 AM	Main Vac valve opened
8/18/2011	2:26:35 AM	Helium MFC set to  20.000000
8/18/2011	2:26:35 AM	H2 MFC set to  0.000000
8/18/2011	2:26:35 AM	BCl3 MFC set to  0.000000
8/18/2011	2:26:35 AM	PHl3 MFC set to  0.000000
8/18/2011	2:26:35 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:26:35 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:26:36 AM	Tube furnace set to 0
8/18/2011	2:27:06 AM	Helium valve closed
8/18/2011	2:27:06 AM	H2 valve closed
8/18/2011	2:27:06 AM	BCl3 valve closed
8/18/2011	2:27:06 AM	PH3 valve closed
8/18/2011	2:27:06 AM	SiCl4 pre valve closed
8/18/2011	2:27:06 AM	SiCl4 post valve closed
8/18/2011	2:27:06 AM	Bypass valve closed
8/18/2011	2:27:06 AM	Bubbler valve closed
8/18/2011	2:27:06 AM	Main Vac valve opened
8/18/2011	2:27:06 AM	Helium MFC set to  0.000000
8/18/2011	2:27:06 AM	H2 MFC set to  0.000000
8/18/2011	2:27:06 AM	BCl3 MFC set to  0.000000
8/18/2011	2:27:06 AM	PHl3 MFC set to  0.000000
8/18/2011	2:27:06 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:27:06 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:27:06 AM	Tube furnace set to 0
8/18/2011	2:27:36 AM	H2 valve closed
8/18/2011	2:27:36 AM	BCl3 valve closed
8/18/2011	2:27:36 AM	PH3 valve closed
8/18/2011	2:27:36 AM	SiCl4 pre valve closed
8/18/2011	2:27:36 AM	SiCl4 post valve closed
8/18/2011	2:27:36 AM	Bypass valve closed
8/18/2011	2:27:36 AM	Bubbler valve closed
8/18/2011	2:27:36 AM	Helium valve opened
8/18/2011	2:27:36 AM	Main Vac valve opened
8/18/2011	2:27:36 AM	Helium MFC set to  20.000000
8/18/2011	2:27:36 AM	H2 MFC set to  0.000000
8/18/2011	2:27:36 AM	BCl3 MFC set to  0.000000
8/18/2011	2:27:36 AM	PHl3 MFC set to  0.000000
8/18/2011	2:27:36 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:27:36 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:27:36 AM	Tube furnace set to 0
8/18/2011	2:28:06 AM	Helium valve closed
8/18/2011	2:28:06 AM	H2 valve closed
8/18/2011	2:28:06 AM	BCl3 valve closed
8/18/2011	2:28:06 AM	PH3 valve closed
8/18/2011	2:28:06 AM	SiCl4 pre valve closed
8/18/2011	2:28:06 AM	SiCl4 post valve closed
8/18/2011	2:28:06 AM	Bypass valve closed
8/18/2011	2:28:06 AM	Bubbler valve closed
8/18/2011	2:28:06 AM	Main Vac valve opened
8/18/2011	2:28:06 AM	Helium MFC set to  0.000000
8/18/2011	2:28:06 AM	H2 MFC set to  0.000000
8/18/2011	2:28:06 AM	BCl3 MFC set to  0.000000
8/18/2011	2:28:06 AM	PHl3 MFC set to  0.000000
8/18/2011	2:28:06 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:28:06 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:28:06 AM	Tube furnace set to 0
8/18/2011	2:28:36 AM	H2 valve closed
8/18/2011	2:28:36 AM	BCl3 valve closed
8/18/2011	2:28:36 AM	PH3 valve closed
8/18/2011	2:28:36 AM	SiCl4 pre valve closed
8/18/2011	2:28:36 AM	SiCl4 post valve closed
8/18/2011	2:28:36 AM	Bypass valve closed
8/18/2011	2:28:36 AM	Bubbler valve closed
8/18/2011	2:28:36 AM	Helium valve opened
8/18/2011	2:28:36 AM	Main Vac valve opened
8/18/2011	2:28:36 AM	Helium MFC set to  20.000000
8/18/2011	2:28:36 AM	H2 MFC set to  0.000000
8/18/2011	2:28:36 AM	BCl3 MFC set to  0.000000
8/18/2011	2:28:36 AM	PHl3 MFC set to  0.000000
8/18/2011	2:28:36 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:28:36 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:28:37 AM	Tube furnace set to 0
8/18/2011	2:29:07 AM	Helium valve closed
8/18/2011	2:29:07 AM	H2 valve closed
8/18/2011	2:29:07 AM	BCl3 valve closed
8/18/2011	2:29:07 AM	PH3 valve closed
8/18/2011	2:29:07 AM	SiCl4 pre valve closed
8/18/2011	2:29:07 AM	SiCl4 post valve closed
8/18/2011	2:29:07 AM	Bypass valve closed
8/18/2011	2:29:07 AM	Bubbler valve closed
8/18/2011	2:29:07 AM	Main Vac valve opened
8/18/2011	2:29:07 AM	Helium MFC set to  0.000000
8/18/2011	2:29:07 AM	H2 MFC set to  0.000000
8/18/2011	2:29:07 AM	BCl3 MFC set to  0.000000
8/18/2011	2:29:07 AM	PHl3 MFC set to  0.000000
8/18/2011	2:29:07 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:29:07 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:29:07 AM	Tube furnace set to 0
8/18/2011	2:29:37 AM	H2 valve closed
8/18/2011	2:29:37 AM	BCl3 valve closed
8/18/2011	2:29:37 AM	PH3 valve closed
8/18/2011	2:29:37 AM	SiCl4 pre valve closed
8/18/2011	2:29:37 AM	SiCl4 post valve closed
8/18/2011	2:29:37 AM	Bypass valve closed
8/18/2011	2:29:37 AM	Bubbler valve closed
8/18/2011	2:29:37 AM	Helium valve opened
8/18/2011	2:29:37 AM	Main Vac valve opened
8/18/2011	2:29:37 AM	Helium MFC set to  20.000000
8/18/2011	2:29:37 AM	H2 MFC set to  0.000000
8/18/2011	2:29:37 AM	BCl3 MFC set to  0.000000
8/18/2011	2:29:37 AM	PHl3 MFC set to  0.000000
8/18/2011	2:29:37 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:29:37 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:29:37 AM	Tube furnace set to 0
8/18/2011	2:30:07 AM	Helium valve closed
8/18/2011	2:30:07 AM	H2 valve closed
8/18/2011	2:30:07 AM	BCl3 valve closed
8/18/2011	2:30:07 AM	PH3 valve closed
8/18/2011	2:30:07 AM	SiCl4 pre valve closed
8/18/2011	2:30:07 AM	SiCl4 post valve closed
8/18/2011	2:30:07 AM	Bypass valve closed
8/18/2011	2:30:07 AM	Bubbler valve closed
8/18/2011	2:30:07 AM	Main Vac valve opened
8/18/2011	2:30:07 AM	Helium MFC set to  0.000000
8/18/2011	2:30:07 AM	H2 MFC set to  0.000000
8/18/2011	2:30:07 AM	BCl3 MFC set to  0.000000
8/18/2011	2:30:07 AM	PHl3 MFC set to  0.000000
8/18/2011	2:30:07 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:30:07 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:30:07 AM	Tube furnace set to 0
8/18/2011	2:30:37 AM	H2 valve closed
8/18/2011	2:30:37 AM	BCl3 valve closed
8/18/2011	2:30:37 AM	PH3 valve closed
8/18/2011	2:30:37 AM	SiCl4 pre valve closed
8/18/2011	2:30:37 AM	SiCl4 post valve closed
8/18/2011	2:30:37 AM	Bypass valve closed
8/18/2011	2:30:37 AM	Bubbler valve closed
8/18/2011	2:30:37 AM	Helium valve opened
8/18/2011	2:30:37 AM	Main Vac valve opened
8/18/2011	2:30:37 AM	Helium MFC set to  20.000000
8/18/2011	2:30:37 AM	H2 MFC set to  0.000000
8/18/2011	2:30:37 AM	BCl3 MFC set to  0.000000
8/18/2011	2:30:37 AM	PHl3 MFC set to  0.000000
8/18/2011	2:30:37 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:30:37 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:30:37 AM	Tube furnace set to 0
8/18/2011	2:31:07 AM	Helium valve closed
8/18/2011	2:31:07 AM	H2 valve closed
8/18/2011	2:31:07 AM	BCl3 valve closed
8/18/2011	2:31:07 AM	PH3 valve closed
8/18/2011	2:31:07 AM	SiCl4 pre valve closed
8/18/2011	2:31:07 AM	SiCl4 post valve closed
8/18/2011	2:31:07 AM	Bypass valve closed
8/18/2011	2:31:07 AM	Bubbler valve closed
8/18/2011	2:31:07 AM	Main Vac valve opened
8/18/2011	2:31:07 AM	Helium MFC set to  0.000000
8/18/2011	2:31:07 AM	H2 MFC set to  0.000000
8/18/2011	2:31:07 AM	BCl3 MFC set to  0.000000
8/18/2011	2:31:07 AM	PHl3 MFC set to  0.000000
8/18/2011	2:31:07 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:31:07 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:31:08 AM	Tube furnace set to 200
8/18/2011	2:31:38 AM	H2 valve closed
8/18/2011	2:31:38 AM	BCl3 valve closed
8/18/2011	2:31:38 AM	PH3 valve closed
8/18/2011	2:31:38 AM	SiCl4 pre valve closed
8/18/2011	2:31:38 AM	SiCl4 post valve closed
8/18/2011	2:31:38 AM	Bypass valve closed
8/18/2011	2:31:38 AM	Bubbler valve closed
8/18/2011	2:31:38 AM	Helium valve opened
8/18/2011	2:31:38 AM	Main Vac valve opened
8/18/2011	2:31:38 AM	Helium MFC set to  20.000000
8/18/2011	2:31:38 AM	H2 MFC set to  0.000000
8/18/2011	2:31:38 AM	BCl3 MFC set to  0.000000
8/18/2011	2:31:38 AM	PHl3 MFC set to  0.000000
8/18/2011	2:31:38 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:31:38 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:31:38 AM	Tube furnace set to 200
8/18/2011	2:32:08 AM	Helium valve closed
8/18/2011	2:32:08 AM	H2 valve closed
8/18/2011	2:32:08 AM	BCl3 valve closed
8/18/2011	2:32:08 AM	PH3 valve closed
8/18/2011	2:32:08 AM	SiCl4 pre valve closed
8/18/2011	2:32:08 AM	SiCl4 post valve closed
8/18/2011	2:32:08 AM	Bypass valve closed
8/18/2011	2:32:08 AM	Bubbler valve closed
8/18/2011	2:32:08 AM	Main Vac valve opened
8/18/2011	2:32:08 AM	Helium MFC set to  0.000000
8/18/2011	2:32:08 AM	H2 MFC set to  0.000000
8/18/2011	2:32:08 AM	BCl3 MFC set to  0.000000
8/18/2011	2:32:08 AM	PHl3 MFC set to  0.000000
8/18/2011	2:32:08 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:32:08 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:32:08 AM	Tube furnace set to 200
8/18/2011	2:32:38 AM	H2 valve closed
8/18/2011	2:32:38 AM	BCl3 valve closed
8/18/2011	2:32:38 AM	PH3 valve closed
8/18/2011	2:32:38 AM	SiCl4 pre valve closed
8/18/2011	2:32:38 AM	SiCl4 post valve closed
8/18/2011	2:32:38 AM	Bypass valve closed
8/18/2011	2:32:38 AM	Bubbler valve closed
8/18/2011	2:32:38 AM	Helium valve opened
8/18/2011	2:32:38 AM	Main Vac valve opened
8/18/2011	2:32:38 AM	Helium MFC set to  20.000000
8/18/2011	2:32:38 AM	H2 MFC set to  0.000000
8/18/2011	2:32:38 AM	BCl3 MFC set to  0.000000
8/18/2011	2:32:38 AM	PHl3 MFC set to  0.000000
8/18/2011	2:32:38 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:32:38 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:32:38 AM	Tube furnace set to 200
8/18/2011	2:33:08 AM	Helium valve closed
8/18/2011	2:33:08 AM	H2 valve closed
8/18/2011	2:33:08 AM	BCl3 valve closed
8/18/2011	2:33:08 AM	PH3 valve closed
8/18/2011	2:33:08 AM	SiCl4 pre valve closed
8/18/2011	2:33:08 AM	SiCl4 post valve closed
8/18/2011	2:33:08 AM	Bypass valve closed
8/18/2011	2:33:08 AM	Bubbler valve closed
8/18/2011	2:33:08 AM	Main Vac valve opened
8/18/2011	2:33:08 AM	Helium MFC set to  0.000000
8/18/2011	2:33:08 AM	H2 MFC set to  0.000000
8/18/2011	2:33:08 AM	BCl3 MFC set to  0.000000
8/18/2011	2:33:08 AM	PHl3 MFC set to  0.000000
8/18/2011	2:33:08 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:33:08 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:33:08 AM	Tube furnace set to 200
8/18/2011	2:33:38 AM	H2 valve closed
8/18/2011	2:33:38 AM	BCl3 valve closed
8/18/2011	2:33:38 AM	PH3 valve closed
8/18/2011	2:33:38 AM	SiCl4 pre valve closed
8/18/2011	2:33:38 AM	SiCl4 post valve closed
8/18/2011	2:33:38 AM	Bypass valve closed
8/18/2011	2:33:38 AM	Bubbler valve closed
8/18/2011	2:33:38 AM	Helium valve opened
8/18/2011	2:33:38 AM	Main Vac valve opened
8/18/2011	2:33:38 AM	Helium MFC set to  20.000000
8/18/2011	2:33:38 AM	H2 MFC set to  0.000000
8/18/2011	2:33:38 AM	BCl3 MFC set to  0.000000
8/18/2011	2:33:39 AM	PHl3 MFC set to  0.000000
8/18/2011	2:33:39 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:33:39 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:33:39 AM	Tube furnace set to 200
8/18/2011	2:34:09 AM	Helium valve closed
8/18/2011	2:34:09 AM	H2 valve closed
8/18/2011	2:34:09 AM	BCl3 valve closed
8/18/2011	2:34:09 AM	PH3 valve closed
8/18/2011	2:34:09 AM	SiCl4 pre valve closed
8/18/2011	2:34:09 AM	SiCl4 post valve closed
8/18/2011	2:34:09 AM	Bypass valve closed
8/18/2011	2:34:09 AM	Bubbler valve closed
8/18/2011	2:34:09 AM	Main Vac valve opened
8/18/2011	2:34:09 AM	Helium MFC set to  0.000000
8/18/2011	2:34:09 AM	H2 MFC set to  0.000000
8/18/2011	2:34:09 AM	BCl3 MFC set to  0.000000
8/18/2011	2:34:09 AM	PHl3 MFC set to  0.000000
8/18/2011	2:34:09 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:34:09 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:34:09 AM	Tube furnace set to 200
8/18/2011	2:34:39 AM	H2 valve closed
8/18/2011	2:34:39 AM	BCl3 valve closed
8/18/2011	2:34:39 AM	PH3 valve closed
8/18/2011	2:34:39 AM	SiCl4 pre valve closed
8/18/2011	2:34:39 AM	SiCl4 post valve closed
8/18/2011	2:34:39 AM	Bypass valve closed
8/18/2011	2:34:39 AM	Bubbler valve closed
8/18/2011	2:34:39 AM	Helium valve opened
8/18/2011	2:34:39 AM	Main Vac valve opened
8/18/2011	2:34:39 AM	Helium MFC set to  20.000000
8/18/2011	2:34:39 AM	H2 MFC set to  0.000000
8/18/2011	2:34:39 AM	BCl3 MFC set to  0.000000
8/18/2011	2:34:39 AM	PHl3 MFC set to  0.000000
8/18/2011	2:34:39 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:34:39 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:34:39 AM	Tube furnace set to 200
8/18/2011	2:35:09 AM	Helium valve closed
8/18/2011	2:35:09 AM	H2 valve closed
8/18/2011	2:35:09 AM	BCl3 valve closed
8/18/2011	2:35:09 AM	PH3 valve closed
8/18/2011	2:35:09 AM	SiCl4 pre valve closed
8/18/2011	2:35:09 AM	SiCl4 post valve closed
8/18/2011	2:35:09 AM	Bypass valve closed
8/18/2011	2:35:09 AM	Bubbler valve closed
8/18/2011	2:35:09 AM	Main Vac valve opened
8/18/2011	2:35:09 AM	Helium MFC set to  0.000000
8/18/2011	2:35:09 AM	H2 MFC set to  0.000000
8/18/2011	2:35:09 AM	BCl3 MFC set to  0.000000
8/18/2011	2:35:09 AM	PHl3 MFC set to  0.000000
8/18/2011	2:35:09 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:35:09 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:35:09 AM	Tube furnace set to 200
8/18/2011	2:35:39 AM	H2 valve closed
8/18/2011	2:35:39 AM	BCl3 valve closed
8/18/2011	2:35:39 AM	PH3 valve closed
8/18/2011	2:35:39 AM	SiCl4 pre valve closed
8/18/2011	2:35:39 AM	SiCl4 post valve closed
8/18/2011	2:35:39 AM	Bypass valve closed
8/18/2011	2:35:39 AM	Bubbler valve closed
8/18/2011	2:35:39 AM	Helium valve opened
8/18/2011	2:35:39 AM	Main Vac valve opened
8/18/2011	2:35:39 AM	Helium MFC set to  20.000000
8/18/2011	2:35:39 AM	H2 MFC set to  0.000000
8/18/2011	2:35:39 AM	BCl3 MFC set to  0.000000
8/18/2011	2:35:39 AM	PHl3 MFC set to  0.000000
8/18/2011	2:35:39 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:35:39 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:35:40 AM	Tube furnace set to 200
8/18/2011	2:36:10 AM	Helium valve closed
8/18/2011	2:36:10 AM	H2 valve closed
8/18/2011	2:36:10 AM	BCl3 valve closed
8/18/2011	2:36:10 AM	PH3 valve closed
8/18/2011	2:36:10 AM	SiCl4 pre valve closed
8/18/2011	2:36:10 AM	SiCl4 post valve closed
8/18/2011	2:36:10 AM	Bypass valve closed
8/18/2011	2:36:10 AM	Bubbler valve closed
8/18/2011	2:36:10 AM	Main Vac valve opened
8/18/2011	2:36:10 AM	Helium MFC set to  0.000000
8/18/2011	2:36:10 AM	H2 MFC set to  0.000000
8/18/2011	2:36:10 AM	BCl3 MFC set to  0.000000
8/18/2011	2:36:10 AM	PHl3 MFC set to  0.000000
8/18/2011	2:36:10 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:36:10 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:36:10 AM	Tube furnace set to 200
8/18/2011	2:36:40 AM	H2 valve closed
8/18/2011	2:36:40 AM	BCl3 valve closed
8/18/2011	2:36:40 AM	PH3 valve closed
8/18/2011	2:36:40 AM	SiCl4 pre valve closed
8/18/2011	2:36:40 AM	SiCl4 post valve closed
8/18/2011	2:36:40 AM	Bypass valve closed
8/18/2011	2:36:40 AM	Bubbler valve closed
8/18/2011	2:36:40 AM	Helium valve opened
8/18/2011	2:36:40 AM	Main Vac valve opened
8/18/2011	2:36:40 AM	Helium MFC set to  20.000000
8/18/2011	2:36:40 AM	H2 MFC set to  0.000000
8/18/2011	2:36:40 AM	BCl3 MFC set to  0.000000
8/18/2011	2:36:40 AM	PHl3 MFC set to  0.000000
8/18/2011	2:36:40 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:36:40 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:36:40 AM	Tube furnace set to 200
8/18/2011	2:37:10 AM	Helium valve closed
8/18/2011	2:37:10 AM	H2 valve closed
8/18/2011	2:37:10 AM	BCl3 valve closed
8/18/2011	2:37:10 AM	PH3 valve closed
8/18/2011	2:37:10 AM	SiCl4 pre valve closed
8/18/2011	2:37:10 AM	SiCl4 post valve closed
8/18/2011	2:37:10 AM	Bypass valve closed
8/18/2011	2:37:10 AM	Bubbler valve closed
8/18/2011	2:37:10 AM	Main Vac valve opened
8/18/2011	2:37:10 AM	Helium MFC set to  0.000000
8/18/2011	2:37:10 AM	H2 MFC set to  0.000000
8/18/2011	2:37:10 AM	BCl3 MFC set to  0.000000
8/18/2011	2:37:10 AM	PHl3 MFC set to  0.000000
8/18/2011	2:37:10 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:37:10 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:37:10 AM	Tube furnace set to 0
8/18/2011	2:37:11 AM	Run finished at 2:37 AM
8/18/2011	2:44:03 AM	Main Vac valve closed
8/18/2011	2:44:13 AM	Main Vac valve opened
8/18/2011	2:44:29 AM	Helium MFC set to  20.000000
8/18/2011	2:44:31 AM	Helium valve opened
8/18/2011	2:44:49 AM	Tube furnace set to 200
8/18/2011	2:44:51 AM	Helium valve closed
8/18/2011	2:45:06 AM	Helium valve opened
8/18/2011	2:45:19 AM	Helium valve closed
8/18/2011	2:45:37 AM	Helium valve opened
8/18/2011	2:45:49 AM	Helium valve closed
8/18/2011	2:46:06 AM	Helium valve opened
8/18/2011	2:46:21 AM	Helium valve closed
8/18/2011	2:46:42 AM	Helium valve opened
8/18/2011	2:47:00 AM	Helium valve closed
8/18/2011	2:47:03 AM	Helium MFC set to  0.000000
8/18/2011	2:47:49 AM	Main Vac valve closed
8/18/2011	2:48:01 AM	Main Vac valve opened
8/18/2011	2:48:26 AM	Recipe started at 2:48 AM
8/18/2011	2:48:26 AM	Helium valve closed
8/18/2011	2:48:26 AM	H2 valve closed
8/18/2011	2:48:26 AM	BCl3 valve closed
8/18/2011	2:48:26 AM	PH3 valve closed
8/18/2011	2:48:26 AM	SiCl4 pre valve closed
8/18/2011	2:48:26 AM	SiCl4 post valve closed
8/18/2011	2:48:26 AM	Main Vac valve closed
8/18/2011	2:48:26 AM	Bypass valve closed
8/18/2011	2:48:26 AM	Bubbler valve closed
8/18/2011	2:48:26 AM	Helium MFC set to  0.000000
8/18/2011	2:48:26 AM	H2 MFC set to  0.000000
8/18/2011	2:48:26 AM	BCl3 MFC set to  0.000000
8/18/2011	2:48:26 AM	PHl3 MFC set to  0.000000
8/18/2011	2:48:26 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:48:26 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:48:26 AM	Tube furnace set to 0
8/18/2011	2:48:29 AM	Helium valve closed
8/18/2011	2:48:29 AM	BCl3 valve closed
8/18/2011	2:48:29 AM	PH3 valve closed
8/18/2011	2:48:29 AM	SiCl4 pre valve closed
8/18/2011	2:48:29 AM	SiCl4 post valve closed
8/18/2011	2:48:29 AM	Main Vac valve closed
8/18/2011	2:48:29 AM	Bypass valve closed
8/18/2011	2:48:29 AM	Bubbler valve closed
8/18/2011	2:48:29 AM	H2 valve opened
8/18/2011	2:48:29 AM	Helium MFC set to  0.000000
8/18/2011	2:48:29 AM	H2 MFC set to  500.000000
8/18/2011	2:48:29 AM	BCl3 MFC set to  0.000000
8/18/2011	2:48:29 AM	PHl3 MFC set to  0.000000
8/18/2011	2:48:29 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:48:29 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:48:29 AM	Tube furnace set to 0
8/18/2011	2:49:32 AM	Helium valve closed
8/18/2011	2:49:32 AM	BCl3 valve closed
8/18/2011	2:49:32 AM	PH3 valve closed
8/18/2011	2:49:32 AM	SiCl4 pre valve closed
8/18/2011	2:49:32 AM	SiCl4 post valve closed
8/18/2011	2:49:32 AM	Main Vac valve closed
8/18/2011	2:49:32 AM	Bypass valve closed
8/18/2011	2:49:32 AM	H2 valve opened
8/18/2011	2:49:32 AM	Bubbler valve opened
8/18/2011	2:49:32 AM	Helium MFC set to  0.000000
8/18/2011	2:49:32 AM	H2 MFC set to  500.000000
8/18/2011	2:49:32 AM	BCl3 MFC set to  0.000000
8/18/2011	2:49:32 AM	PHl3 MFC set to  0.000000
8/18/2011	2:49:32 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:49:32 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:49:32 AM	Tube furnace set to 0
8/18/2011	2:49:33 AM	Helium valve closed
8/18/2011	2:49:33 AM	BCl3 valve closed
8/18/2011	2:49:33 AM	PH3 valve closed
8/18/2011	2:49:33 AM	SiCl4 pre valve closed
8/18/2011	2:49:33 AM	SiCl4 post valve closed
8/18/2011	2:49:33 AM	Main Vac valve closed
8/18/2011	2:49:33 AM	Bypass valve closed
8/18/2011	2:49:33 AM	H2 valve opened
8/18/2011	2:49:33 AM	Bubbler valve opened
8/18/2011	2:49:33 AM	Helium MFC set to  0.000000
8/18/2011	2:49:33 AM	H2 MFC set to  500.000000
8/18/2011	2:49:33 AM	BCl3 MFC set to  0.000000
8/18/2011	2:49:33 AM	PHl3 MFC set to  0.000000
8/18/2011	2:49:33 AM	SiCl4 MFC set to  0.000000
8/18/2011	2:49:33 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:49:33 AM	Tube furnace set to 1000
8/18/2011	3:09:33 AM	Helium valve closed
8/18/2011	3:09:33 AM	BCl3 valve closed
8/18/2011	3:09:33 AM	PH3 valve closed
8/18/2011	3:09:33 AM	Main Vac valve closed
8/18/2011	3:09:33 AM	Bypass valve closed
8/18/2011	3:09:33 AM	H2 valve opened
8/18/2011	3:09:33 AM	SiCl4 pre valve opened
8/18/2011	3:09:33 AM	SiCl4 post valve opened
8/18/2011	3:09:33 AM	Bubbler valve opened
8/18/2011	3:09:33 AM	Helium MFC set to  0.000000
8/18/2011	3:09:33 AM	H2 MFC set to  500.000000
8/18/2011	3:09:33 AM	BCl3 MFC set to  0.000000
8/18/2011	3:09:33 AM	PHl3 MFC set to  0.000000
8/18/2011	3:09:33 AM	SiCl4 MFC set to  50.000000
8/18/2011	3:09:33 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:09:33 AM	Tube furnace set to 1000
8/18/2011	3:25:33 AM	Helium valve closed
8/18/2011	3:25:33 AM	BCl3 valve closed
8/18/2011	3:25:33 AM	SiCl4 pre valve closed
8/18/2011	3:25:33 AM	SiCl4 post valve closed
8/18/2011	3:25:33 AM	Main Vac valve closed
8/18/2011	3:25:33 AM	Bypass valve closed
8/18/2011	3:25:33 AM	H2 valve opened
8/18/2011	3:25:33 AM	PH3 valve opened
8/18/2011	3:25:33 AM	Bubbler valve opened
8/18/2011	3:25:33 AM	Helium MFC set to  0.000000
8/18/2011	3:25:33 AM	H2 MFC set to  500.000000
8/18/2011	3:25:33 AM	BCl3 MFC set to  0.000000
8/18/2011	3:25:33 AM	PHl3 MFC set to  2.000000
8/18/2011	3:25:33 AM	SiCl4 MFC set to  0.000000
8/18/2011	3:25:33 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:25:33 AM	Tube furnace set to 1000
8/18/2011	3:41:33 AM	Helium valve closed
8/18/2011	3:41:33 AM	BCl3 valve closed
8/18/2011	3:41:33 AM	PH3 valve closed
8/18/2011	3:41:33 AM	SiCl4 pre valve closed
8/18/2011	3:41:33 AM	SiCl4 post valve closed
8/18/2011	3:41:33 AM	Main Vac valve closed
8/18/2011	3:41:33 AM	Bypass valve closed
8/18/2011	3:41:33 AM	H2 valve opened
8/18/2011	3:41:33 AM	Bubbler valve opened
8/18/2011	3:41:33 AM	Helium MFC set to  0.000000
8/18/2011	3:41:33 AM	H2 MFC set to  500.000000
8/18/2011	3:41:33 AM	BCl3 MFC set to  0.000000
8/18/2011	3:41:33 AM	PHl3 MFC set to  0.000000
8/18/2011	3:41:33 AM	SiCl4 MFC set to  0.000000
8/18/2011	3:41:33 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:41:34 AM	Tube furnace set to 950
8/18/2011	3:43:34 AM	Helium valve closed
8/18/2011	3:43:34 AM	BCl3 valve closed
8/18/2011	3:43:34 AM	PH3 valve closed
8/18/2011	3:43:34 AM	SiCl4 pre valve closed
8/18/2011	3:43:34 AM	SiCl4 post valve closed
8/18/2011	3:43:34 AM	Main Vac valve closed
8/18/2011	3:43:34 AM	Bypass valve closed
8/18/2011	3:43:34 AM	H2 valve opened
8/18/2011	3:43:34 AM	Bubbler valve opened
8/18/2011	3:43:34 AM	Helium MFC set to  0.000000
8/18/2011	3:43:34 AM	H2 MFC set to  500.000000
8/18/2011	3:43:34 AM	BCl3 MFC set to  0.000000
8/18/2011	3:43:34 AM	PHl3 MFC set to  0.000000
8/18/2011	3:43:34 AM	SiCl4 MFC set to  0.000000
8/18/2011	3:43:34 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:43:34 AM	Tube furnace set to 900
8/18/2011	3:45:34 AM	Helium valve closed
8/18/2011	3:45:34 AM	BCl3 valve closed
8/18/2011	3:45:34 AM	PH3 valve closed
8/18/2011	3:45:34 AM	SiCl4 pre valve closed
8/18/2011	3:45:34 AM	SiCl4 post valve closed
8/18/2011	3:45:34 AM	Main Vac valve closed
8/18/2011	3:45:34 AM	Bypass valve closed
8/18/2011	3:45:34 AM	H2 valve opened
8/18/2011	3:45:34 AM	Bubbler valve opened
8/18/2011	3:45:34 AM	Helium MFC set to  0.000000
8/18/2011	3:45:34 AM	H2 MFC set to  500.000000
8/18/2011	3:45:34 AM	BCl3 MFC set to  0.000000
8/18/2011	3:45:34 AM	PHl3 MFC set to  0.000000
8/18/2011	3:45:34 AM	SiCl4 MFC set to  0.000000
8/18/2011	3:45:34 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:45:34 AM	Tube furnace set to 850
8/18/2011	3:47:34 AM	H2 valve closed
8/18/2011	3:47:34 AM	BCl3 valve closed
8/18/2011	3:47:34 AM	PH3 valve closed
8/18/2011	3:47:34 AM	SiCl4 pre valve closed
8/18/2011	3:47:34 AM	SiCl4 post valve closed
8/18/2011	3:47:34 AM	Main Vac valve closed
8/18/2011	3:47:34 AM	Bypass valve closed
8/18/2011	3:47:34 AM	Helium valve opened
8/18/2011	3:47:34 AM	Bubbler valve opened
8/18/2011	3:47:34 AM	Helium MFC set to  500.000000
8/18/2011	3:47:34 AM	H2 MFC set to  0.000000
8/18/2011	3:47:34 AM	BCl3 MFC set to  0.000000
8/18/2011	3:47:34 AM	PHl3 MFC set to  0.000000
8/18/2011	3:47:34 AM	SiCl4 MFC set to  0.000000
8/18/2011	3:47:34 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:47:34 AM	Tube furnace set to 800
8/18/2011	3:49:34 AM	H2 valve closed
8/18/2011	3:49:34 AM	BCl3 valve closed
8/18/2011	3:49:34 AM	PH3 valve closed
8/18/2011	3:49:34 AM	SiCl4 pre valve closed
8/18/2011	3:49:34 AM	SiCl4 post valve closed
8/18/2011	3:49:34 AM	Main Vac valve closed
8/18/2011	3:49:34 AM	Bypass valve closed
8/18/2011	3:49:34 AM	Helium valve opened
8/18/2011	3:49:34 AM	Bubbler valve opened
8/18/2011	3:49:34 AM	Helium MFC set to  500.000000
8/18/2011	3:49:34 AM	H2 MFC set to  0.000000
8/18/2011	3:49:34 AM	BCl3 MFC set to  0.000000
8/18/2011	3:49:34 AM	PHl3 MFC set to  0.000000
8/18/2011	3:49:34 AM	SiCl4 MFC set to  0.000000
8/18/2011	3:49:34 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:49:34 AM	Tube furnace set to 750
8/18/2011	3:51:34 AM	H2 valve closed
8/18/2011	3:51:34 AM	BCl3 valve closed
8/18/2011	3:51:34 AM	PH3 valve closed
8/18/2011	3:51:34 AM	SiCl4 pre valve closed
8/18/2011	3:51:34 AM	SiCl4 post valve closed
8/18/2011	3:51:34 AM	Main Vac valve closed
8/18/2011	3:51:34 AM	Bypass valve closed
8/18/2011	3:51:34 AM	Helium valve opened
8/18/2011	3:51:34 AM	Bubbler valve opened
8/18/2011	3:51:34 AM	Helium MFC set to  500.000000
8/18/2011	3:51:34 AM	H2 MFC set to  0.000000
8/18/2011	3:51:34 AM	BCl3 MFC set to  0.000000
8/18/2011	3:51:34 AM	PHl3 MFC set to  0.000000
8/18/2011	3:51:34 AM	SiCl4 MFC set to  0.000000
8/18/2011	3:51:34 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:51:35 AM	Tube furnace set to 0
8/18/2011	4:11:35 AM	Helium valve closed
8/18/2011	4:11:35 AM	H2 valve closed
8/18/2011	4:11:35 AM	BCl3 valve closed
8/18/2011	4:11:35 AM	PH3 valve closed
8/18/2011	4:11:35 AM	SiCl4 pre valve closed
8/18/2011	4:11:35 AM	SiCl4 post valve closed
8/18/2011	4:11:35 AM	Main Vac valve closed
8/18/2011	4:11:35 AM	Bypass valve closed
8/18/2011	4:11:35 AM	Bubbler valve closed
8/18/2011	4:11:35 AM	Helium MFC set to  0.000000
8/18/2011	4:11:35 AM	H2 MFC set to  0.000000
8/18/2011	4:11:35 AM	BCl3 MFC set to  0.000000
8/18/2011	4:11:35 AM	PHl3 MFC set to  0.000000
8/18/2011	4:11:35 AM	SiCl4 MFC set to  0.000000
8/18/2011	4:11:35 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	4:11:35 AM	Tube furnace set to 0
8/18/2011	4:11:36 AM	Run finished at 4:11 AM
8/18/2011	4:27:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2011	4:27:37 AM	Recipe started at 4:27 AM
8/18/2011	4:27:37 AM	Helium valve closed
8/18/2011	4:27:37 AM	H2 valve closed
8/18/2011	4:27:37 AM	BCl3 valve closed
8/18/2011	4:27:37 AM	PH3 valve closed
8/18/2011	4:27:37 AM	SiCl4 pre valve closed
8/18/2011	4:27:37 AM	SiCl4 post valve closed
8/18/2011	4:27:37 AM	Main Vac valve closed
8/18/2011	4:27:37 AM	Bypass valve closed
8/18/2011	4:27:37 AM	Bubbler valve closed
8/18/2011	4:27:37 AM	Helium MFC set to  0.000000
8/18/2011	4:27:37 AM	H2 MFC set to  0.000000
8/18/2011	4:27:37 AM	BCl3 MFC set to  0.000000
8/18/2011	4:27:37 AM	PHl3 MFC set to  0.000000
8/18/2011	4:27:37 AM	SiCl4 MFC set to  0.000000
8/18/2011	4:27:37 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	4:27:37 AM	Tube furnace set to 0
8/18/2011	4:27:40 AM	H2 valve closed
8/18/2011	4:27:40 AM	BCl3 valve closed
8/18/2011	4:27:40 AM	PH3 valve closed
8/18/2011	4:27:40 AM	SiCl4 pre valve closed
8/18/2011	4:27:40 AM	SiCl4 post valve closed
8/18/2011	4:27:40 AM	Main Vac valve closed
8/18/2011	4:27:40 AM	Bypass valve closed
8/18/2011	4:27:40 AM	Bubbler valve closed
8/18/2011	4:27:40 AM	Helium valve opened
8/18/2011	4:27:40 AM	Helium MFC set to  500.000000
8/18/2011	4:27:40 AM	H2 MFC set to  0.000000
8/18/2011	4:27:40 AM	BCl3 MFC set to  0.000000
8/18/2011	4:27:40 AM	PHl3 MFC set to  0.000000
8/18/2011	4:27:40 AM	SiCl4 MFC set to  0.000000
8/18/2011	4:27:40 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	4:27:40 AM	Tube furnace set to 0
8/18/2011	4:27:42 AM	Helium valve closed
8/18/2011	4:27:42 AM	H2 valve closed
8/18/2011	4:27:42 AM	BCl3 valve closed
8/18/2011	4:27:42 AM	PH3 valve closed
8/18/2011	4:27:42 AM	SiCl4 pre valve closed
8/18/2011	4:27:42 AM	SiCl4 post valve closed
8/18/2011	4:27:42 AM	Main Vac valve closed
8/18/2011	4:27:42 AM	Bypass valve closed
8/18/2011	4:27:42 AM	Bubbler valve closed
8/18/2011	4:27:42 AM	Helium MFC set to  0.000000
8/18/2011	4:27:42 AM	H2 MFC set to  0.000000
8/18/2011	4:27:42 AM	BCl3 MFC set to  0.000000
8/18/2011	4:27:42 AM	PHl3 MFC set to  0.000000
8/18/2011	4:27:42 AM	SiCl4 MFC set to  0.000000
8/18/2011	4:27:42 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	4:27:42 AM	Tube furnace set to 0
8/18/2011	4:27:43 AM	Run finished at 4:27 AM
8/18/2011	4:27:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2011	4:29:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2011	4:29:02 AM	Recipe started at 4:29 AM
8/18/2011	4:29:02 AM	Helium valve closed
8/18/2011	4:29:02 AM	H2 valve closed
8/18/2011	4:29:02 AM	BCl3 valve closed
8/18/2011	4:29:02 AM	PH3 valve closed
8/18/2011	4:29:02 AM	SiCl4 pre valve closed
8/18/2011	4:29:02 AM	SiCl4 post valve closed
8/18/2011	4:29:02 AM	Main Vac valve closed
8/18/2011	4:29:02 AM	Bubbler valve closed
8/18/2011	4:29:02 AM	Bypass valve opened
8/18/2011	4:29:02 AM	Helium MFC set to  0.000000
8/18/2011	4:29:02 AM	H2 MFC set to  0.000000
8/18/2011	4:29:02 AM	BCl3 MFC set to  0.000000
8/18/2011	4:29:02 AM	PHl3 MFC set to  0.000000
8/18/2011	4:29:02 AM	SiCl4 MFC set to  0.000000
8/18/2011	4:29:02 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	4:29:03 AM	Tube furnace set to 0
8/18/2011	4:30:05 AM	Helium valve closed
8/18/2011	4:30:05 AM	H2 valve closed
8/18/2011	4:30:05 AM	BCl3 valve closed
8/18/2011	4:30:05 AM	PH3 valve closed
8/18/2011	4:30:05 AM	SiCl4 pre valve closed
8/18/2011	4:30:05 AM	SiCl4 post valve closed
8/18/2011	4:30:05 AM	Main Vac valve closed
8/18/2011	4:30:05 AM	Bubbler valve closed
8/18/2011	4:30:05 AM	Bypass valve opened
8/18/2011	4:30:05 AM	Helium MFC set to  0.000000
8/18/2011	4:30:05 AM	H2 MFC set to  0.000000
8/18/2011	4:30:05 AM	BCl3 MFC set to  0.000000
8/18/2011	4:30:05 AM	PHl3 MFC set to  0.000000
8/18/2011	4:30:05 AM	SiCl4 MFC set to  0.000000
8/18/2011	4:30:05 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	4:30:05 AM	Tube furnace set to 0
8/18/2011	4:31:05 AM	Helium valve closed
8/18/2011	4:31:05 AM	H2 valve closed
8/18/2011	4:31:05 AM	BCl3 valve closed
8/18/2011	4:31:05 AM	PH3 valve closed
8/18/2011	4:31:05 AM	SiCl4 pre valve closed
8/18/2011	4:31:05 AM	SiCl4 post valve closed
8/18/2011	4:31:05 AM	Bypass valve closed
8/18/2011	4:31:05 AM	Bubbler valve closed
8/18/2011	4:31:05 AM	Main Vac valve opened
8/18/2011	4:31:05 AM	Helium MFC set to  0.000000
8/18/2011	4:31:05 AM	H2 MFC set to  0.000000
8/18/2011	4:31:05 AM	BCl3 MFC set to  0.000000
8/18/2011	4:31:05 AM	PHl3 MFC set to  0.000000
8/18/2011	4:31:05 AM	SiCl4 MFC set to  0.000000
8/18/2011	4:31:05 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	4:31:05 AM	Tube furnace set to 0
8/18/2011	4:31:06 AM	Run finished at 4:31 AM
8/18/2011	4:31:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2011	9:09:46 AM	Main Vac valve closed
8/18/2011	9:09:49 AM	Main Vac valve opened
8/18/2011	9:13:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2011	9:13:24 AM	Recipe started at 9:13 AM
8/18/2011	9:13:24 AM	Helium valve closed
8/18/2011	9:13:24 AM	H2 valve closed
8/18/2011	9:13:24 AM	BCl3 valve closed
8/18/2011	9:13:24 AM	PH3 valve closed
8/18/2011	9:13:24 AM	SiCl4 pre valve closed
8/18/2011	9:13:24 AM	SiCl4 post valve closed
8/18/2011	9:13:24 AM	Main Vac valve closed
8/18/2011	9:13:24 AM	Bypass valve closed
8/18/2011	9:13:24 AM	Bubbler valve closed
8/18/2011	9:13:24 AM	Helium MFC set to  0.000000
8/18/2011	9:13:24 AM	H2 MFC set to  0.000000
8/18/2011	9:13:24 AM	BCl3 MFC set to  0.000000
8/18/2011	9:13:24 AM	PHl3 MFC set to  0.000000
8/18/2011	9:13:24 AM	SiCl4 MFC set to  0.000000
8/18/2011	9:13:24 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	9:13:24 AM	Tube furnace set to 0
8/18/2011	9:13:27 AM	H2 valve closed
8/18/2011	9:13:27 AM	BCl3 valve closed
8/18/2011	9:13:27 AM	PH3 valve closed
8/18/2011	9:13:27 AM	SiCl4 pre valve closed
8/18/2011	9:13:27 AM	SiCl4 post valve closed
8/18/2011	9:13:27 AM	Main Vac valve closed
8/18/2011	9:13:27 AM	Bypass valve closed
8/18/2011	9:13:27 AM	Bubbler valve closed
8/18/2011	9:13:27 AM	Helium valve opened
8/18/2011	9:13:27 AM	Helium MFC set to  500.000000
8/18/2011	9:13:27 AM	H2 MFC set to  0.000000
8/18/2011	9:13:27 AM	BCl3 MFC set to  0.000000
8/18/2011	9:13:27 AM	PHl3 MFC set to  0.000000
8/18/2011	9:13:27 AM	SiCl4 MFC set to  0.000000
8/18/2011	9:13:27 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	9:13:27 AM	Tube furnace set to 0
8/18/2011	9:14:32 AM	Helium valve closed
8/18/2011	9:14:32 AM	H2 valve closed
8/18/2011	9:14:32 AM	BCl3 valve closed
8/18/2011	9:14:32 AM	PH3 valve closed
8/18/2011	9:14:32 AM	SiCl4 pre valve closed
8/18/2011	9:14:32 AM	SiCl4 post valve closed
8/18/2011	9:14:32 AM	Main Vac valve closed
8/18/2011	9:14:32 AM	Bypass valve closed
8/18/2011	9:14:32 AM	Bubbler valve closed
8/18/2011	9:14:32 AM	Helium MFC set to  0.000000
8/18/2011	9:14:32 AM	H2 MFC set to  0.000000
8/18/2011	9:14:32 AM	BCl3 MFC set to  0.000000
8/18/2011	9:14:32 AM	PHl3 MFC set to  0.000000
8/18/2011	9:14:32 AM	SiCl4 MFC set to  0.000000
8/18/2011	9:14:32 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	9:14:32 AM	Tube furnace set to 0
8/18/2011	9:14:33 AM	Run finished at 9:14 AM
8/18/2011	9:14:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2011	9:16:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2011	9:16:29 AM	Recipe started at 9:16 AM
8/18/2011	9:16:29 AM	Helium valve closed
8/18/2011	9:16:29 AM	H2 valve closed
8/18/2011	9:16:29 AM	BCl3 valve closed
8/18/2011	9:16:29 AM	PH3 valve closed
8/18/2011	9:16:29 AM	SiCl4 pre valve closed
8/18/2011	9:16:29 AM	SiCl4 post valve closed
8/18/2011	9:16:29 AM	Main Vac valve closed
8/18/2011	9:16:29 AM	Bubbler valve closed
8/18/2011	9:16:29 AM	Bypass valve opened
8/18/2011	9:16:29 AM	Helium MFC set to  0.000000
8/18/2011	9:16:29 AM	H2 MFC set to  0.000000
8/18/2011	9:16:29 AM	BCl3 MFC set to  0.000000
8/18/2011	9:16:29 AM	PHl3 MFC set to  0.000000
8/18/2011	9:16:29 AM	SiCl4 MFC set to  0.000000
8/18/2011	9:16:29 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	9:16:29 AM	Tube furnace set to 0
8/18/2011	9:17:23 AM	Helium valve closed
8/18/2011	9:17:23 AM	H2 valve closed
8/18/2011	9:17:23 AM	BCl3 valve closed
8/18/2011	9:17:23 AM	PH3 valve closed
8/18/2011	9:17:23 AM	SiCl4 pre valve closed
8/18/2011	9:17:23 AM	SiCl4 post valve closed
8/18/2011	9:17:23 AM	Main Vac valve closed
8/18/2011	9:17:23 AM	Bubbler valve closed
8/18/2011	9:17:23 AM	Bypass valve opened
8/18/2011	9:17:23 AM	Helium MFC set to  0.000000
8/18/2011	9:17:23 AM	H2 MFC set to  0.000000
8/18/2011	9:17:23 AM	BCl3 MFC set to  0.000000
8/18/2011	9:17:23 AM	PHl3 MFC set to  0.000000
8/18/2011	9:17:23 AM	SiCl4 MFC set to  0.000000
8/18/2011	9:17:23 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	9:17:24 AM	Tube furnace set to 0
8/18/2011	9:18:24 AM	Helium valve closed
8/18/2011	9:18:24 AM	H2 valve closed
8/18/2011	9:18:24 AM	BCl3 valve closed
8/18/2011	9:18:24 AM	PH3 valve closed
8/18/2011	9:18:24 AM	SiCl4 pre valve closed
8/18/2011	9:18:24 AM	SiCl4 post valve closed
8/18/2011	9:18:24 AM	Bypass valve closed
8/18/2011	9:18:24 AM	Bubbler valve closed
8/18/2011	9:18:24 AM	Main Vac valve opened
8/18/2011	9:18:24 AM	Helium MFC set to  0.000000
8/18/2011	9:18:24 AM	H2 MFC set to  0.000000
8/18/2011	9:18:24 AM	BCl3 MFC set to  0.000000
8/18/2011	9:18:24 AM	PHl3 MFC set to  0.000000
8/18/2011	9:18:24 AM	SiCl4 MFC set to  0.000000
8/18/2011	9:18:24 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	9:18:24 AM	Tube furnace set to 0
8/18/2011	9:18:25 AM	Run finished at 9:18 AM
8/18/2011	9:18:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2011	10:04:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2011	10:04:23 AM	Recipe started at 10:04 AM
8/18/2011	10:04:23 AM	Helium valve closed
8/18/2011	10:04:23 AM	H2 valve closed
8/18/2011	10:04:23 AM	BCl3 valve closed
8/18/2011	10:04:23 AM	PH3 valve closed
8/18/2011	10:04:23 AM	SiCl4 pre valve closed
8/18/2011	10:04:23 AM	SiCl4 post valve closed
8/18/2011	10:04:23 AM	Main Vac valve closed
8/18/2011	10:04:23 AM	Bypass valve closed
8/18/2011	10:04:23 AM	Bubbler valve closed
8/18/2011	10:04:23 AM	Helium MFC set to  0.000000
8/18/2011	10:04:23 AM	H2 MFC set to  0.000000
8/18/2011	10:04:23 AM	BCl3 MFC set to  0.000000
8/18/2011	10:04:23 AM	PHl3 MFC set to  0.000000
8/18/2011	10:04:23 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:04:23 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:04:23 AM	Tube furnace set to 0
8/18/2011	10:04:26 AM	H2 valve closed
8/18/2011	10:04:26 AM	BCl3 valve closed
8/18/2011	10:04:26 AM	PH3 valve closed
8/18/2011	10:04:26 AM	SiCl4 pre valve closed
8/18/2011	10:04:26 AM	SiCl4 post valve closed
8/18/2011	10:04:26 AM	Main Vac valve closed
8/18/2011	10:04:26 AM	Bypass valve closed
8/18/2011	10:04:26 AM	Bubbler valve closed
8/18/2011	10:04:26 AM	Helium valve opened
8/18/2011	10:04:26 AM	Helium MFC set to  500.000000
8/18/2011	10:04:26 AM	H2 MFC set to  0.000000
8/18/2011	10:04:26 AM	BCl3 MFC set to  0.000000
8/18/2011	10:04:26 AM	PHl3 MFC set to  0.000000
8/18/2011	10:04:26 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:04:26 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:04:27 AM	Tube furnace set to 0
8/18/2011	10:05:32 AM	Helium valve closed
8/18/2011	10:05:32 AM	H2 valve closed
8/18/2011	10:05:32 AM	BCl3 valve closed
8/18/2011	10:05:32 AM	PH3 valve closed
8/18/2011	10:05:32 AM	SiCl4 pre valve closed
8/18/2011	10:05:32 AM	SiCl4 post valve closed
8/18/2011	10:05:32 AM	Main Vac valve closed
8/18/2011	10:05:32 AM	Bypass valve closed
8/18/2011	10:05:32 AM	Bubbler valve closed
8/18/2011	10:05:32 AM	Helium MFC set to  0.000000
8/18/2011	10:05:32 AM	H2 MFC set to  0.000000
8/18/2011	10:05:32 AM	BCl3 MFC set to  0.000000
8/18/2011	10:05:32 AM	PHl3 MFC set to  0.000000
8/18/2011	10:05:32 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:05:32 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:05:32 AM	Tube furnace set to 0
8/18/2011	10:05:33 AM	Run finished at 10:05 AM
8/18/2011	10:05:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2011	10:10:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2011	10:10:51 AM	Recipe started at 10:10 AM
8/18/2011	10:10:51 AM	Helium valve closed
8/18/2011	10:10:51 AM	H2 valve closed
8/18/2011	10:10:51 AM	BCl3 valve closed
8/18/2011	10:10:51 AM	PH3 valve closed
8/18/2011	10:10:51 AM	SiCl4 pre valve closed
8/18/2011	10:10:51 AM	SiCl4 post valve closed
8/18/2011	10:10:51 AM	Main Vac valve closed
8/18/2011	10:10:51 AM	Bubbler valve closed
8/18/2011	10:10:51 AM	Bypass valve opened
8/18/2011	10:10:51 AM	Helium MFC set to  0.000000
8/18/2011	10:10:51 AM	H2 MFC set to  0.000000
8/18/2011	10:10:51 AM	BCl3 MFC set to  0.000000
8/18/2011	10:10:51 AM	PHl3 MFC set to  0.000000
8/18/2011	10:10:51 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:10:51 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:10:51 AM	Tube furnace set to 0
8/18/2011	10:12:03 AM	Helium valve closed
8/18/2011	10:12:03 AM	H2 valve closed
8/18/2011	10:12:03 AM	BCl3 valve closed
8/18/2011	10:12:03 AM	PH3 valve closed
8/18/2011	10:12:03 AM	SiCl4 pre valve closed
8/18/2011	10:12:03 AM	SiCl4 post valve closed
8/18/2011	10:12:03 AM	Main Vac valve closed
8/18/2011	10:12:03 AM	Bubbler valve closed
8/18/2011	10:12:03 AM	Bypass valve opened
8/18/2011	10:12:03 AM	Helium MFC set to  0.000000
8/18/2011	10:12:03 AM	H2 MFC set to  0.000000
8/18/2011	10:12:03 AM	BCl3 MFC set to  0.000000
8/18/2011	10:12:03 AM	PHl3 MFC set to  0.000000
8/18/2011	10:12:03 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:12:03 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:12:03 AM	Tube furnace set to 0
8/18/2011	10:13:03 AM	Helium valve closed
8/18/2011	10:13:03 AM	H2 valve closed
8/18/2011	10:13:03 AM	BCl3 valve closed
8/18/2011	10:13:03 AM	PH3 valve closed
8/18/2011	10:13:03 AM	SiCl4 pre valve closed
8/18/2011	10:13:03 AM	SiCl4 post valve closed
8/18/2011	10:13:03 AM	Bypass valve closed
8/18/2011	10:13:03 AM	Bubbler valve closed
8/18/2011	10:13:03 AM	Main Vac valve opened
8/18/2011	10:13:03 AM	Helium MFC set to  0.000000
8/18/2011	10:13:03 AM	H2 MFC set to  0.000000
8/18/2011	10:13:03 AM	BCl3 MFC set to  0.000000
8/18/2011	10:13:03 AM	PHl3 MFC set to  0.000000
8/18/2011	10:13:03 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:13:03 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:13:04 AM	Tube furnace set to 0
8/18/2011	10:13:05 AM	Run finished at 10:13 AM
8/18/2011	10:13:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2011	10:13:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/18/2011	10:13:35 AM	Recipe started at 10:13 AM
8/18/2011	10:13:35 AM	Helium valve closed
8/18/2011	10:13:35 AM	H2 valve closed
8/18/2011	10:13:35 AM	BCl3 valve closed
8/18/2011	10:13:35 AM	PH3 valve closed
8/18/2011	10:13:35 AM	SiCl4 pre valve closed
8/18/2011	10:13:35 AM	SiCl4 post valve closed
8/18/2011	10:13:35 AM	Main Vac valve closed
8/18/2011	10:13:35 AM	Bubbler valve closed
8/18/2011	10:13:35 AM	Bypass valve opened
8/18/2011	10:13:35 AM	Helium MFC set to  0.000000
8/18/2011	10:13:35 AM	H2 MFC set to  0.000000
8/18/2011	10:13:35 AM	BCl3 MFC set to  0.000000
8/18/2011	10:13:35 AM	PHl3 MFC set to  0.000000
8/18/2011	10:13:35 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:13:35 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:13:36 AM	Tube furnace set to 0
8/18/2011	10:13:36 AM	Helium valve closed
8/18/2011	10:13:36 AM	H2 valve closed
8/18/2011	10:13:36 AM	BCl3 valve closed
8/18/2011	10:13:36 AM	PH3 valve closed
8/18/2011	10:13:36 AM	SiCl4 pre valve closed
8/18/2011	10:13:36 AM	SiCl4 post valve closed
8/18/2011	10:13:36 AM	Main Vac valve closed
8/18/2011	10:13:36 AM	Bubbler valve closed
8/18/2011	10:13:36 AM	Bypass valve opened
8/18/2011	10:13:36 AM	Helium MFC set to  0.000000
8/18/2011	10:13:36 AM	H2 MFC set to  0.000000
8/18/2011	10:13:36 AM	BCl3 MFC set to  0.000000
8/18/2011	10:13:36 AM	PHl3 MFC set to  0.000000
8/18/2011	10:13:36 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:13:36 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:13:36 AM	Tube furnace set to 0
8/18/2011	10:13:48 AM	Helium valve closed
8/18/2011	10:13:48 AM	H2 valve closed
8/18/2011	10:13:48 AM	BCl3 valve closed
8/18/2011	10:13:48 AM	PH3 valve closed
8/18/2011	10:13:48 AM	SiCl4 pre valve closed
8/18/2011	10:13:48 AM	SiCl4 post valve closed
8/18/2011	10:13:48 AM	Bypass valve closed
8/18/2011	10:13:48 AM	Bubbler valve closed
8/18/2011	10:13:48 AM	Main Vac valve opened
8/18/2011	10:13:48 AM	Helium MFC set to  0.000000
8/18/2011	10:13:48 AM	H2 MFC set to  0.000000
8/18/2011	10:13:48 AM	BCl3 MFC set to  0.000000
8/18/2011	10:13:48 AM	PHl3 MFC set to  0.000000
8/18/2011	10:13:48 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:13:48 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:13:48 AM	Tube furnace set to 0
8/18/2011	10:13:54 AM	H2 valve closed
8/18/2011	10:13:54 AM	BCl3 valve closed
8/18/2011	10:13:54 AM	PH3 valve closed
8/18/2011	10:13:54 AM	SiCl4 pre valve closed
8/18/2011	10:13:54 AM	SiCl4 post valve closed
8/18/2011	10:13:54 AM	Bypass valve closed
8/18/2011	10:13:54 AM	Bubbler valve closed
8/18/2011	10:13:54 AM	Helium valve opened
8/18/2011	10:13:54 AM	Main Vac valve opened
8/18/2011	10:13:54 AM	Helium MFC set to  20.000000
8/18/2011	10:13:54 AM	H2 MFC set to  0.000000
8/18/2011	10:13:54 AM	BCl3 MFC set to  0.000000
8/18/2011	10:13:54 AM	PHl3 MFC set to  0.000000
8/18/2011	10:13:54 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:13:54 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:13:54 AM	Tube furnace set to 0
8/18/2011	10:14:22 AM	Helium valve closed
8/18/2011	10:14:22 AM	H2 valve closed
8/18/2011	10:14:22 AM	BCl3 valve closed
8/18/2011	10:14:22 AM	PH3 valve closed
8/18/2011	10:14:22 AM	SiCl4 pre valve closed
8/18/2011	10:14:22 AM	SiCl4 post valve closed
8/18/2011	10:14:22 AM	Bypass valve closed
8/18/2011	10:14:22 AM	Bubbler valve closed
8/18/2011	10:14:22 AM	Main Vac valve opened
8/18/2011	10:14:22 AM	Helium MFC set to  0.000000
8/18/2011	10:14:22 AM	H2 MFC set to  0.000000
8/18/2011	10:14:22 AM	BCl3 MFC set to  0.000000
8/18/2011	10:14:22 AM	PHl3 MFC set to  0.000000
8/18/2011	10:14:22 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:14:22 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:14:22 AM	Tube furnace set to 0
8/18/2011	10:14:37 AM	Run aborted at 10:14 AM
8/18/2011	10:14:37 AM	Helium valve closed
8/18/2011	10:14:37 AM	H2 valve closed
8/18/2011	10:14:37 AM	BCl3 valve closed
8/18/2011	10:14:37 AM	PH3 valve closed
8/18/2011	10:14:37 AM	SiCl4 pre valve closed
8/18/2011	10:14:37 AM	SiCl4 post valve closed
8/18/2011	10:14:37 AM	Bypass valve closed
8/18/2011	10:14:37 AM	Main Vac valve closed
8/18/2011	10:14:37 AM	Bubbler valve closed
8/18/2011	10:14:37 AM	Helium MFC set to  0.000000
8/18/2011	10:14:37 AM	H2 MFC set to  0.000000
8/18/2011	10:14:37 AM	BCl3 MFC set to  0.000000
8/18/2011	10:14:37 AM	PHl3 MFC set to  0.000000
8/18/2011	10:14:37 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:14:37 AM	Tube furnace set to 0
8/18/2011	10:14:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/18/2011	10:14:46 AM	Helium valve opened
8/18/2011	10:14:52 AM	Helium MFC set to  0.000000
8/18/2011	10:15:01 AM	Helium MFC set to  20.000000
8/18/2011	10:15:19 AM	Helium MFC set to  0.000000
8/18/2011	10:15:21 AM	Helium valve closed
8/18/2011	10:15:22 AM	Bypass valve opened
8/18/2011	10:16:28 AM	Bypass valve closed
8/18/2011	10:16:29 AM	Main Vac valve opened
8/18/2011	10:16:41 AM	Program exited cleanly
8/18/2011	10:16:43 AM	Program started normally
8/18/2011	10:16:43 AM	Helium valve closed
8/18/2011	10:16:43 AM	H2 valve closed
8/18/2011	10:16:43 AM	BCl3 valve closed
8/18/2011	10:16:43 AM	PH3 valve closed
8/18/2011	10:16:43 AM	SiCl4 pre valve closed
8/18/2011	10:16:43 AM	SiCl4 post valve closed
8/18/2011	10:16:43 AM	Main Vac valve closed
8/18/2011	10:16:43 AM	Bypass valve closed
8/18/2011	10:16:43 AM	Bubbler valve closed
8/18/2011	10:16:43 AM	Helium MFC set to  0.000000
8/18/2011	10:16:43 AM	H2 MFC set to  0.000000
8/18/2011	10:16:43 AM	BCl3 MFC set to  0.000000
8/18/2011	10:16:43 AM	PHl3 MFC set to  0.000000
8/18/2011	10:16:43 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:16:43 AM	Bypass solenoid MFC set to  760.000000
8/18/2011	10:16:43 AM	Tube furnace set to 0
8/18/2011	10:16:45 AM	Main Vac valve opened
8/18/2011	10:19:08 AM	Recipe started at 10:19 AM
8/18/2011	10:19:09 AM	Helium valve closed
8/18/2011	10:19:09 AM	H2 valve closed
8/18/2011	10:19:09 AM	BCl3 valve closed
8/18/2011	10:19:09 AM	PH3 valve closed
8/18/2011	10:19:09 AM	SiCl4 pre valve closed
8/18/2011	10:19:09 AM	SiCl4 post valve closed
8/18/2011	10:19:09 AM	Bypass valve closed
8/18/2011	10:19:09 AM	Bubbler valve closed
8/18/2011	10:19:09 AM	Main Vac valve opened
8/18/2011	10:19:09 AM	Helium MFC set to  0.000000
8/18/2011	10:19:09 AM	H2 MFC set to  0.000000
8/18/2011	10:19:09 AM	BCl3 MFC set to  0.000000
8/18/2011	10:19:09 AM	PHl3 MFC set to  0.000000
8/18/2011	10:19:09 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:19:09 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:19:09 AM	Tube furnace set to 150
8/18/2011	10:19:39 AM	H2 valve closed
8/18/2011	10:19:39 AM	BCl3 valve closed
8/18/2011	10:19:39 AM	PH3 valve closed
8/18/2011	10:19:39 AM	SiCl4 pre valve closed
8/18/2011	10:19:39 AM	SiCl4 post valve closed
8/18/2011	10:19:39 AM	Bypass valve closed
8/18/2011	10:19:39 AM	Bubbler valve closed
8/18/2011	10:19:39 AM	Helium valve opened
8/18/2011	10:19:39 AM	Main Vac valve opened
8/18/2011	10:19:39 AM	Helium MFC set to  20.000000
8/18/2011	10:19:39 AM	H2 MFC set to  0.000000
8/18/2011	10:19:39 AM	BCl3 MFC set to  0.000000
8/18/2011	10:19:39 AM	PHl3 MFC set to  0.000000
8/18/2011	10:19:39 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:19:39 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:19:39 AM	Tube furnace set to 150
8/18/2011	10:20:09 AM	Helium valve closed
8/18/2011	10:20:09 AM	H2 valve closed
8/18/2011	10:20:09 AM	BCl3 valve closed
8/18/2011	10:20:09 AM	PH3 valve closed
8/18/2011	10:20:09 AM	SiCl4 pre valve closed
8/18/2011	10:20:09 AM	SiCl4 post valve closed
8/18/2011	10:20:09 AM	Bypass valve closed
8/18/2011	10:20:09 AM	Bubbler valve closed
8/18/2011	10:20:09 AM	Main Vac valve opened
8/18/2011	10:20:09 AM	Helium MFC set to  0.000000
8/18/2011	10:20:09 AM	H2 MFC set to  0.000000
8/18/2011	10:20:09 AM	BCl3 MFC set to  0.000000
8/18/2011	10:20:09 AM	PHl3 MFC set to  0.000000
8/18/2011	10:20:09 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:20:09 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:20:09 AM	Tube furnace set to 150
8/18/2011	10:20:39 AM	H2 valve closed
8/18/2011	10:20:39 AM	BCl3 valve closed
8/18/2011	10:20:39 AM	PH3 valve closed
8/18/2011	10:20:39 AM	SiCl4 pre valve closed
8/18/2011	10:20:39 AM	SiCl4 post valve closed
8/18/2011	10:20:39 AM	Bypass valve closed
8/18/2011	10:20:39 AM	Bubbler valve closed
8/18/2011	10:20:39 AM	Helium valve opened
8/18/2011	10:20:39 AM	Main Vac valve opened
8/18/2011	10:20:39 AM	Helium MFC set to  20.000000
8/18/2011	10:20:39 AM	H2 MFC set to  0.000000
8/18/2011	10:20:39 AM	BCl3 MFC set to  0.000000
8/18/2011	10:20:39 AM	PHl3 MFC set to  0.000000
8/18/2011	10:20:39 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:20:39 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:20:39 AM	Tube furnace set to 150
8/18/2011	10:21:09 AM	Helium valve closed
8/18/2011	10:21:09 AM	H2 valve closed
8/18/2011	10:21:09 AM	BCl3 valve closed
8/18/2011	10:21:09 AM	PH3 valve closed
8/18/2011	10:21:09 AM	SiCl4 pre valve closed
8/18/2011	10:21:09 AM	SiCl4 post valve closed
8/18/2011	10:21:09 AM	Bypass valve closed
8/18/2011	10:21:09 AM	Bubbler valve closed
8/18/2011	10:21:09 AM	Main Vac valve opened
8/18/2011	10:21:09 AM	Helium MFC set to  0.000000
8/18/2011	10:21:09 AM	H2 MFC set to  0.000000
8/18/2011	10:21:09 AM	BCl3 MFC set to  0.000000
8/18/2011	10:21:09 AM	PHl3 MFC set to  0.000000
8/18/2011	10:21:09 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:21:09 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:21:09 AM	Tube furnace set to 150
8/18/2011	10:21:39 AM	H2 valve closed
8/18/2011	10:21:39 AM	BCl3 valve closed
8/18/2011	10:21:39 AM	PH3 valve closed
8/18/2011	10:21:40 AM	SiCl4 pre valve closed
8/18/2011	10:21:40 AM	SiCl4 post valve closed
8/18/2011	10:21:40 AM	Bypass valve closed
8/18/2011	10:21:40 AM	Bubbler valve closed
8/18/2011	10:21:40 AM	Helium valve opened
8/18/2011	10:21:40 AM	Main Vac valve opened
8/18/2011	10:21:40 AM	Helium MFC set to  20.000000
8/18/2011	10:21:40 AM	H2 MFC set to  0.000000
8/18/2011	10:21:40 AM	BCl3 MFC set to  0.000000
8/18/2011	10:21:40 AM	PHl3 MFC set to  0.000000
8/18/2011	10:21:40 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:21:40 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:21:40 AM	Tube furnace set to 150
8/18/2011	10:22:10 AM	Helium valve closed
8/18/2011	10:22:10 AM	H2 valve closed
8/18/2011	10:22:10 AM	BCl3 valve closed
8/18/2011	10:22:10 AM	PH3 valve closed
8/18/2011	10:22:10 AM	SiCl4 pre valve closed
8/18/2011	10:22:10 AM	SiCl4 post valve closed
8/18/2011	10:22:10 AM	Bypass valve closed
8/18/2011	10:22:10 AM	Bubbler valve closed
8/18/2011	10:22:10 AM	Main Vac valve opened
8/18/2011	10:22:10 AM	Helium MFC set to  0.000000
8/18/2011	10:22:10 AM	H2 MFC set to  0.000000
8/18/2011	10:22:10 AM	BCl3 MFC set to  0.000000
8/18/2011	10:22:10 AM	PHl3 MFC set to  0.000000
8/18/2011	10:22:10 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:22:10 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:22:10 AM	Tube furnace set to 150
8/18/2011	10:22:40 AM	H2 valve closed
8/18/2011	10:22:40 AM	BCl3 valve closed
8/18/2011	10:22:40 AM	PH3 valve closed
8/18/2011	10:22:40 AM	SiCl4 pre valve closed
8/18/2011	10:22:40 AM	SiCl4 post valve closed
8/18/2011	10:22:40 AM	Bypass valve closed
8/18/2011	10:22:40 AM	Bubbler valve closed
8/18/2011	10:22:40 AM	Helium valve opened
8/18/2011	10:22:40 AM	Main Vac valve opened
8/18/2011	10:22:40 AM	Helium MFC set to  20.000000
8/18/2011	10:22:40 AM	H2 MFC set to  0.000000
8/18/2011	10:22:40 AM	BCl3 MFC set to  0.000000
8/18/2011	10:22:40 AM	PHl3 MFC set to  0.000000
8/18/2011	10:22:40 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:22:40 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:22:40 AM	Tube furnace set to 150
8/18/2011	10:23:10 AM	Helium valve closed
8/18/2011	10:23:10 AM	H2 valve closed
8/18/2011	10:23:10 AM	BCl3 valve closed
8/18/2011	10:23:10 AM	PH3 valve closed
8/18/2011	10:23:10 AM	SiCl4 pre valve closed
8/18/2011	10:23:10 AM	SiCl4 post valve closed
8/18/2011	10:23:10 AM	Bypass valve closed
8/18/2011	10:23:10 AM	Bubbler valve closed
8/18/2011	10:23:10 AM	Main Vac valve opened
8/18/2011	10:23:10 AM	Helium MFC set to  0.000000
8/18/2011	10:23:10 AM	H2 MFC set to  0.000000
8/18/2011	10:23:10 AM	BCl3 MFC set to  0.000000
8/18/2011	10:23:10 AM	PHl3 MFC set to  0.000000
8/18/2011	10:23:10 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:23:10 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:23:10 AM	Tube furnace set to 150
8/18/2011	10:23:40 AM	H2 valve closed
8/18/2011	10:23:40 AM	BCl3 valve closed
8/18/2011	10:23:40 AM	PH3 valve closed
8/18/2011	10:23:40 AM	SiCl4 pre valve closed
8/18/2011	10:23:40 AM	SiCl4 post valve closed
8/18/2011	10:23:40 AM	Bypass valve closed
8/18/2011	10:23:40 AM	Bubbler valve closed
8/18/2011	10:23:40 AM	Helium valve opened
8/18/2011	10:23:40 AM	Main Vac valve opened
8/18/2011	10:23:40 AM	Helium MFC set to  20.000000
8/18/2011	10:23:40 AM	H2 MFC set to  0.000000
8/18/2011	10:23:40 AM	BCl3 MFC set to  0.000000
8/18/2011	10:23:40 AM	PHl3 MFC set to  0.000000
8/18/2011	10:23:40 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:23:40 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:23:40 AM	Tube furnace set to 150
8/18/2011	10:24:10 AM	Helium valve closed
8/18/2011	10:24:10 AM	H2 valve closed
8/18/2011	10:24:10 AM	BCl3 valve closed
8/18/2011	10:24:10 AM	PH3 valve closed
8/18/2011	10:24:10 AM	SiCl4 pre valve closed
8/18/2011	10:24:10 AM	SiCl4 post valve closed
8/18/2011	10:24:10 AM	Bypass valve closed
8/18/2011	10:24:10 AM	Bubbler valve closed
8/18/2011	10:24:10 AM	Main Vac valve opened
8/18/2011	10:24:10 AM	Helium MFC set to  0.000000
8/18/2011	10:24:10 AM	H2 MFC set to  0.000000
8/18/2011	10:24:11 AM	BCl3 MFC set to  0.000000
8/18/2011	10:24:11 AM	PHl3 MFC set to  0.000000
8/18/2011	10:24:11 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:24:11 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:24:11 AM	Tube furnace set to 150
8/18/2011	10:24:41 AM	H2 valve closed
8/18/2011	10:24:41 AM	BCl3 valve closed
8/18/2011	10:24:41 AM	PH3 valve closed
8/18/2011	10:24:41 AM	SiCl4 pre valve closed
8/18/2011	10:24:41 AM	SiCl4 post valve closed
8/18/2011	10:24:41 AM	Bypass valve closed
8/18/2011	10:24:41 AM	Bubbler valve closed
8/18/2011	10:24:41 AM	Helium valve opened
8/18/2011	10:24:41 AM	Main Vac valve opened
8/18/2011	10:24:41 AM	Helium MFC set to  20.000000
8/18/2011	10:24:41 AM	H2 MFC set to  0.000000
8/18/2011	10:24:41 AM	BCl3 MFC set to  0.000000
8/18/2011	10:24:41 AM	PHl3 MFC set to  0.000000
8/18/2011	10:24:41 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:24:41 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:24:41 AM	Tube furnace set to 150
8/18/2011	10:25:11 AM	Helium valve closed
8/18/2011	10:25:11 AM	H2 valve closed
8/18/2011	10:25:11 AM	BCl3 valve closed
8/18/2011	10:25:11 AM	PH3 valve closed
8/18/2011	10:25:11 AM	SiCl4 pre valve closed
8/18/2011	10:25:11 AM	SiCl4 post valve closed
8/18/2011	10:25:11 AM	Bypass valve closed
8/18/2011	10:25:11 AM	Bubbler valve closed
8/18/2011	10:25:11 AM	Main Vac valve opened
8/18/2011	10:25:11 AM	Helium MFC set to  0.000000
8/18/2011	10:25:11 AM	H2 MFC set to  0.000000
8/18/2011	10:25:11 AM	BCl3 MFC set to  0.000000
8/18/2011	10:25:11 AM	PHl3 MFC set to  0.000000
8/18/2011	10:25:11 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:25:11 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:25:11 AM	Tube furnace set to 150
8/18/2011	10:25:41 AM	H2 valve closed
8/18/2011	10:25:41 AM	BCl3 valve closed
8/18/2011	10:25:41 AM	PH3 valve closed
8/18/2011	10:25:41 AM	SiCl4 pre valve closed
8/18/2011	10:25:41 AM	SiCl4 post valve closed
8/18/2011	10:25:41 AM	Bypass valve closed
8/18/2011	10:25:41 AM	Bubbler valve closed
8/18/2011	10:25:41 AM	Helium valve opened
8/18/2011	10:25:41 AM	Main Vac valve opened
8/18/2011	10:25:41 AM	Helium MFC set to  20.000000
8/18/2011	10:25:41 AM	H2 MFC set to  0.000000
8/18/2011	10:25:41 AM	BCl3 MFC set to  0.000000
8/18/2011	10:25:41 AM	PHl3 MFC set to  0.000000
8/18/2011	10:25:41 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:25:41 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:25:41 AM	Tube furnace set to 150
8/18/2011	10:26:11 AM	Helium valve closed
8/18/2011	10:26:11 AM	H2 valve closed
8/18/2011	10:26:11 AM	BCl3 valve closed
8/18/2011	10:26:11 AM	PH3 valve closed
8/18/2011	10:26:11 AM	SiCl4 pre valve closed
8/18/2011	10:26:11 AM	SiCl4 post valve closed
8/18/2011	10:26:11 AM	Bypass valve closed
8/18/2011	10:26:11 AM	Bubbler valve closed
8/18/2011	10:26:11 AM	Main Vac valve opened
8/18/2011	10:26:11 AM	Helium MFC set to  0.000000
8/18/2011	10:26:11 AM	H2 MFC set to  0.000000
8/18/2011	10:26:11 AM	BCl3 MFC set to  0.000000
8/18/2011	10:26:11 AM	PHl3 MFC set to  0.000000
8/18/2011	10:26:11 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:26:11 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:26:11 AM	Tube furnace set to 150
8/18/2011	10:26:41 AM	H2 valve closed
8/18/2011	10:26:41 AM	BCl3 valve closed
8/18/2011	10:26:41 AM	PH3 valve closed
8/18/2011	10:26:41 AM	SiCl4 pre valve closed
8/18/2011	10:26:41 AM	SiCl4 post valve closed
8/18/2011	10:26:41 AM	Bypass valve closed
8/18/2011	10:26:41 AM	Bubbler valve closed
8/18/2011	10:26:42 AM	Helium valve opened
8/18/2011	10:26:42 AM	Main Vac valve opened
8/18/2011	10:26:42 AM	Helium MFC set to  20.000000
8/18/2011	10:26:42 AM	H2 MFC set to  0.000000
8/18/2011	10:26:42 AM	BCl3 MFC set to  0.000000
8/18/2011	10:26:42 AM	PHl3 MFC set to  0.000000
8/18/2011	10:26:42 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:26:42 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:26:42 AM	Tube furnace set to 150
8/18/2011	10:27:12 AM	Helium valve closed
8/18/2011	10:27:12 AM	H2 valve closed
8/18/2011	10:27:12 AM	BCl3 valve closed
8/18/2011	10:27:12 AM	PH3 valve closed
8/18/2011	10:27:12 AM	SiCl4 pre valve closed
8/18/2011	10:27:12 AM	SiCl4 post valve closed
8/18/2011	10:27:12 AM	Bypass valve closed
8/18/2011	10:27:12 AM	Bubbler valve closed
8/18/2011	10:27:12 AM	Main Vac valve opened
8/18/2011	10:27:12 AM	Helium MFC set to  0.000000
8/18/2011	10:27:12 AM	H2 MFC set to  0.000000
8/18/2011	10:27:12 AM	BCl3 MFC set to  0.000000
8/18/2011	10:27:12 AM	PHl3 MFC set to  0.000000
8/18/2011	10:27:12 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:27:12 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:27:12 AM	Tube furnace set to 150
8/18/2011	10:27:42 AM	H2 valve closed
8/18/2011	10:27:42 AM	BCl3 valve closed
8/18/2011	10:27:42 AM	PH3 valve closed
8/18/2011	10:27:42 AM	SiCl4 pre valve closed
8/18/2011	10:27:42 AM	SiCl4 post valve closed
8/18/2011	10:27:42 AM	Bypass valve closed
8/18/2011	10:27:42 AM	Bubbler valve closed
8/18/2011	10:27:42 AM	Helium valve opened
8/18/2011	10:27:42 AM	Main Vac valve opened
8/18/2011	10:27:42 AM	Helium MFC set to  20.000000
8/18/2011	10:27:42 AM	H2 MFC set to  0.000000
8/18/2011	10:27:42 AM	BCl3 MFC set to  0.000000
8/18/2011	10:27:42 AM	PHl3 MFC set to  0.000000
8/18/2011	10:27:42 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:27:42 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:27:42 AM	Tube furnace set to 150
8/18/2011	10:28:12 AM	Helium valve closed
8/18/2011	10:28:12 AM	H2 valve closed
8/18/2011	10:28:12 AM	BCl3 valve closed
8/18/2011	10:28:12 AM	PH3 valve closed
8/18/2011	10:28:12 AM	SiCl4 pre valve closed
8/18/2011	10:28:12 AM	SiCl4 post valve closed
8/18/2011	10:28:12 AM	Bypass valve closed
8/18/2011	10:28:12 AM	Bubbler valve closed
8/18/2011	10:28:12 AM	Main Vac valve opened
8/18/2011	10:28:12 AM	Helium MFC set to  0.000000
8/18/2011	10:28:12 AM	H2 MFC set to  0.000000
8/18/2011	10:28:12 AM	BCl3 MFC set to  0.000000
8/18/2011	10:28:12 AM	PHl3 MFC set to  0.000000
8/18/2011	10:28:12 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:28:12 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:28:12 AM	Tube furnace set to 150
8/18/2011	10:28:42 AM	H2 valve closed
8/18/2011	10:28:42 AM	BCl3 valve closed
8/18/2011	10:28:42 AM	PH3 valve closed
8/18/2011	10:28:42 AM	SiCl4 pre valve closed
8/18/2011	10:28:42 AM	SiCl4 post valve closed
8/18/2011	10:28:42 AM	Bypass valve closed
8/18/2011	10:28:42 AM	Bubbler valve closed
8/18/2011	10:28:42 AM	Helium valve opened
8/18/2011	10:28:42 AM	Main Vac valve opened
8/18/2011	10:28:42 AM	Helium MFC set to  20.000000
8/18/2011	10:28:42 AM	H2 MFC set to  0.000000
8/18/2011	10:28:42 AM	BCl3 MFC set to  0.000000
8/18/2011	10:28:42 AM	PHl3 MFC set to  0.000000
8/18/2011	10:28:42 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:28:42 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:28:43 AM	Tube furnace set to 150
8/18/2011	10:29:13 AM	Helium valve closed
8/18/2011	10:29:13 AM	H2 valve closed
8/18/2011	10:29:13 AM	BCl3 valve closed
8/18/2011	10:29:13 AM	PH3 valve closed
8/18/2011	10:29:13 AM	SiCl4 pre valve closed
8/18/2011	10:29:13 AM	SiCl4 post valve closed
8/18/2011	10:29:13 AM	Bypass valve closed
8/18/2011	10:29:13 AM	Bubbler valve closed
8/18/2011	10:29:13 AM	Main Vac valve opened
8/18/2011	10:29:13 AM	Helium MFC set to  0.000000
8/18/2011	10:29:13 AM	H2 MFC set to  0.000000
8/18/2011	10:29:13 AM	BCl3 MFC set to  0.000000
8/18/2011	10:29:13 AM	PHl3 MFC set to  0.000000
8/18/2011	10:29:13 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:29:13 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:29:13 AM	Tube furnace set to 150
8/18/2011	10:29:14 AM	Run finished at 10:29 AM
8/18/2011	10:50:31 AM	Main Vac valve closed
8/18/2011	10:51:01 AM	Recipe started at 10:50 AM
8/18/2011	10:51:01 AM	Helium valve closed
8/18/2011	10:51:01 AM	H2 valve closed
8/18/2011	10:51:01 AM	BCl3 valve closed
8/18/2011	10:51:01 AM	PH3 valve closed
8/18/2011	10:51:01 AM	SiCl4 pre valve closed
8/18/2011	10:51:01 AM	SiCl4 post valve closed
8/18/2011	10:51:01 AM	Bypass valve closed
8/18/2011	10:51:01 AM	Bubbler valve closed
8/18/2011	10:51:01 AM	Main Vac valve opened
8/18/2011	10:51:01 AM	Helium MFC set to  0.000000
8/18/2011	10:51:01 AM	H2 MFC set to  0.000000
8/18/2011	10:51:01 AM	BCl3 MFC set to  0.000000
8/18/2011	10:51:01 AM	PHl3 MFC set to  0.000000
8/18/2011	10:51:01 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:51:01 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:51:01 AM	Tube furnace set to 150
8/18/2011	10:51:31 AM	H2 valve closed
8/18/2011	10:51:31 AM	BCl3 valve closed
8/18/2011	10:51:31 AM	PH3 valve closed
8/18/2011	10:51:31 AM	SiCl4 pre valve closed
8/18/2011	10:51:31 AM	SiCl4 post valve closed
8/18/2011	10:51:31 AM	Bypass valve closed
8/18/2011	10:51:31 AM	Bubbler valve closed
8/18/2011	10:51:31 AM	Helium valve opened
8/18/2011	10:51:31 AM	Main Vac valve opened
8/18/2011	10:51:31 AM	Helium MFC set to  20.000000
8/18/2011	10:51:31 AM	H2 MFC set to  0.000000
8/18/2011	10:51:31 AM	BCl3 MFC set to  0.000000
8/18/2011	10:51:31 AM	PHl3 MFC set to  0.000000
8/18/2011	10:51:31 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:51:31 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:51:31 AM	Tube furnace set to 150
8/18/2011	10:52:01 AM	Helium valve closed
8/18/2011	10:52:01 AM	H2 valve closed
8/18/2011	10:52:01 AM	BCl3 valve closed
8/18/2011	10:52:01 AM	PH3 valve closed
8/18/2011	10:52:01 AM	SiCl4 pre valve closed
8/18/2011	10:52:01 AM	SiCl4 post valve closed
8/18/2011	10:52:01 AM	Bypass valve closed
8/18/2011	10:52:01 AM	Bubbler valve closed
8/18/2011	10:52:01 AM	Main Vac valve opened
8/18/2011	10:52:01 AM	Helium MFC set to  0.000000
8/18/2011	10:52:01 AM	H2 MFC set to  0.000000
8/18/2011	10:52:01 AM	BCl3 MFC set to  0.000000
8/18/2011	10:52:01 AM	PHl3 MFC set to  0.000000
8/18/2011	10:52:01 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:52:01 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:52:01 AM	Tube furnace set to 150
8/18/2011	10:52:31 AM	H2 valve closed
8/18/2011	10:52:31 AM	BCl3 valve closed
8/18/2011	10:52:31 AM	PH3 valve closed
8/18/2011	10:52:31 AM	SiCl4 pre valve closed
8/18/2011	10:52:31 AM	SiCl4 post valve closed
8/18/2011	10:52:31 AM	Bypass valve closed
8/18/2011	10:52:31 AM	Bubbler valve closed
8/18/2011	10:52:31 AM	Helium valve opened
8/18/2011	10:52:31 AM	Main Vac valve opened
8/18/2011	10:52:31 AM	Helium MFC set to  20.000000
8/18/2011	10:52:31 AM	H2 MFC set to  0.000000
8/18/2011	10:52:31 AM	BCl3 MFC set to  0.000000
8/18/2011	10:52:31 AM	PHl3 MFC set to  0.000000
8/18/2011	10:52:31 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:52:31 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:52:32 AM	Tube furnace set to 150
8/18/2011	10:53:02 AM	Helium valve closed
8/18/2011	10:53:02 AM	H2 valve closed
8/18/2011	10:53:02 AM	BCl3 valve closed
8/18/2011	10:53:02 AM	PH3 valve closed
8/18/2011	10:53:02 AM	SiCl4 pre valve closed
8/18/2011	10:53:02 AM	SiCl4 post valve closed
8/18/2011	10:53:02 AM	Bypass valve closed
8/18/2011	10:53:02 AM	Bubbler valve closed
8/18/2011	10:53:02 AM	Main Vac valve opened
8/18/2011	10:53:02 AM	Helium MFC set to  0.000000
8/18/2011	10:53:02 AM	H2 MFC set to  0.000000
8/18/2011	10:53:02 AM	BCl3 MFC set to  0.000000
8/18/2011	10:53:02 AM	PHl3 MFC set to  0.000000
8/18/2011	10:53:02 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:53:02 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:53:02 AM	Tube furnace set to 150
8/18/2011	10:53:32 AM	H2 valve closed
8/18/2011	10:53:32 AM	BCl3 valve closed
8/18/2011	10:53:32 AM	PH3 valve closed
8/18/2011	10:53:32 AM	SiCl4 pre valve closed
8/18/2011	10:53:32 AM	SiCl4 post valve closed
8/18/2011	10:53:32 AM	Bypass valve closed
8/18/2011	10:53:32 AM	Bubbler valve closed
8/18/2011	10:53:32 AM	Helium valve opened
8/18/2011	10:53:32 AM	Main Vac valve opened
8/18/2011	10:53:32 AM	Helium MFC set to  20.000000
8/18/2011	10:53:32 AM	H2 MFC set to  0.000000
8/18/2011	10:53:32 AM	BCl3 MFC set to  0.000000
8/18/2011	10:53:32 AM	PHl3 MFC set to  0.000000
8/18/2011	10:53:32 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:53:32 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:53:32 AM	Tube furnace set to 150
8/18/2011	10:54:02 AM	Helium valve closed
8/18/2011	10:54:02 AM	H2 valve closed
8/18/2011	10:54:02 AM	BCl3 valve closed
8/18/2011	10:54:02 AM	PH3 valve closed
8/18/2011	10:54:02 AM	SiCl4 pre valve closed
8/18/2011	10:54:02 AM	SiCl4 post valve closed
8/18/2011	10:54:02 AM	Bypass valve closed
8/18/2011	10:54:02 AM	Bubbler valve closed
8/18/2011	10:54:02 AM	Main Vac valve opened
8/18/2011	10:54:02 AM	Helium MFC set to  0.000000
8/18/2011	10:54:02 AM	H2 MFC set to  0.000000
8/18/2011	10:54:02 AM	BCl3 MFC set to  0.000000
8/18/2011	10:54:02 AM	PHl3 MFC set to  0.000000
8/18/2011	10:54:02 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:54:02 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:54:02 AM	Tube furnace set to 150
8/18/2011	10:54:32 AM	H2 valve closed
8/18/2011	10:54:32 AM	BCl3 valve closed
8/18/2011	10:54:32 AM	PH3 valve closed
8/18/2011	10:54:32 AM	SiCl4 pre valve closed
8/18/2011	10:54:32 AM	SiCl4 post valve closed
8/18/2011	10:54:32 AM	Bypass valve closed
8/18/2011	10:54:32 AM	Bubbler valve closed
8/18/2011	10:54:32 AM	Helium valve opened
8/18/2011	10:54:32 AM	Main Vac valve opened
8/18/2011	10:54:32 AM	Helium MFC set to  20.000000
8/18/2011	10:54:32 AM	H2 MFC set to  0.000000
8/18/2011	10:54:32 AM	BCl3 MFC set to  0.000000
8/18/2011	10:54:32 AM	PHl3 MFC set to  0.000000
8/18/2011	10:54:32 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:54:32 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:54:32 AM	Tube furnace set to 150
8/18/2011	10:55:02 AM	Helium valve closed
8/18/2011	10:55:03 AM	H2 valve closed
8/18/2011	10:55:03 AM	BCl3 valve closed
8/18/2011	10:55:03 AM	PH3 valve closed
8/18/2011	10:55:03 AM	SiCl4 pre valve closed
8/18/2011	10:55:03 AM	SiCl4 post valve closed
8/18/2011	10:55:03 AM	Bypass valve closed
8/18/2011	10:55:03 AM	Bubbler valve closed
8/18/2011	10:55:03 AM	Main Vac valve opened
8/18/2011	10:55:03 AM	Helium MFC set to  0.000000
8/18/2011	10:55:03 AM	H2 MFC set to  0.000000
8/18/2011	10:55:03 AM	BCl3 MFC set to  0.000000
8/18/2011	10:55:03 AM	PHl3 MFC set to  0.000000
8/18/2011	10:55:03 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:55:03 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:55:03 AM	Tube furnace set to 150
8/18/2011	10:55:33 AM	H2 valve closed
8/18/2011	10:55:33 AM	BCl3 valve closed
8/18/2011	10:55:33 AM	PH3 valve closed
8/18/2011	10:55:33 AM	SiCl4 pre valve closed
8/18/2011	10:55:33 AM	SiCl4 post valve closed
8/18/2011	10:55:33 AM	Bypass valve closed
8/18/2011	10:55:33 AM	Bubbler valve closed
8/18/2011	10:55:33 AM	Helium valve opened
8/18/2011	10:55:33 AM	Main Vac valve opened
8/18/2011	10:55:33 AM	Helium MFC set to  20.000000
8/18/2011	10:55:33 AM	H2 MFC set to  0.000000
8/18/2011	10:55:33 AM	BCl3 MFC set to  0.000000
8/18/2011	10:55:33 AM	PHl3 MFC set to  0.000000
8/18/2011	10:55:33 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:55:33 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:55:33 AM	Tube furnace set to 150
8/18/2011	10:56:03 AM	Helium valve closed
8/18/2011	10:56:03 AM	H2 valve closed
8/18/2011	10:56:03 AM	BCl3 valve closed
8/18/2011	10:56:03 AM	PH3 valve closed
8/18/2011	10:56:03 AM	SiCl4 pre valve closed
8/18/2011	10:56:03 AM	SiCl4 post valve closed
8/18/2011	10:56:03 AM	Bypass valve closed
8/18/2011	10:56:03 AM	Bubbler valve closed
8/18/2011	10:56:03 AM	Main Vac valve opened
8/18/2011	10:56:03 AM	Helium MFC set to  0.000000
8/18/2011	10:56:03 AM	H2 MFC set to  0.000000
8/18/2011	10:56:03 AM	BCl3 MFC set to  0.000000
8/18/2011	10:56:03 AM	PHl3 MFC set to  0.000000
8/18/2011	10:56:03 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:56:03 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:56:03 AM	Tube furnace set to 150
8/18/2011	10:56:33 AM	H2 valve closed
8/18/2011	10:56:33 AM	BCl3 valve closed
8/18/2011	10:56:33 AM	PH3 valve closed
8/18/2011	10:56:33 AM	SiCl4 pre valve closed
8/18/2011	10:56:33 AM	SiCl4 post valve closed
8/18/2011	10:56:33 AM	Bypass valve closed
8/18/2011	10:56:33 AM	Bubbler valve closed
8/18/2011	10:56:33 AM	Helium valve opened
8/18/2011	10:56:33 AM	Main Vac valve opened
8/18/2011	10:56:33 AM	Helium MFC set to  20.000000
8/18/2011	10:56:33 AM	H2 MFC set to  0.000000
8/18/2011	10:56:33 AM	BCl3 MFC set to  0.000000
8/18/2011	10:56:33 AM	PHl3 MFC set to  0.000000
8/18/2011	10:56:33 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:56:33 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:56:33 AM	Tube furnace set to 150
8/18/2011	10:57:03 AM	Helium valve closed
8/18/2011	10:57:03 AM	H2 valve closed
8/18/2011	10:57:03 AM	BCl3 valve closed
8/18/2011	10:57:03 AM	PH3 valve closed
8/18/2011	10:57:03 AM	SiCl4 pre valve closed
8/18/2011	10:57:03 AM	SiCl4 post valve closed
8/18/2011	10:57:03 AM	Bypass valve closed
8/18/2011	10:57:03 AM	Bubbler valve closed
8/18/2011	10:57:03 AM	Main Vac valve opened
8/18/2011	10:57:03 AM	Helium MFC set to  0.000000
8/18/2011	10:57:03 AM	H2 MFC set to  0.000000
8/18/2011	10:57:03 AM	BCl3 MFC set to  0.000000
8/18/2011	10:57:03 AM	PHl3 MFC set to  0.000000
8/18/2011	10:57:03 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:57:03 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:57:04 AM	Tube furnace set to 150
8/18/2011	10:57:34 AM	H2 valve closed
8/18/2011	10:57:34 AM	BCl3 valve closed
8/18/2011	10:57:34 AM	PH3 valve closed
8/18/2011	10:57:34 AM	SiCl4 pre valve closed
8/18/2011	10:57:34 AM	SiCl4 post valve closed
8/18/2011	10:57:34 AM	Bypass valve closed
8/18/2011	10:57:34 AM	Bubbler valve closed
8/18/2011	10:57:34 AM	Helium valve opened
8/18/2011	10:57:34 AM	Main Vac valve opened
8/18/2011	10:57:34 AM	Helium MFC set to  20.000000
8/18/2011	10:57:34 AM	H2 MFC set to  0.000000
8/18/2011	10:57:34 AM	BCl3 MFC set to  0.000000
8/18/2011	10:57:34 AM	PHl3 MFC set to  0.000000
8/18/2011	10:57:34 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:57:34 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:57:34 AM	Tube furnace set to 150
8/18/2011	10:58:04 AM	Helium valve closed
8/18/2011	10:58:04 AM	H2 valve closed
8/18/2011	10:58:04 AM	BCl3 valve closed
8/18/2011	10:58:04 AM	PH3 valve closed
8/18/2011	10:58:04 AM	SiCl4 pre valve closed
8/18/2011	10:58:04 AM	SiCl4 post valve closed
8/18/2011	10:58:04 AM	Bypass valve closed
8/18/2011	10:58:04 AM	Bubbler valve closed
8/18/2011	10:58:04 AM	Main Vac valve opened
8/18/2011	10:58:04 AM	Helium MFC set to  0.000000
8/18/2011	10:58:04 AM	H2 MFC set to  0.000000
8/18/2011	10:58:04 AM	BCl3 MFC set to  0.000000
8/18/2011	10:58:04 AM	PHl3 MFC set to  0.000000
8/18/2011	10:58:04 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:58:04 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:58:04 AM	Tube furnace set to 150
8/18/2011	10:58:34 AM	H2 valve closed
8/18/2011	10:58:34 AM	BCl3 valve closed
8/18/2011	10:58:34 AM	PH3 valve closed
8/18/2011	10:58:34 AM	SiCl4 pre valve closed
8/18/2011	10:58:34 AM	SiCl4 post valve closed
8/18/2011	10:58:34 AM	Bypass valve closed
8/18/2011	10:58:34 AM	Bubbler valve closed
8/18/2011	10:58:34 AM	Helium valve opened
8/18/2011	10:58:34 AM	Main Vac valve opened
8/18/2011	10:58:34 AM	Helium MFC set to  20.000000
8/18/2011	10:58:34 AM	H2 MFC set to  0.000000
8/18/2011	10:58:34 AM	BCl3 MFC set to  0.000000
8/18/2011	10:58:34 AM	PHl3 MFC set to  0.000000
8/18/2011	10:58:34 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:58:34 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:58:34 AM	Tube furnace set to 150
8/18/2011	10:59:04 AM	Helium valve closed
8/18/2011	10:59:04 AM	H2 valve closed
8/18/2011	10:59:04 AM	BCl3 valve closed
8/18/2011	10:59:04 AM	PH3 valve closed
8/18/2011	10:59:04 AM	SiCl4 pre valve closed
8/18/2011	10:59:04 AM	SiCl4 post valve closed
8/18/2011	10:59:04 AM	Bypass valve closed
8/18/2011	10:59:04 AM	Bubbler valve closed
8/18/2011	10:59:04 AM	Main Vac valve opened
8/18/2011	10:59:04 AM	Helium MFC set to  0.000000
8/18/2011	10:59:04 AM	H2 MFC set to  0.000000
8/18/2011	10:59:04 AM	BCl3 MFC set to  0.000000
8/18/2011	10:59:04 AM	PHl3 MFC set to  0.000000
8/18/2011	10:59:04 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:59:04 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:59:04 AM	Tube furnace set to 150
8/18/2011	10:59:34 AM	H2 valve closed
8/18/2011	10:59:34 AM	BCl3 valve closed
8/18/2011	10:59:34 AM	PH3 valve closed
8/18/2011	10:59:34 AM	SiCl4 pre valve closed
8/18/2011	10:59:34 AM	SiCl4 post valve closed
8/18/2011	10:59:34 AM	Bypass valve closed
8/18/2011	10:59:34 AM	Bubbler valve closed
8/18/2011	10:59:34 AM	Helium valve opened
8/18/2011	10:59:34 AM	Main Vac valve opened
8/18/2011	10:59:34 AM	Helium MFC set to  20.000000
8/18/2011	10:59:34 AM	H2 MFC set to  0.000000
8/18/2011	10:59:34 AM	BCl3 MFC set to  0.000000
8/18/2011	10:59:34 AM	PHl3 MFC set to  0.000000
8/18/2011	10:59:34 AM	SiCl4 MFC set to  0.000000
8/18/2011	10:59:34 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	10:59:35 AM	Tube furnace set to 150
8/18/2011	11:00:05 AM	Helium valve closed
8/18/2011	11:00:05 AM	H2 valve closed
8/18/2011	11:00:05 AM	BCl3 valve closed
8/18/2011	11:00:05 AM	PH3 valve closed
8/18/2011	11:00:05 AM	SiCl4 pre valve closed
8/18/2011	11:00:05 AM	SiCl4 post valve closed
8/18/2011	11:00:05 AM	Bypass valve closed
8/18/2011	11:00:05 AM	Bubbler valve closed
8/18/2011	11:00:05 AM	Main Vac valve opened
8/18/2011	11:00:05 AM	Helium MFC set to  0.000000
8/18/2011	11:00:05 AM	H2 MFC set to  0.000000
8/18/2011	11:00:05 AM	BCl3 MFC set to  0.000000
8/18/2011	11:00:05 AM	PHl3 MFC set to  0.000000
8/18/2011	11:00:05 AM	SiCl4 MFC set to  0.000000
8/18/2011	11:00:05 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	11:00:05 AM	Tube furnace set to 150
8/18/2011	11:00:35 AM	H2 valve closed
8/18/2011	11:00:35 AM	BCl3 valve closed
8/18/2011	11:00:35 AM	PH3 valve closed
8/18/2011	11:00:35 AM	SiCl4 pre valve closed
8/18/2011	11:00:35 AM	SiCl4 post valve closed
8/18/2011	11:00:35 AM	Bypass valve closed
8/18/2011	11:00:35 AM	Bubbler valve closed
8/18/2011	11:00:35 AM	Helium valve opened
8/18/2011	11:00:35 AM	Main Vac valve opened
8/18/2011	11:00:35 AM	Helium MFC set to  20.000000
8/18/2011	11:00:35 AM	H2 MFC set to  0.000000
8/18/2011	11:00:35 AM	BCl3 MFC set to  0.000000
8/18/2011	11:00:35 AM	PHl3 MFC set to  0.000000
8/18/2011	11:00:35 AM	SiCl4 MFC set to  0.000000
8/18/2011	11:00:35 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	11:00:35 AM	Tube furnace set to 150
8/18/2011	11:01:05 AM	Helium valve closed
8/18/2011	11:01:05 AM	H2 valve closed
8/18/2011	11:01:05 AM	BCl3 valve closed
8/18/2011	11:01:05 AM	PH3 valve closed
8/18/2011	11:01:05 AM	SiCl4 pre valve closed
8/18/2011	11:01:05 AM	SiCl4 post valve closed
8/18/2011	11:01:05 AM	Bypass valve closed
8/18/2011	11:01:05 AM	Bubbler valve closed
8/18/2011	11:01:05 AM	Main Vac valve opened
8/18/2011	11:01:05 AM	Helium MFC set to  0.000000
8/18/2011	11:01:05 AM	H2 MFC set to  0.000000
8/18/2011	11:01:05 AM	BCl3 MFC set to  0.000000
8/18/2011	11:01:05 AM	PHl3 MFC set to  0.000000
8/18/2011	11:01:05 AM	SiCl4 MFC set to  0.000000
8/18/2011	11:01:05 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	11:01:05 AM	Tube furnace set to 150
8/18/2011	11:01:06 AM	Run finished at 11:01 AM
8/18/2011	11:06:43 AM	Main Vac valve closed
8/18/2011	11:07:06 AM	Main Vac valve opened
8/18/2011	11:11:10 AM	Main Vac valve closed
8/18/2011	11:11:24 AM	Recipe started at 11:11 AM
8/18/2011	11:11:24 AM	Helium valve closed
8/18/2011	11:11:24 AM	H2 valve closed
8/18/2011	11:11:24 AM	BCl3 valve closed
8/18/2011	11:11:24 AM	PH3 valve closed
8/18/2011	11:11:24 AM	SiCl4 pre valve closed
8/18/2011	11:11:24 AM	SiCl4 post valve closed
8/18/2011	11:11:24 AM	Bypass valve closed
8/18/2011	11:11:24 AM	Bubbler valve closed
8/18/2011	11:11:24 AM	Main Vac valve opened
8/18/2011	11:11:24 AM	Helium MFC set to  0.000000
8/18/2011	11:11:24 AM	H2 MFC set to  0.000000
8/18/2011	11:11:24 AM	BCl3 MFC set to  0.000000
8/18/2011	11:11:24 AM	PHl3 MFC set to  0.000000
8/18/2011	11:11:24 AM	SiCl4 MFC set to  0.000000
8/18/2011	11:11:24 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	11:11:24 AM	Tube furnace set to 150
8/18/2011	11:11:32 AM	H2 valve closed
8/18/2011	11:11:32 AM	BCl3 valve closed
8/18/2011	11:11:32 AM	PH3 valve closed
8/18/2011	11:11:32 AM	SiCl4 pre valve closed
8/18/2011	11:11:32 AM	SiCl4 post valve closed
8/18/2011	11:11:32 AM	Bypass valve closed
8/18/2011	11:11:32 AM	Bubbler valve closed
8/18/2011	11:11:32 AM	Helium valve opened
8/18/2011	11:11:32 AM	Main Vac valve opened
8/18/2011	11:11:32 AM	Helium MFC set to  20.000000
8/18/2011	11:11:32 AM	H2 MFC set to  0.000000
8/18/2011	11:11:32 AM	BCl3 MFC set to  0.000000
8/18/2011	11:11:32 AM	PHl3 MFC set to  0.000000
8/18/2011	11:11:32 AM	SiCl4 MFC set to  0.000000
8/18/2011	11:11:32 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	11:11:32 AM	Tube furnace set to 150
8/18/2011	11:12:02 AM	Helium valve closed
8/18/2011	11:12:02 AM	H2 valve closed
8/18/2011	11:12:02 AM	BCl3 valve closed
8/18/2011	11:12:02 AM	PH3 valve closed
8/18/2011	11:12:02 AM	SiCl4 pre valve closed
8/18/2011	11:12:02 AM	SiCl4 post valve closed
8/18/2011	11:12:02 AM	Bypass valve closed
8/18/2011	11:12:02 AM	Bubbler valve closed
8/18/2011	11:12:02 AM	Main Vac valve opened
8/18/2011	11:12:02 AM	Helium MFC set to  0.000000
8/18/2011	11:12:02 AM	H2 MFC set to  0.000000
8/18/2011	11:12:02 AM	BCl3 MFC set to  0.000000
8/18/2011	11:12:02 AM	PHl3 MFC set to  0.000000
8/18/2011	11:12:02 AM	SiCl4 MFC set to  0.000000
8/18/2011	11:12:02 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	11:12:02 AM	Tube furnace set to 150
8/18/2011	11:12:32 AM	H2 valve closed
8/18/2011	11:12:32 AM	BCl3 valve closed
8/18/2011	11:12:32 AM	PH3 valve closed
8/18/2011	11:12:32 AM	SiCl4 pre valve closed
8/18/2011	11:12:32 AM	SiCl4 post valve closed
8/18/2011	11:12:32 AM	Bypass valve closed
8/18/2011	11:12:32 AM	Bubbler valve closed
8/18/2011	11:12:32 AM	Helium valve opened
8/18/2011	11:12:32 AM	Main Vac valve opened
8/18/2011	11:12:32 AM	Helium MFC set to  20.000000
8/18/2011	11:12:32 AM	H2 MFC set to  0.000000
8/18/2011	11:12:32 AM	BCl3 MFC set to  0.000000
8/18/2011	11:12:32 AM	PHl3 MFC set to  0.000000
8/18/2011	11:12:32 AM	SiCl4 MFC set to  0.000000
8/18/2011	11:12:32 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	11:12:33 AM	Tube furnace set to 150
8/18/2011	11:12:43 AM	Run aborted at 11:12 AM
8/18/2011	11:12:43 AM	Helium valve closed
8/18/2011	11:12:43 AM	H2 valve closed
8/18/2011	11:12:43 AM	BCl3 valve closed
8/18/2011	11:12:43 AM	PH3 valve closed
8/18/2011	11:12:43 AM	SiCl4 pre valve closed
8/18/2011	11:12:43 AM	SiCl4 post valve closed
8/18/2011	11:12:43 AM	Bypass valve closed
8/18/2011	11:12:43 AM	Main Vac valve closed
8/18/2011	11:12:43 AM	Bubbler valve closed
8/18/2011	11:12:43 AM	Helium MFC set to  0.000000
8/18/2011	11:12:43 AM	H2 MFC set to  0.000000
8/18/2011	11:12:43 AM	BCl3 MFC set to  0.000000
8/18/2011	11:12:43 AM	PHl3 MFC set to  0.000000
8/18/2011	11:12:43 AM	SiCl4 MFC set to  0.000000
8/18/2011	11:12:43 AM	Tube furnace set to 0
8/18/2011	11:12:45 AM	Main Vac valve opened
8/18/2011	11:12:48 AM	Helium MFC set to  20.000000
8/18/2011	11:12:49 AM	Helium valve opened
8/18/2011	11:19:49 AM	Helium valve closed
8/18/2011	11:20:27 AM	Main Vac valve closed
8/18/2011	11:20:35 AM	Main Vac valve opened
8/18/2011	11:24:55 AM	Recipe started at 11:24 AM
8/18/2011	11:24:55 AM	Helium valve closed
8/18/2011	11:24:55 AM	H2 valve closed
8/18/2011	11:24:55 AM	BCl3 valve closed
8/18/2011	11:24:55 AM	PH3 valve closed
8/18/2011	11:24:55 AM	SiCl4 pre valve closed
8/18/2011	11:24:55 AM	SiCl4 post valve closed
8/18/2011	11:24:55 AM	Main Vac valve closed
8/18/2011	11:24:55 AM	Bypass valve closed
8/18/2011	11:24:55 AM	Bubbler valve closed
8/18/2011	11:24:55 AM	Helium MFC set to  0.000000
8/18/2011	11:24:55 AM	H2 MFC set to  0.000000
8/18/2011	11:24:55 AM	BCl3 MFC set to  0.000000
8/18/2011	11:24:55 AM	PHl3 MFC set to  0.000000
8/18/2011	11:24:55 AM	SiCl4 MFC set to  0.000000
8/18/2011	11:24:55 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	11:24:55 AM	Tube furnace set to 0
8/18/2011	11:24:58 AM	Helium valve closed
8/18/2011	11:24:58 AM	BCl3 valve closed
8/18/2011	11:24:58 AM	PH3 valve closed
8/18/2011	11:24:58 AM	SiCl4 pre valve closed
8/18/2011	11:24:58 AM	SiCl4 post valve closed
8/18/2011	11:24:58 AM	Main Vac valve closed
8/18/2011	11:24:58 AM	Bypass valve closed
8/18/2011	11:24:58 AM	Bubbler valve closed
8/18/2011	11:24:58 AM	H2 valve opened
8/18/2011	11:24:58 AM	Helium MFC set to  0.000000
8/18/2011	11:24:58 AM	H2 MFC set to  500.000000
8/18/2011	11:24:58 AM	BCl3 MFC set to  0.000000
8/18/2011	11:24:58 AM	PHl3 MFC set to  0.000000
8/18/2011	11:24:58 AM	SiCl4 MFC set to  0.000000
8/18/2011	11:24:58 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	11:24:58 AM	Tube furnace set to 0
8/18/2011	11:26:03 AM	Helium valve closed
8/18/2011	11:26:03 AM	BCl3 valve closed
8/18/2011	11:26:03 AM	PH3 valve closed
8/18/2011	11:26:03 AM	SiCl4 pre valve closed
8/18/2011	11:26:03 AM	SiCl4 post valve closed
8/18/2011	11:26:03 AM	Main Vac valve closed
8/18/2011	11:26:03 AM	Bypass valve closed
8/18/2011	11:26:03 AM	H2 valve opened
8/18/2011	11:26:03 AM	Bubbler valve opened
8/18/2011	11:26:03 AM	Helium MFC set to  0.000000
8/18/2011	11:26:03 AM	H2 MFC set to  500.000000
8/18/2011	11:26:03 AM	BCl3 MFC set to  0.000000
8/18/2011	11:26:03 AM	PHl3 MFC set to  0.000000
8/18/2011	11:26:03 AM	SiCl4 MFC set to  0.000000
8/18/2011	11:26:03 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	11:26:04 AM	Tube furnace set to 0
8/18/2011	11:26:05 AM	Helium valve closed
8/18/2011	11:26:05 AM	BCl3 valve closed
8/18/2011	11:26:05 AM	PH3 valve closed
8/18/2011	11:26:05 AM	SiCl4 pre valve closed
8/18/2011	11:26:05 AM	SiCl4 post valve closed
8/18/2011	11:26:05 AM	Main Vac valve closed
8/18/2011	11:26:05 AM	Bypass valve closed
8/18/2011	11:26:05 AM	H2 valve opened
8/18/2011	11:26:05 AM	Bubbler valve opened
8/18/2011	11:26:05 AM	Helium MFC set to  0.000000
8/18/2011	11:26:05 AM	H2 MFC set to  500.000000
8/18/2011	11:26:05 AM	BCl3 MFC set to  0.000000
8/18/2011	11:26:05 AM	PHl3 MFC set to  0.000000
8/18/2011	11:26:05 AM	SiCl4 MFC set to  0.000000
8/18/2011	11:26:05 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	11:26:05 AM	Tube furnace set to 1000
8/18/2011	11:46:05 AM	Helium valve closed
8/18/2011	11:46:05 AM	PH3 valve closed
8/18/2011	11:46:05 AM	Main Vac valve closed
8/18/2011	11:46:05 AM	Bypass valve closed
8/18/2011	11:46:05 AM	H2 valve opened
8/18/2011	11:46:05 AM	BCl3 valve opened
8/18/2011	11:46:05 AM	SiCl4 pre valve opened
8/18/2011	11:46:05 AM	SiCl4 post valve opened
8/18/2011	11:46:05 AM	Bubbler valve opened
8/18/2011	11:46:05 AM	Helium MFC set to  0.000000
8/18/2011	11:46:05 AM	H2 MFC set to  500.000000
8/18/2011	11:46:05 AM	BCl3 MFC set to  2.300000
8/18/2011	11:46:05 AM	PHl3 MFC set to  0.000000
8/18/2011	11:46:05 AM	SiCl4 MFC set to  50.000000
8/18/2011	11:46:05 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	11:46:05 AM	Tube furnace set to 1000
8/18/2011	11:59:05 AM	Helium valve closed
8/18/2011	11:59:05 AM	BCl3 valve closed
8/18/2011	11:59:05 AM	Main Vac valve closed
8/18/2011	11:59:05 AM	Bypass valve closed
8/18/2011	11:59:05 AM	H2 valve opened
8/18/2011	11:59:05 AM	PH3 valve opened
8/18/2011	11:59:05 AM	SiCl4 pre valve opened
8/18/2011	11:59:05 AM	SiCl4 post valve opened
8/18/2011	11:59:05 AM	Bubbler valve opened
8/18/2011	11:59:05 AM	Helium MFC set to  0.000000
8/18/2011	11:59:05 AM	H2 MFC set to  500.000000
8/18/2011	11:59:05 AM	BCl3 MFC set to  0.000000
8/18/2011	11:59:05 AM	PHl3 MFC set to  20.000000
8/18/2011	11:59:05 AM	SiCl4 MFC set to  50.000000
8/18/2011	11:59:05 AM	Bypass solenoid MFC set to  0.000000
8/18/2011	11:59:05 AM	Tube furnace set to 1000
8/18/2011	12:04:05 PM	Helium valve closed
8/18/2011	12:04:05 PM	BCl3 valve closed
8/18/2011	12:04:05 PM	PH3 valve closed
8/18/2011	12:04:05 PM	SiCl4 pre valve closed
8/18/2011	12:04:05 PM	SiCl4 post valve closed
8/18/2011	12:04:05 PM	Main Vac valve closed
8/18/2011	12:04:05 PM	Bypass valve closed
8/18/2011	12:04:05 PM	H2 valve opened
8/18/2011	12:04:05 PM	Bubbler valve opened
8/18/2011	12:04:05 PM	Helium MFC set to  0.000000
8/18/2011	12:04:05 PM	H2 MFC set to  500.000000
8/18/2011	12:04:05 PM	BCl3 MFC set to  0.000000
8/18/2011	12:04:05 PM	PHl3 MFC set to  0.000000
8/18/2011	12:04:05 PM	SiCl4 MFC set to  0.000000
8/18/2011	12:04:05 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:04:05 PM	Tube furnace set to 950
8/18/2011	12:07:05 PM	H2 valve closed
8/18/2011	12:07:05 PM	BCl3 valve closed
8/18/2011	12:07:05 PM	PH3 valve closed
8/18/2011	12:07:05 PM	SiCl4 pre valve closed
8/18/2011	12:07:05 PM	SiCl4 post valve closed
8/18/2011	12:07:05 PM	Main Vac valve closed
8/18/2011	12:07:05 PM	Bypass valve closed
8/18/2011	12:07:05 PM	Helium valve opened
8/18/2011	12:07:05 PM	Bubbler valve opened
8/18/2011	12:07:05 PM	Helium MFC set to  500.000000
8/18/2011	12:07:05 PM	H2 MFC set to  0.000000
8/18/2011	12:07:05 PM	BCl3 MFC set to  0.000000
8/18/2011	12:07:05 PM	PHl3 MFC set to  0.000000
8/18/2011	12:07:05 PM	SiCl4 MFC set to  0.000000
8/18/2011	12:07:05 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:07:05 PM	Tube furnace set to 900
8/18/2011	12:10:06 PM	H2 valve closed
8/18/2011	12:10:06 PM	BCl3 valve closed
8/18/2011	12:10:06 PM	PH3 valve closed
8/18/2011	12:10:06 PM	SiCl4 pre valve closed
8/18/2011	12:10:06 PM	SiCl4 post valve closed
8/18/2011	12:10:06 PM	Main Vac valve closed
8/18/2011	12:10:06 PM	Bypass valve closed
8/18/2011	12:10:06 PM	Helium valve opened
8/18/2011	12:10:06 PM	Bubbler valve opened
8/18/2011	12:10:06 PM	Helium MFC set to  500.000000
8/18/2011	12:10:06 PM	H2 MFC set to  0.000000
8/18/2011	12:10:06 PM	BCl3 MFC set to  0.000000
8/18/2011	12:10:06 PM	PHl3 MFC set to  0.000000
8/18/2011	12:10:06 PM	SiCl4 MFC set to  0.000000
8/18/2011	12:10:06 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:10:06 PM	Tube furnace set to 850
8/18/2011	12:13:06 PM	H2 valve closed
8/18/2011	12:13:06 PM	BCl3 valve closed
8/18/2011	12:13:06 PM	PH3 valve closed
8/18/2011	12:13:06 PM	SiCl4 pre valve closed
8/18/2011	12:13:06 PM	SiCl4 post valve closed
8/18/2011	12:13:06 PM	Main Vac valve closed
8/18/2011	12:13:06 PM	Bypass valve closed
8/18/2011	12:13:06 PM	Helium valve opened
8/18/2011	12:13:06 PM	Bubbler valve opened
8/18/2011	12:13:06 PM	Helium MFC set to  500.000000
8/18/2011	12:13:06 PM	H2 MFC set to  0.000000
8/18/2011	12:13:06 PM	BCl3 MFC set to  0.000000
8/18/2011	12:13:06 PM	PHl3 MFC set to  0.000000
8/18/2011	12:13:06 PM	SiCl4 MFC set to  0.000000
8/18/2011	12:13:06 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:13:06 PM	Tube furnace set to 800
8/18/2011	12:16:06 PM	H2 valve closed
8/18/2011	12:16:06 PM	BCl3 valve closed
8/18/2011	12:16:06 PM	PH3 valve closed
8/18/2011	12:16:06 PM	SiCl4 pre valve closed
8/18/2011	12:16:06 PM	SiCl4 post valve closed
8/18/2011	12:16:06 PM	Main Vac valve closed
8/18/2011	12:16:06 PM	Bypass valve closed
8/18/2011	12:16:06 PM	Helium valve opened
8/18/2011	12:16:06 PM	Bubbler valve opened
8/18/2011	12:16:06 PM	Helium MFC set to  500.000000
8/18/2011	12:16:06 PM	H2 MFC set to  0.000000
8/18/2011	12:16:06 PM	BCl3 MFC set to  0.000000
8/18/2011	12:16:06 PM	PHl3 MFC set to  0.000000
8/18/2011	12:16:06 PM	SiCl4 MFC set to  0.000000
8/18/2011	12:16:06 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:16:06 PM	Tube furnace set to 750
8/18/2011	12:19:06 PM	H2 valve closed
8/18/2011	12:19:06 PM	BCl3 valve closed
8/18/2011	12:19:06 PM	PH3 valve closed
8/18/2011	12:19:06 PM	SiCl4 pre valve closed
8/18/2011	12:19:06 PM	SiCl4 post valve closed
8/18/2011	12:19:06 PM	Main Vac valve closed
8/18/2011	12:19:06 PM	Bypass valve closed
8/18/2011	12:19:06 PM	Helium valve opened
8/18/2011	12:19:06 PM	Bubbler valve opened
8/18/2011	12:19:06 PM	Helium MFC set to  500.000000
8/18/2011	12:19:06 PM	H2 MFC set to  0.000000
8/18/2011	12:19:06 PM	BCl3 MFC set to  0.000000
8/18/2011	12:19:06 PM	PHl3 MFC set to  0.000000
8/18/2011	12:19:06 PM	SiCl4 MFC set to  0.000000
8/18/2011	12:19:06 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:19:06 PM	Tube furnace set to 0
8/18/2011	12:39:06 PM	Helium valve closed
8/18/2011	12:39:06 PM	H2 valve closed
8/18/2011	12:39:06 PM	BCl3 valve closed
8/18/2011	12:39:06 PM	PH3 valve closed
8/18/2011	12:39:06 PM	SiCl4 pre valve closed
8/18/2011	12:39:06 PM	SiCl4 post valve closed
8/18/2011	12:39:06 PM	Main Vac valve closed
8/18/2011	12:39:06 PM	Bypass valve closed
8/18/2011	12:39:06 PM	Bubbler valve closed
8/18/2011	12:39:06 PM	Helium MFC set to  0.000000
8/18/2011	12:39:06 PM	H2 MFC set to  0.000000
8/18/2011	12:39:06 PM	BCl3 MFC set to  0.000000
8/18/2011	12:39:06 PM	PHl3 MFC set to  0.000000
8/18/2011	12:39:06 PM	SiCl4 MFC set to  0.000000
8/18/2011	12:39:06 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	12:39:06 PM	Tube furnace set to 0
8/18/2011	12:39:07 PM	Run finished at 12:39 PM
8/18/2011	1:24:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2011	1:24:56 PM	Recipe started at 1:24 PM
8/18/2011	1:24:56 PM	Helium valve closed
8/18/2011	1:24:56 PM	H2 valve closed
8/18/2011	1:24:56 PM	BCl3 valve closed
8/18/2011	1:24:56 PM	PH3 valve closed
8/18/2011	1:24:56 PM	SiCl4 pre valve closed
8/18/2011	1:24:56 PM	SiCl4 post valve closed
8/18/2011	1:24:56 PM	Main Vac valve closed
8/18/2011	1:24:56 PM	Bypass valve closed
8/18/2011	1:24:56 PM	Bubbler valve closed
8/18/2011	1:24:56 PM	Helium MFC set to  0.000000
8/18/2011	1:24:56 PM	H2 MFC set to  0.000000
8/18/2011	1:24:56 PM	BCl3 MFC set to  0.000000
8/18/2011	1:24:56 PM	PHl3 MFC set to  0.000000
8/18/2011	1:24:56 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:24:56 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:24:56 PM	Tube furnace set to 0
8/18/2011	1:24:59 PM	H2 valve closed
8/18/2011	1:24:59 PM	BCl3 valve closed
8/18/2011	1:24:59 PM	PH3 valve closed
8/18/2011	1:24:59 PM	SiCl4 pre valve closed
8/18/2011	1:24:59 PM	SiCl4 post valve closed
8/18/2011	1:24:59 PM	Main Vac valve closed
8/18/2011	1:24:59 PM	Bypass valve closed
8/18/2011	1:24:59 PM	Bubbler valve closed
8/18/2011	1:24:59 PM	Helium valve opened
8/18/2011	1:24:59 PM	Helium MFC set to  500.000000
8/18/2011	1:24:59 PM	H2 MFC set to  0.000000
8/18/2011	1:24:59 PM	BCl3 MFC set to  0.000000
8/18/2011	1:24:59 PM	PHl3 MFC set to  0.000000
8/18/2011	1:24:59 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:24:59 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:24:59 PM	Tube furnace set to 0
8/18/2011	1:25:01 PM	Helium valve closed
8/18/2011	1:25:01 PM	H2 valve closed
8/18/2011	1:25:01 PM	BCl3 valve closed
8/18/2011	1:25:01 PM	PH3 valve closed
8/18/2011	1:25:01 PM	SiCl4 pre valve closed
8/18/2011	1:25:01 PM	SiCl4 post valve closed
8/18/2011	1:25:01 PM	Main Vac valve closed
8/18/2011	1:25:01 PM	Bypass valve closed
8/18/2011	1:25:01 PM	Bubbler valve closed
8/18/2011	1:25:01 PM	Helium MFC set to  0.000000
8/18/2011	1:25:01 PM	H2 MFC set to  0.000000
8/18/2011	1:25:01 PM	BCl3 MFC set to  0.000000
8/18/2011	1:25:01 PM	PHl3 MFC set to  0.000000
8/18/2011	1:25:01 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:25:01 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:25:01 PM	Tube furnace set to 0
8/18/2011	1:25:02 PM	Run finished at 1:25 PM
8/18/2011	1:25:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/18/2011	1:27:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2011	1:27:17 PM	Recipe started at 1:27 PM
8/18/2011	1:27:17 PM	Helium valve closed
8/18/2011	1:27:17 PM	H2 valve closed
8/18/2011	1:27:17 PM	BCl3 valve closed
8/18/2011	1:27:17 PM	PH3 valve closed
8/18/2011	1:27:17 PM	SiCl4 pre valve closed
8/18/2011	1:27:17 PM	SiCl4 post valve closed
8/18/2011	1:27:17 PM	Main Vac valve closed
8/18/2011	1:27:17 PM	Bubbler valve closed
8/18/2011	1:27:17 PM	Bypass valve opened
8/18/2011	1:27:17 PM	Helium MFC set to  0.000000
8/18/2011	1:27:17 PM	H2 MFC set to  0.000000
8/18/2011	1:27:17 PM	BCl3 MFC set to  0.000000
8/18/2011	1:27:17 PM	PHl3 MFC set to  0.000000
8/18/2011	1:27:17 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:27:17 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:27:17 PM	Tube furnace set to 0
8/18/2011	1:28:19 PM	Helium valve closed
8/18/2011	1:28:19 PM	H2 valve closed
8/18/2011	1:28:19 PM	BCl3 valve closed
8/18/2011	1:28:19 PM	PH3 valve closed
8/18/2011	1:28:19 PM	SiCl4 pre valve closed
8/18/2011	1:28:19 PM	SiCl4 post valve closed
8/18/2011	1:28:19 PM	Main Vac valve closed
8/18/2011	1:28:19 PM	Bubbler valve closed
8/18/2011	1:28:19 PM	Bypass valve opened
8/18/2011	1:28:19 PM	Helium MFC set to  0.000000
8/18/2011	1:28:19 PM	H2 MFC set to  0.000000
8/18/2011	1:28:19 PM	BCl3 MFC set to  0.000000
8/18/2011	1:28:19 PM	PHl3 MFC set to  0.000000
8/18/2011	1:28:19 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:28:19 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:28:19 PM	Tube furnace set to 0
8/18/2011	1:29:19 PM	Helium valve closed
8/18/2011	1:29:19 PM	H2 valve closed
8/18/2011	1:29:19 PM	BCl3 valve closed
8/18/2011	1:29:19 PM	PH3 valve closed
8/18/2011	1:29:19 PM	SiCl4 pre valve closed
8/18/2011	1:29:19 PM	SiCl4 post valve closed
8/18/2011	1:29:19 PM	Bypass valve closed
8/18/2011	1:29:19 PM	Bubbler valve closed
8/18/2011	1:29:19 PM	Main Vac valve opened
8/18/2011	1:29:19 PM	Helium MFC set to  0.000000
8/18/2011	1:29:19 PM	H2 MFC set to  0.000000
8/18/2011	1:29:19 PM	BCl3 MFC set to  0.000000
8/18/2011	1:29:19 PM	PHl3 MFC set to  0.000000
8/18/2011	1:29:19 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:29:19 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:29:19 PM	Tube furnace set to 0
8/18/2011	1:29:20 PM	Run finished at 1:29 PM
8/18/2011	1:29:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2011	1:31:24 PM	Recipe started at 1:31 PM
8/18/2011	1:31:25 PM	Helium valve closed
8/18/2011	1:31:25 PM	H2 valve closed
8/18/2011	1:31:25 PM	BCl3 valve closed
8/18/2011	1:31:25 PM	PH3 valve closed
8/18/2011	1:31:25 PM	SiCl4 pre valve closed
8/18/2011	1:31:25 PM	SiCl4 post valve closed
8/18/2011	1:31:25 PM	Bypass valve closed
8/18/2011	1:31:25 PM	Bubbler valve closed
8/18/2011	1:31:25 PM	Main Vac valve opened
8/18/2011	1:31:25 PM	Helium MFC set to  0.000000
8/18/2011	1:31:25 PM	H2 MFC set to  0.000000
8/18/2011	1:31:25 PM	BCl3 MFC set to  0.000000
8/18/2011	1:31:25 PM	PHl3 MFC set to  0.000000
8/18/2011	1:31:25 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:31:25 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:31:25 PM	Tube furnace set to 150
8/18/2011	1:31:55 PM	H2 valve closed
8/18/2011	1:31:55 PM	BCl3 valve closed
8/18/2011	1:31:55 PM	PH3 valve closed
8/18/2011	1:31:55 PM	SiCl4 pre valve closed
8/18/2011	1:31:55 PM	SiCl4 post valve closed
8/18/2011	1:31:55 PM	Bypass valve closed
8/18/2011	1:31:55 PM	Bubbler valve closed
8/18/2011	1:31:55 PM	Helium valve opened
8/18/2011	1:31:55 PM	Main Vac valve opened
8/18/2011	1:31:55 PM	Helium MFC set to  20.000000
8/18/2011	1:31:55 PM	H2 MFC set to  0.000000
8/18/2011	1:31:55 PM	BCl3 MFC set to  0.000000
8/18/2011	1:31:55 PM	PHl3 MFC set to  0.000000
8/18/2011	1:31:55 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:31:55 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:31:55 PM	Tube furnace set to 150
8/18/2011	1:32:25 PM	Helium valve closed
8/18/2011	1:32:25 PM	H2 valve closed
8/18/2011	1:32:25 PM	BCl3 valve closed
8/18/2011	1:32:25 PM	PH3 valve closed
8/18/2011	1:32:25 PM	SiCl4 pre valve closed
8/18/2011	1:32:25 PM	SiCl4 post valve closed
8/18/2011	1:32:25 PM	Bypass valve closed
8/18/2011	1:32:25 PM	Bubbler valve closed
8/18/2011	1:32:25 PM	Main Vac valve opened
8/18/2011	1:32:25 PM	Helium MFC set to  0.000000
8/18/2011	1:32:25 PM	H2 MFC set to  0.000000
8/18/2011	1:32:25 PM	BCl3 MFC set to  0.000000
8/18/2011	1:32:25 PM	PHl3 MFC set to  0.000000
8/18/2011	1:32:25 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:32:25 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:32:25 PM	Tube furnace set to 150
8/18/2011	1:32:55 PM	H2 valve closed
8/18/2011	1:32:55 PM	BCl3 valve closed
8/18/2011	1:32:55 PM	PH3 valve closed
8/18/2011	1:32:55 PM	SiCl4 pre valve closed
8/18/2011	1:32:55 PM	SiCl4 post valve closed
8/18/2011	1:32:55 PM	Bypass valve closed
8/18/2011	1:32:55 PM	Bubbler valve closed
8/18/2011	1:32:55 PM	Helium valve opened
8/18/2011	1:32:55 PM	Main Vac valve opened
8/18/2011	1:32:55 PM	Helium MFC set to  20.000000
8/18/2011	1:32:55 PM	H2 MFC set to  0.000000
8/18/2011	1:32:55 PM	BCl3 MFC set to  0.000000
8/18/2011	1:32:55 PM	PHl3 MFC set to  0.000000
8/18/2011	1:32:55 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:32:55 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:32:55 PM	Tube furnace set to 150
8/18/2011	1:33:25 PM	Helium valve closed
8/18/2011	1:33:25 PM	H2 valve closed
8/18/2011	1:33:25 PM	BCl3 valve closed
8/18/2011	1:33:25 PM	PH3 valve closed
8/18/2011	1:33:25 PM	SiCl4 pre valve closed
8/18/2011	1:33:25 PM	SiCl4 post valve closed
8/18/2011	1:33:25 PM	Bypass valve closed
8/18/2011	1:33:25 PM	Bubbler valve closed
8/18/2011	1:33:25 PM	Main Vac valve opened
8/18/2011	1:33:25 PM	Helium MFC set to  0.000000
8/18/2011	1:33:25 PM	H2 MFC set to  0.000000
8/18/2011	1:33:25 PM	BCl3 MFC set to  0.000000
8/18/2011	1:33:25 PM	PHl3 MFC set to  0.000000
8/18/2011	1:33:25 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:33:25 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:33:25 PM	Tube furnace set to 150
8/18/2011	1:33:55 PM	H2 valve closed
8/18/2011	1:33:55 PM	BCl3 valve closed
8/18/2011	1:33:55 PM	PH3 valve closed
8/18/2011	1:33:56 PM	SiCl4 pre valve closed
8/18/2011	1:33:56 PM	SiCl4 post valve closed
8/18/2011	1:33:56 PM	Bypass valve closed
8/18/2011	1:33:56 PM	Bubbler valve closed
8/18/2011	1:33:56 PM	Helium valve opened
8/18/2011	1:33:56 PM	Main Vac valve opened
8/18/2011	1:33:56 PM	Helium MFC set to  20.000000
8/18/2011	1:33:56 PM	H2 MFC set to  0.000000
8/18/2011	1:33:56 PM	BCl3 MFC set to  0.000000
8/18/2011	1:33:56 PM	PHl3 MFC set to  0.000000
8/18/2011	1:33:56 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:33:56 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:33:56 PM	Tube furnace set to 150
8/18/2011	1:34:26 PM	Helium valve closed
8/18/2011	1:34:26 PM	H2 valve closed
8/18/2011	1:34:26 PM	BCl3 valve closed
8/18/2011	1:34:26 PM	PH3 valve closed
8/18/2011	1:34:26 PM	SiCl4 pre valve closed
8/18/2011	1:34:26 PM	SiCl4 post valve closed
8/18/2011	1:34:26 PM	Bypass valve closed
8/18/2011	1:34:26 PM	Bubbler valve closed
8/18/2011	1:34:26 PM	Main Vac valve opened
8/18/2011	1:34:26 PM	Helium MFC set to  0.000000
8/18/2011	1:34:26 PM	H2 MFC set to  0.000000
8/18/2011	1:34:26 PM	BCl3 MFC set to  0.000000
8/18/2011	1:34:26 PM	PHl3 MFC set to  0.000000
8/18/2011	1:34:26 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:34:26 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:34:26 PM	Tube furnace set to 150
8/18/2011	1:34:56 PM	H2 valve closed
8/18/2011	1:34:56 PM	BCl3 valve closed
8/18/2011	1:34:56 PM	PH3 valve closed
8/18/2011	1:34:56 PM	SiCl4 pre valve closed
8/18/2011	1:34:56 PM	SiCl4 post valve closed
8/18/2011	1:34:56 PM	Bypass valve closed
8/18/2011	1:34:56 PM	Bubbler valve closed
8/18/2011	1:34:56 PM	Helium valve opened
8/18/2011	1:34:56 PM	Main Vac valve opened
8/18/2011	1:34:56 PM	Helium MFC set to  20.000000
8/18/2011	1:34:56 PM	H2 MFC set to  0.000000
8/18/2011	1:34:56 PM	BCl3 MFC set to  0.000000
8/18/2011	1:34:56 PM	PHl3 MFC set to  0.000000
8/18/2011	1:34:56 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:34:56 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:34:56 PM	Tube furnace set to 150
8/18/2011	1:35:26 PM	Helium valve closed
8/18/2011	1:35:26 PM	H2 valve closed
8/18/2011	1:35:26 PM	BCl3 valve closed
8/18/2011	1:35:26 PM	PH3 valve closed
8/18/2011	1:35:26 PM	SiCl4 pre valve closed
8/18/2011	1:35:26 PM	SiCl4 post valve closed
8/18/2011	1:35:26 PM	Bypass valve closed
8/18/2011	1:35:26 PM	Bubbler valve closed
8/18/2011	1:35:26 PM	Main Vac valve opened
8/18/2011	1:35:26 PM	Helium MFC set to  0.000000
8/18/2011	1:35:26 PM	H2 MFC set to  0.000000
8/18/2011	1:35:26 PM	BCl3 MFC set to  0.000000
8/18/2011	1:35:26 PM	PHl3 MFC set to  0.000000
8/18/2011	1:35:26 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:35:26 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:35:26 PM	Tube furnace set to 150
8/18/2011	1:35:56 PM	H2 valve closed
8/18/2011	1:35:56 PM	BCl3 valve closed
8/18/2011	1:35:56 PM	PH3 valve closed
8/18/2011	1:35:56 PM	SiCl4 pre valve closed
8/18/2011	1:35:56 PM	SiCl4 post valve closed
8/18/2011	1:35:56 PM	Bypass valve closed
8/18/2011	1:35:56 PM	Bubbler valve closed
8/18/2011	1:35:56 PM	Helium valve opened
8/18/2011	1:35:56 PM	Main Vac valve opened
8/18/2011	1:35:56 PM	Helium MFC set to  20.000000
8/18/2011	1:35:56 PM	H2 MFC set to  0.000000
8/18/2011	1:35:56 PM	BCl3 MFC set to  0.000000
8/18/2011	1:35:56 PM	PHl3 MFC set to  0.000000
8/18/2011	1:35:56 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:35:56 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:35:56 PM	Tube furnace set to 150
8/18/2011	1:36:27 PM	Helium valve closed
8/18/2011	1:36:27 PM	H2 valve closed
8/18/2011	1:36:27 PM	BCl3 valve closed
8/18/2011	1:36:27 PM	PH3 valve closed
8/18/2011	1:36:27 PM	SiCl4 pre valve closed
8/18/2011	1:36:27 PM	SiCl4 post valve closed
8/18/2011	1:36:27 PM	Bypass valve closed
8/18/2011	1:36:27 PM	Bubbler valve closed
8/18/2011	1:36:27 PM	Main Vac valve opened
8/18/2011	1:36:27 PM	Helium MFC set to  0.000000
8/18/2011	1:36:27 PM	H2 MFC set to  0.000000
8/18/2011	1:36:27 PM	BCl3 MFC set to  0.000000
8/18/2011	1:36:27 PM	PHl3 MFC set to  0.000000
8/18/2011	1:36:27 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:36:27 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:36:27 PM	Tube furnace set to 150
8/18/2011	1:36:57 PM	H2 valve closed
8/18/2011	1:36:57 PM	BCl3 valve closed
8/18/2011	1:36:57 PM	PH3 valve closed
8/18/2011	1:36:57 PM	SiCl4 pre valve closed
8/18/2011	1:36:57 PM	SiCl4 post valve closed
8/18/2011	1:36:57 PM	Bypass valve closed
8/18/2011	1:36:57 PM	Bubbler valve closed
8/18/2011	1:36:57 PM	Helium valve opened
8/18/2011	1:36:57 PM	Main Vac valve opened
8/18/2011	1:36:57 PM	Helium MFC set to  20.000000
8/18/2011	1:36:57 PM	H2 MFC set to  0.000000
8/18/2011	1:36:57 PM	BCl3 MFC set to  0.000000
8/18/2011	1:36:57 PM	PHl3 MFC set to  0.000000
8/18/2011	1:36:57 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:36:57 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:36:57 PM	Tube furnace set to 150
8/18/2011	1:37:27 PM	Helium valve closed
8/18/2011	1:37:27 PM	H2 valve closed
8/18/2011	1:37:27 PM	BCl3 valve closed
8/18/2011	1:37:27 PM	PH3 valve closed
8/18/2011	1:37:27 PM	SiCl4 pre valve closed
8/18/2011	1:37:27 PM	SiCl4 post valve closed
8/18/2011	1:37:27 PM	Bypass valve closed
8/18/2011	1:37:27 PM	Bubbler valve closed
8/18/2011	1:37:27 PM	Main Vac valve opened
8/18/2011	1:37:27 PM	Helium MFC set to  0.000000
8/18/2011	1:37:27 PM	H2 MFC set to  0.000000
8/18/2011	1:37:27 PM	BCl3 MFC set to  0.000000
8/18/2011	1:37:27 PM	PHl3 MFC set to  0.000000
8/18/2011	1:37:27 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:37:27 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:37:27 PM	Tube furnace set to 150
8/18/2011	1:37:57 PM	H2 valve closed
8/18/2011	1:37:57 PM	BCl3 valve closed
8/18/2011	1:37:57 PM	PH3 valve closed
8/18/2011	1:37:57 PM	SiCl4 pre valve closed
8/18/2011	1:37:57 PM	SiCl4 post valve closed
8/18/2011	1:37:57 PM	Bypass valve closed
8/18/2011	1:37:57 PM	Bubbler valve closed
8/18/2011	1:37:57 PM	Helium valve opened
8/18/2011	1:37:57 PM	Main Vac valve opened
8/18/2011	1:37:57 PM	Helium MFC set to  20.000000
8/18/2011	1:37:57 PM	H2 MFC set to  0.000000
8/18/2011	1:37:57 PM	BCl3 MFC set to  0.000000
8/18/2011	1:37:57 PM	PHl3 MFC set to  0.000000
8/18/2011	1:37:57 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:37:57 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:37:57 PM	Tube furnace set to 150
8/18/2011	1:38:27 PM	Helium valve closed
8/18/2011	1:38:27 PM	H2 valve closed
8/18/2011	1:38:27 PM	BCl3 valve closed
8/18/2011	1:38:27 PM	PH3 valve closed
8/18/2011	1:38:27 PM	SiCl4 pre valve closed
8/18/2011	1:38:27 PM	SiCl4 post valve closed
8/18/2011	1:38:27 PM	Bypass valve closed
8/18/2011	1:38:27 PM	Bubbler valve closed
8/18/2011	1:38:27 PM	Main Vac valve opened
8/18/2011	1:38:27 PM	Helium MFC set to  0.000000
8/18/2011	1:38:27 PM	H2 MFC set to  0.000000
8/18/2011	1:38:27 PM	BCl3 MFC set to  0.000000
8/18/2011	1:38:27 PM	PHl3 MFC set to  0.000000
8/18/2011	1:38:27 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:38:27 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:38:28 PM	Tube furnace set to 150
8/18/2011	1:38:58 PM	H2 valve closed
8/18/2011	1:38:58 PM	BCl3 valve closed
8/18/2011	1:38:58 PM	PH3 valve closed
8/18/2011	1:38:58 PM	SiCl4 pre valve closed
8/18/2011	1:38:58 PM	SiCl4 post valve closed
8/18/2011	1:38:58 PM	Bypass valve closed
8/18/2011	1:38:58 PM	Bubbler valve closed
8/18/2011	1:38:58 PM	Helium valve opened
8/18/2011	1:38:58 PM	Main Vac valve opened
8/18/2011	1:38:58 PM	Helium MFC set to  20.000000
8/18/2011	1:38:58 PM	H2 MFC set to  0.000000
8/18/2011	1:38:58 PM	BCl3 MFC set to  0.000000
8/18/2011	1:38:58 PM	PHl3 MFC set to  0.000000
8/18/2011	1:38:58 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:38:58 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:38:58 PM	Tube furnace set to 150
8/18/2011	1:39:28 PM	Helium valve closed
8/18/2011	1:39:28 PM	H2 valve closed
8/18/2011	1:39:28 PM	BCl3 valve closed
8/18/2011	1:39:28 PM	PH3 valve closed
8/18/2011	1:39:28 PM	SiCl4 pre valve closed
8/18/2011	1:39:28 PM	SiCl4 post valve closed
8/18/2011	1:39:28 PM	Bypass valve closed
8/18/2011	1:39:28 PM	Bubbler valve closed
8/18/2011	1:39:28 PM	Main Vac valve opened
8/18/2011	1:39:28 PM	Helium MFC set to  0.000000
8/18/2011	1:39:28 PM	H2 MFC set to  0.000000
8/18/2011	1:39:28 PM	BCl3 MFC set to  0.000000
8/18/2011	1:39:28 PM	PHl3 MFC set to  0.000000
8/18/2011	1:39:28 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:39:28 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:39:28 PM	Tube furnace set to 150
8/18/2011	1:39:58 PM	H2 valve closed
8/18/2011	1:39:58 PM	BCl3 valve closed
8/18/2011	1:39:58 PM	PH3 valve closed
8/18/2011	1:39:58 PM	SiCl4 pre valve closed
8/18/2011	1:39:58 PM	SiCl4 post valve closed
8/18/2011	1:39:58 PM	Bypass valve closed
8/18/2011	1:39:58 PM	Bubbler valve closed
8/18/2011	1:39:58 PM	Helium valve opened
8/18/2011	1:39:58 PM	Main Vac valve opened
8/18/2011	1:39:58 PM	Helium MFC set to  20.000000
8/18/2011	1:39:58 PM	H2 MFC set to  0.000000
8/18/2011	1:39:58 PM	BCl3 MFC set to  0.000000
8/18/2011	1:39:58 PM	PHl3 MFC set to  0.000000
8/18/2011	1:39:58 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:39:58 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:39:58 PM	Tube furnace set to 150
8/18/2011	1:40:28 PM	Helium valve closed
8/18/2011	1:40:28 PM	H2 valve closed
8/18/2011	1:40:28 PM	BCl3 valve closed
8/18/2011	1:40:28 PM	PH3 valve closed
8/18/2011	1:40:28 PM	SiCl4 pre valve closed
8/18/2011	1:40:28 PM	SiCl4 post valve closed
8/18/2011	1:40:28 PM	Bypass valve closed
8/18/2011	1:40:28 PM	Bubbler valve closed
8/18/2011	1:40:28 PM	Main Vac valve opened
8/18/2011	1:40:28 PM	Helium MFC set to  0.000000
8/18/2011	1:40:28 PM	H2 MFC set to  0.000000
8/18/2011	1:40:28 PM	BCl3 MFC set to  0.000000
8/18/2011	1:40:28 PM	PHl3 MFC set to  0.000000
8/18/2011	1:40:28 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:40:28 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:40:28 PM	Tube furnace set to 150
8/18/2011	1:40:58 PM	H2 valve closed
8/18/2011	1:40:58 PM	BCl3 valve closed
8/18/2011	1:40:58 PM	PH3 valve closed
8/18/2011	1:40:58 PM	SiCl4 pre valve closed
8/18/2011	1:40:58 PM	SiCl4 post valve closed
8/18/2011	1:40:58 PM	Bypass valve closed
8/18/2011	1:40:58 PM	Bubbler valve closed
8/18/2011	1:40:58 PM	Helium valve opened
8/18/2011	1:40:58 PM	Main Vac valve opened
8/18/2011	1:40:58 PM	Helium MFC set to  20.000000
8/18/2011	1:40:58 PM	H2 MFC set to  0.000000
8/18/2011	1:40:58 PM	BCl3 MFC set to  0.000000
8/18/2011	1:40:58 PM	PHl3 MFC set to  0.000000
8/18/2011	1:40:58 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:40:58 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:40:59 PM	Tube furnace set to 150
8/18/2011	1:41:29 PM	Helium valve closed
8/18/2011	1:41:29 PM	H2 valve closed
8/18/2011	1:41:29 PM	BCl3 valve closed
8/18/2011	1:41:29 PM	PH3 valve closed
8/18/2011	1:41:29 PM	SiCl4 pre valve closed
8/18/2011	1:41:29 PM	SiCl4 post valve closed
8/18/2011	1:41:29 PM	Bypass valve closed
8/18/2011	1:41:29 PM	Bubbler valve closed
8/18/2011	1:41:29 PM	Main Vac valve opened
8/18/2011	1:41:29 PM	Helium MFC set to  0.000000
8/18/2011	1:41:29 PM	H2 MFC set to  0.000000
8/18/2011	1:41:29 PM	BCl3 MFC set to  0.000000
8/18/2011	1:41:29 PM	PHl3 MFC set to  0.000000
8/18/2011	1:41:29 PM	SiCl4 MFC set to  0.000000
8/18/2011	1:41:29 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	1:41:29 PM	Tube furnace set to 150
8/18/2011	1:41:30 PM	Run finished at 1:41 PM
8/18/2011	2:02:02 PM	Main Vac valve closed
8/18/2011	2:02:09 PM	Main Vac valve opened
8/18/2011	2:02:43 PM	Recipe started at 2:02 PM
8/18/2011	2:02:43 PM	Helium valve closed
8/18/2011	2:02:43 PM	H2 valve closed
8/18/2011	2:02:43 PM	BCl3 valve closed
8/18/2011	2:02:43 PM	PH3 valve closed
8/18/2011	2:02:43 PM	SiCl4 pre valve closed
8/18/2011	2:02:43 PM	SiCl4 post valve closed
8/18/2011	2:02:43 PM	Main Vac valve closed
8/18/2011	2:02:43 PM	Bypass valve closed
8/18/2011	2:02:43 PM	Bubbler valve closed
8/18/2011	2:02:43 PM	Helium MFC set to  0.000000
8/18/2011	2:02:43 PM	H2 MFC set to  0.000000
8/18/2011	2:02:43 PM	BCl3 MFC set to  0.000000
8/18/2011	2:02:43 PM	PHl3 MFC set to  0.000000
8/18/2011	2:02:43 PM	SiCl4 MFC set to  0.000000
8/18/2011	2:02:43 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:02:43 PM	Tube furnace set to 0
8/18/2011	2:02:46 PM	Helium valve closed
8/18/2011	2:02:46 PM	BCl3 valve closed
8/18/2011	2:02:46 PM	PH3 valve closed
8/18/2011	2:02:46 PM	SiCl4 pre valve closed
8/18/2011	2:02:46 PM	SiCl4 post valve closed
8/18/2011	2:02:46 PM	Main Vac valve closed
8/18/2011	2:02:46 PM	Bypass valve closed
8/18/2011	2:02:46 PM	Bubbler valve closed
8/18/2011	2:02:46 PM	H2 valve opened
8/18/2011	2:02:46 PM	Helium MFC set to  0.000000
8/18/2011	2:02:46 PM	H2 MFC set to  500.000000
8/18/2011	2:02:46 PM	BCl3 MFC set to  0.000000
8/18/2011	2:02:46 PM	PHl3 MFC set to  0.000000
8/18/2011	2:02:46 PM	SiCl4 MFC set to  0.000000
8/18/2011	2:02:46 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:02:46 PM	Tube furnace set to 0
8/18/2011	2:03:50 PM	Helium valve closed
8/18/2011	2:03:50 PM	BCl3 valve closed
8/18/2011	2:03:50 PM	PH3 valve closed
8/18/2011	2:03:50 PM	SiCl4 pre valve closed
8/18/2011	2:03:50 PM	SiCl4 post valve closed
8/18/2011	2:03:50 PM	Main Vac valve closed
8/18/2011	2:03:50 PM	Bypass valve closed
8/18/2011	2:03:50 PM	H2 valve opened
8/18/2011	2:03:50 PM	Bubbler valve opened
8/18/2011	2:03:50 PM	Helium MFC set to  0.000000
8/18/2011	2:03:50 PM	H2 MFC set to  500.000000
8/18/2011	2:03:50 PM	BCl3 MFC set to  0.000000
8/18/2011	2:03:50 PM	PHl3 MFC set to  0.000000
8/18/2011	2:03:50 PM	SiCl4 MFC set to  0.000000
8/18/2011	2:03:50 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:03:51 PM	Tube furnace set to 0
8/18/2011	2:03:52 PM	Helium valve closed
8/18/2011	2:03:52 PM	BCl3 valve closed
8/18/2011	2:03:52 PM	PH3 valve closed
8/18/2011	2:03:52 PM	SiCl4 pre valve closed
8/18/2011	2:03:52 PM	SiCl4 post valve closed
8/18/2011	2:03:52 PM	Main Vac valve closed
8/18/2011	2:03:52 PM	Bypass valve closed
8/18/2011	2:03:52 PM	H2 valve opened
8/18/2011	2:03:52 PM	Bubbler valve opened
8/18/2011	2:03:52 PM	Helium MFC set to  0.000000
8/18/2011	2:03:52 PM	H2 MFC set to  500.000000
8/18/2011	2:03:52 PM	BCl3 MFC set to  0.000000
8/18/2011	2:03:52 PM	PHl3 MFC set to  0.000000
8/18/2011	2:03:52 PM	SiCl4 MFC set to  0.000000
8/18/2011	2:03:52 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:03:52 PM	Tube furnace set to 1000
8/18/2011	2:23:52 PM	Helium valve closed
8/18/2011	2:23:52 PM	PH3 valve closed
8/18/2011	2:23:52 PM	Main Vac valve closed
8/18/2011	2:23:52 PM	Bypass valve closed
8/18/2011	2:23:52 PM	H2 valve opened
8/18/2011	2:23:52 PM	BCl3 valve opened
8/18/2011	2:23:52 PM	SiCl4 pre valve opened
8/18/2011	2:23:52 PM	SiCl4 post valve opened
8/18/2011	2:23:52 PM	Bubbler valve opened
8/18/2011	2:23:52 PM	Helium MFC set to  0.000000
8/18/2011	2:23:52 PM	H2 MFC set to  500.000000
8/18/2011	2:23:52 PM	BCl3 MFC set to  2.300000
8/18/2011	2:23:52 PM	PHl3 MFC set to  0.000000
8/18/2011	2:23:52 PM	SiCl4 MFC set to  50.000000
8/18/2011	2:23:52 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:23:52 PM	Tube furnace set to 1000
8/18/2011	2:36:52 PM	Helium valve closed
8/18/2011	2:36:52 PM	BCl3 valve closed
8/18/2011	2:36:52 PM	Main Vac valve closed
8/18/2011	2:36:52 PM	Bypass valve closed
8/18/2011	2:36:52 PM	H2 valve opened
8/18/2011	2:36:52 PM	PH3 valve opened
8/18/2011	2:36:52 PM	SiCl4 pre valve opened
8/18/2011	2:36:52 PM	SiCl4 post valve opened
8/18/2011	2:36:52 PM	Bubbler valve opened
8/18/2011	2:36:52 PM	Helium MFC set to  0.000000
8/18/2011	2:36:52 PM	H2 MFC set to  500.000000
8/18/2011	2:36:52 PM	BCl3 MFC set to  0.000000
8/18/2011	2:36:52 PM	PHl3 MFC set to  20.000000
8/18/2011	2:36:52 PM	SiCl4 MFC set to  50.000000
8/18/2011	2:36:52 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:36:52 PM	Tube furnace set to 1000
8/18/2011	2:41:52 PM	Helium valve closed
8/18/2011	2:41:52 PM	BCl3 valve closed
8/18/2011	2:41:52 PM	PH3 valve closed
8/18/2011	2:41:52 PM	SiCl4 pre valve closed
8/18/2011	2:41:52 PM	SiCl4 post valve closed
8/18/2011	2:41:52 PM	Main Vac valve closed
8/18/2011	2:41:52 PM	Bypass valve closed
8/18/2011	2:41:52 PM	H2 valve opened
8/18/2011	2:41:52 PM	Bubbler valve opened
8/18/2011	2:41:52 PM	Helium MFC set to  0.000000
8/18/2011	2:41:52 PM	H2 MFC set to  500.000000
8/18/2011	2:41:52 PM	BCl3 MFC set to  0.000000
8/18/2011	2:41:52 PM	PHl3 MFC set to  0.000000
8/18/2011	2:41:52 PM	SiCl4 MFC set to  0.000000
8/18/2011	2:41:52 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:41:52 PM	Tube furnace set to 950
8/18/2011	2:44:52 PM	H2 valve closed
8/18/2011	2:44:52 PM	BCl3 valve closed
8/18/2011	2:44:52 PM	PH3 valve closed
8/18/2011	2:44:52 PM	SiCl4 pre valve closed
8/18/2011	2:44:52 PM	SiCl4 post valve closed
8/18/2011	2:44:52 PM	Main Vac valve closed
8/18/2011	2:44:52 PM	Bypass valve closed
8/18/2011	2:44:52 PM	Helium valve opened
8/18/2011	2:44:52 PM	Bubbler valve opened
8/18/2011	2:44:52 PM	Helium MFC set to  500.000000
8/18/2011	2:44:52 PM	H2 MFC set to  0.000000
8/18/2011	2:44:52 PM	BCl3 MFC set to  0.000000
8/18/2011	2:44:52 PM	PHl3 MFC set to  0.000000
8/18/2011	2:44:52 PM	SiCl4 MFC set to  0.000000
8/18/2011	2:44:52 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:44:52 PM	Tube furnace set to 900
8/18/2011	2:47:53 PM	H2 valve closed
8/18/2011	2:47:53 PM	BCl3 valve closed
8/18/2011	2:47:53 PM	PH3 valve closed
8/18/2011	2:47:53 PM	SiCl4 pre valve closed
8/18/2011	2:47:53 PM	SiCl4 post valve closed
8/18/2011	2:47:53 PM	Main Vac valve closed
8/18/2011	2:47:53 PM	Bypass valve closed
8/18/2011	2:47:53 PM	Helium valve opened
8/18/2011	2:47:53 PM	Bubbler valve opened
8/18/2011	2:47:53 PM	Helium MFC set to  500.000000
8/18/2011	2:47:53 PM	H2 MFC set to  0.000000
8/18/2011	2:47:53 PM	BCl3 MFC set to  0.000000
8/18/2011	2:47:53 PM	PHl3 MFC set to  0.000000
8/18/2011	2:47:53 PM	SiCl4 MFC set to  0.000000
8/18/2011	2:47:53 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:47:53 PM	Tube furnace set to 850
8/18/2011	2:50:53 PM	H2 valve closed
8/18/2011	2:50:53 PM	BCl3 valve closed
8/18/2011	2:50:53 PM	PH3 valve closed
8/18/2011	2:50:53 PM	SiCl4 pre valve closed
8/18/2011	2:50:53 PM	SiCl4 post valve closed
8/18/2011	2:50:53 PM	Main Vac valve closed
8/18/2011	2:50:53 PM	Bypass valve closed
8/18/2011	2:50:53 PM	Helium valve opened
8/18/2011	2:50:53 PM	Bubbler valve opened
8/18/2011	2:50:53 PM	Helium MFC set to  500.000000
8/18/2011	2:50:53 PM	H2 MFC set to  0.000000
8/18/2011	2:50:53 PM	BCl3 MFC set to  0.000000
8/18/2011	2:50:53 PM	PHl3 MFC set to  0.000000
8/18/2011	2:50:53 PM	SiCl4 MFC set to  0.000000
8/18/2011	2:50:53 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:50:53 PM	Tube furnace set to 800
8/18/2011	2:53:53 PM	H2 valve closed
8/18/2011	2:53:53 PM	BCl3 valve closed
8/18/2011	2:53:53 PM	PH3 valve closed
8/18/2011	2:53:53 PM	SiCl4 pre valve closed
8/18/2011	2:53:53 PM	SiCl4 post valve closed
8/18/2011	2:53:53 PM	Main Vac valve closed
8/18/2011	2:53:53 PM	Bypass valve closed
8/18/2011	2:53:53 PM	Helium valve opened
8/18/2011	2:53:53 PM	Bubbler valve opened
8/18/2011	2:53:53 PM	Helium MFC set to  500.000000
8/18/2011	2:53:53 PM	H2 MFC set to  0.000000
8/18/2011	2:53:53 PM	BCl3 MFC set to  0.000000
8/18/2011	2:53:53 PM	PHl3 MFC set to  0.000000
8/18/2011	2:53:53 PM	SiCl4 MFC set to  0.000000
8/18/2011	2:53:53 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:53:53 PM	Tube furnace set to 750
8/18/2011	2:56:53 PM	H2 valve closed
8/18/2011	2:56:53 PM	BCl3 valve closed
8/18/2011	2:56:53 PM	PH3 valve closed
8/18/2011	2:56:53 PM	SiCl4 pre valve closed
8/18/2011	2:56:53 PM	SiCl4 post valve closed
8/18/2011	2:56:53 PM	Main Vac valve closed
8/18/2011	2:56:53 PM	Bypass valve closed
8/18/2011	2:56:53 PM	Helium valve opened
8/18/2011	2:56:53 PM	Bubbler valve opened
8/18/2011	2:56:53 PM	Helium MFC set to  500.000000
8/18/2011	2:56:53 PM	H2 MFC set to  0.000000
8/18/2011	2:56:53 PM	BCl3 MFC set to  0.000000
8/18/2011	2:56:53 PM	PHl3 MFC set to  0.000000
8/18/2011	2:56:53 PM	SiCl4 MFC set to  0.000000
8/18/2011	2:56:53 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	2:56:53 PM	Tube furnace set to 0
8/18/2011	3:04:40 PM	Helium valve closed
8/18/2011	3:04:40 PM	H2 valve closed
8/18/2011	3:04:40 PM	BCl3 valve closed
8/18/2011	3:04:40 PM	PH3 valve closed
8/18/2011	3:04:40 PM	SiCl4 pre valve closed
8/18/2011	3:04:40 PM	SiCl4 post valve closed
8/18/2011	3:04:40 PM	Main Vac valve closed
8/18/2011	3:04:40 PM	Bypass valve closed
8/18/2011	3:04:40 PM	Bubbler valve closed
8/18/2011	3:04:40 PM	Helium MFC set to  0.000000
8/18/2011	3:04:40 PM	H2 MFC set to  0.000000
8/18/2011	3:04:40 PM	BCl3 MFC set to  0.000000
8/18/2011	3:04:40 PM	PHl3 MFC set to  0.000000
8/18/2011	3:04:40 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:04:40 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:04:40 PM	Tube furnace set to 0
8/18/2011	3:04:41 PM	Run finished at 3:04 PM
8/18/2011	3:11:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2011	3:11:22 PM	Recipe started at 3:11 PM
8/18/2011	3:11:22 PM	Helium valve closed
8/18/2011	3:11:22 PM	H2 valve closed
8/18/2011	3:11:22 PM	BCl3 valve closed
8/18/2011	3:11:22 PM	PH3 valve closed
8/18/2011	3:11:22 PM	SiCl4 pre valve closed
8/18/2011	3:11:22 PM	SiCl4 post valve closed
8/18/2011	3:11:22 PM	Main Vac valve closed
8/18/2011	3:11:22 PM	Bubbler valve closed
8/18/2011	3:11:22 PM	Bypass valve opened
8/18/2011	3:11:22 PM	Helium MFC set to  0.000000
8/18/2011	3:11:22 PM	H2 MFC set to  0.000000
8/18/2011	3:11:22 PM	BCl3 MFC set to  0.000000
8/18/2011	3:11:22 PM	PHl3 MFC set to  0.000000
8/18/2011	3:11:22 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:11:22 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:11:22 PM	Tube furnace set to 0
8/18/2011	3:12:29 PM	Helium valve closed
8/18/2011	3:12:29 PM	H2 valve closed
8/18/2011	3:12:29 PM	BCl3 valve closed
8/18/2011	3:12:29 PM	PH3 valve closed
8/18/2011	3:12:29 PM	SiCl4 pre valve closed
8/18/2011	3:12:29 PM	SiCl4 post valve closed
8/18/2011	3:12:29 PM	Main Vac valve closed
8/18/2011	3:12:29 PM	Bubbler valve closed
8/18/2011	3:12:29 PM	Bypass valve opened
8/18/2011	3:12:29 PM	Helium MFC set to  0.000000
8/18/2011	3:12:29 PM	H2 MFC set to  0.000000
8/18/2011	3:12:29 PM	BCl3 MFC set to  0.000000
8/18/2011	3:12:29 PM	PHl3 MFC set to  0.000000
8/18/2011	3:12:29 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:12:29 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:12:29 PM	Tube furnace set to 0
8/18/2011	3:13:14 PM	Helium valve closed
8/18/2011	3:13:14 PM	H2 valve closed
8/18/2011	3:13:14 PM	BCl3 valve closed
8/18/2011	3:13:14 PM	PH3 valve closed
8/18/2011	3:13:14 PM	SiCl4 pre valve closed
8/18/2011	3:13:14 PM	SiCl4 post valve closed
8/18/2011	3:13:14 PM	Bypass valve closed
8/18/2011	3:13:14 PM	Bubbler valve closed
8/18/2011	3:13:14 PM	Main Vac valve opened
8/18/2011	3:13:14 PM	Helium MFC set to  0.000000
8/18/2011	3:13:14 PM	H2 MFC set to  0.000000
8/18/2011	3:13:14 PM	BCl3 MFC set to  0.000000
8/18/2011	3:13:14 PM	PHl3 MFC set to  0.000000
8/18/2011	3:13:14 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:13:14 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:13:14 PM	Tube furnace set to 0
8/18/2011	3:13:15 PM	Run finished at 3:13 PM
8/18/2011	3:13:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2011	3:15:46 PM	Recipe started at 3:15 PM
8/18/2011	3:15:46 PM	Helium valve closed
8/18/2011	3:15:46 PM	H2 valve closed
8/18/2011	3:15:46 PM	BCl3 valve closed
8/18/2011	3:15:46 PM	PH3 valve closed
8/18/2011	3:15:46 PM	SiCl4 pre valve closed
8/18/2011	3:15:46 PM	SiCl4 post valve closed
8/18/2011	3:15:46 PM	Bypass valve closed
8/18/2011	3:15:46 PM	Bubbler valve closed
8/18/2011	3:15:46 PM	Main Vac valve opened
8/18/2011	3:15:46 PM	Helium MFC set to  0.000000
8/18/2011	3:15:46 PM	H2 MFC set to  0.000000
8/18/2011	3:15:46 PM	BCl3 MFC set to  0.000000
8/18/2011	3:15:46 PM	PHl3 MFC set to  0.000000
8/18/2011	3:15:46 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:15:46 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:15:46 PM	Tube furnace set to 150
8/18/2011	3:16:16 PM	H2 valve closed
8/18/2011	3:16:16 PM	BCl3 valve closed
8/18/2011	3:16:16 PM	PH3 valve closed
8/18/2011	3:16:16 PM	SiCl4 pre valve closed
8/18/2011	3:16:16 PM	SiCl4 post valve closed
8/18/2011	3:16:16 PM	Bypass valve closed
8/18/2011	3:16:16 PM	Bubbler valve closed
8/18/2011	3:16:16 PM	Helium valve opened
8/18/2011	3:16:16 PM	Main Vac valve opened
8/18/2011	3:16:16 PM	Helium MFC set to  20.000000
8/18/2011	3:16:16 PM	H2 MFC set to  0.000000
8/18/2011	3:16:16 PM	BCl3 MFC set to  0.000000
8/18/2011	3:16:16 PM	PHl3 MFC set to  0.000000
8/18/2011	3:16:16 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:16:16 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:16:16 PM	Tube furnace set to 150
8/18/2011	3:16:47 PM	Helium valve closed
8/18/2011	3:16:47 PM	H2 valve closed
8/18/2011	3:16:47 PM	BCl3 valve closed
8/18/2011	3:16:47 PM	PH3 valve closed
8/18/2011	3:16:47 PM	SiCl4 pre valve closed
8/18/2011	3:16:47 PM	SiCl4 post valve closed
8/18/2011	3:16:47 PM	Bypass valve closed
8/18/2011	3:16:47 PM	Bubbler valve closed
8/18/2011	3:16:47 PM	Main Vac valve opened
8/18/2011	3:16:47 PM	Helium MFC set to  0.000000
8/18/2011	3:16:47 PM	H2 MFC set to  0.000000
8/18/2011	3:16:47 PM	BCl3 MFC set to  0.000000
8/18/2011	3:16:47 PM	PHl3 MFC set to  0.000000
8/18/2011	3:16:47 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:16:47 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:16:47 PM	Tube furnace set to 150
8/18/2011	3:17:17 PM	H2 valve closed
8/18/2011	3:17:17 PM	BCl3 valve closed
8/18/2011	3:17:17 PM	PH3 valve closed
8/18/2011	3:17:17 PM	SiCl4 pre valve closed
8/18/2011	3:17:17 PM	SiCl4 post valve closed
8/18/2011	3:17:17 PM	Bypass valve closed
8/18/2011	3:17:17 PM	Bubbler valve closed
8/18/2011	3:17:17 PM	Helium valve opened
8/18/2011	3:17:17 PM	Main Vac valve opened
8/18/2011	3:17:17 PM	Helium MFC set to  20.000000
8/18/2011	3:17:17 PM	H2 MFC set to  0.000000
8/18/2011	3:17:17 PM	BCl3 MFC set to  0.000000
8/18/2011	3:17:17 PM	PHl3 MFC set to  0.000000
8/18/2011	3:17:17 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:17:17 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:17:17 PM	Tube furnace set to 150
8/18/2011	3:17:47 PM	Helium valve closed
8/18/2011	3:17:47 PM	H2 valve closed
8/18/2011	3:17:47 PM	BCl3 valve closed
8/18/2011	3:17:47 PM	PH3 valve closed
8/18/2011	3:17:47 PM	SiCl4 pre valve closed
8/18/2011	3:17:47 PM	SiCl4 post valve closed
8/18/2011	3:17:47 PM	Bypass valve closed
8/18/2011	3:17:47 PM	Bubbler valve closed
8/18/2011	3:17:47 PM	Main Vac valve opened
8/18/2011	3:17:47 PM	Helium MFC set to  0.000000
8/18/2011	3:17:47 PM	H2 MFC set to  0.000000
8/18/2011	3:17:47 PM	BCl3 MFC set to  0.000000
8/18/2011	3:17:47 PM	PHl3 MFC set to  0.000000
8/18/2011	3:17:47 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:17:47 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:17:47 PM	Tube furnace set to 150
8/18/2011	3:18:17 PM	H2 valve closed
8/18/2011	3:18:17 PM	BCl3 valve closed
8/18/2011	3:18:17 PM	PH3 valve closed
8/18/2011	3:18:17 PM	SiCl4 pre valve closed
8/18/2011	3:18:17 PM	SiCl4 post valve closed
8/18/2011	3:18:17 PM	Bypass valve closed
8/18/2011	3:18:17 PM	Bubbler valve closed
8/18/2011	3:18:17 PM	Helium valve opened
8/18/2011	3:18:17 PM	Main Vac valve opened
8/18/2011	3:18:17 PM	Helium MFC set to  20.000000
8/18/2011	3:18:17 PM	H2 MFC set to  0.000000
8/18/2011	3:18:17 PM	BCl3 MFC set to  0.000000
8/18/2011	3:18:17 PM	PHl3 MFC set to  0.000000
8/18/2011	3:18:17 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:18:17 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:18:17 PM	Tube furnace set to 150
8/18/2011	3:18:47 PM	Helium valve closed
8/18/2011	3:18:47 PM	H2 valve closed
8/18/2011	3:18:47 PM	BCl3 valve closed
8/18/2011	3:18:47 PM	PH3 valve closed
8/18/2011	3:18:47 PM	SiCl4 pre valve closed
8/18/2011	3:18:47 PM	SiCl4 post valve closed
8/18/2011	3:18:47 PM	Bypass valve closed
8/18/2011	3:18:47 PM	Bubbler valve closed
8/18/2011	3:18:47 PM	Main Vac valve opened
8/18/2011	3:18:47 PM	Helium MFC set to  0.000000
8/18/2011	3:18:47 PM	H2 MFC set to  0.000000
8/18/2011	3:18:47 PM	BCl3 MFC set to  0.000000
8/18/2011	3:18:47 PM	PHl3 MFC set to  0.000000
8/18/2011	3:18:47 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:18:47 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:18:48 PM	Tube furnace set to 150
8/18/2011	3:19:18 PM	H2 valve closed
8/18/2011	3:19:18 PM	BCl3 valve closed
8/18/2011	3:19:18 PM	PH3 valve closed
8/18/2011	3:19:18 PM	SiCl4 pre valve closed
8/18/2011	3:19:18 PM	SiCl4 post valve closed
8/18/2011	3:19:18 PM	Bypass valve closed
8/18/2011	3:19:18 PM	Bubbler valve closed
8/18/2011	3:19:18 PM	Helium valve opened
8/18/2011	3:19:18 PM	Main Vac valve opened
8/18/2011	3:19:18 PM	Helium MFC set to  20.000000
8/18/2011	3:19:18 PM	H2 MFC set to  0.000000
8/18/2011	3:19:18 PM	BCl3 MFC set to  0.000000
8/18/2011	3:19:18 PM	PHl3 MFC set to  0.000000
8/18/2011	3:19:18 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:19:18 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:19:18 PM	Tube furnace set to 150
8/18/2011	3:19:48 PM	Helium valve closed
8/18/2011	3:19:48 PM	H2 valve closed
8/18/2011	3:19:48 PM	BCl3 valve closed
8/18/2011	3:19:48 PM	PH3 valve closed
8/18/2011	3:19:48 PM	SiCl4 pre valve closed
8/18/2011	3:19:48 PM	SiCl4 post valve closed
8/18/2011	3:19:48 PM	Bypass valve closed
8/18/2011	3:19:48 PM	Bubbler valve closed
8/18/2011	3:19:48 PM	Main Vac valve opened
8/18/2011	3:19:48 PM	Helium MFC set to  0.000000
8/18/2011	3:19:48 PM	H2 MFC set to  0.000000
8/18/2011	3:19:48 PM	BCl3 MFC set to  0.000000
8/18/2011	3:19:48 PM	PHl3 MFC set to  0.000000
8/18/2011	3:19:48 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:19:48 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:19:48 PM	Tube furnace set to 150
8/18/2011	3:20:18 PM	H2 valve closed
8/18/2011	3:20:18 PM	BCl3 valve closed
8/18/2011	3:20:18 PM	PH3 valve closed
8/18/2011	3:20:18 PM	SiCl4 pre valve closed
8/18/2011	3:20:18 PM	SiCl4 post valve closed
8/18/2011	3:20:18 PM	Bypass valve closed
8/18/2011	3:20:18 PM	Bubbler valve closed
8/18/2011	3:20:18 PM	Helium valve opened
8/18/2011	3:20:18 PM	Main Vac valve opened
8/18/2011	3:20:18 PM	Helium MFC set to  20.000000
8/18/2011	3:20:18 PM	H2 MFC set to  0.000000
8/18/2011	3:20:18 PM	BCl3 MFC set to  0.000000
8/18/2011	3:20:18 PM	PHl3 MFC set to  0.000000
8/18/2011	3:20:18 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:20:18 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:20:18 PM	Tube furnace set to 150
8/18/2011	3:20:48 PM	Helium valve closed
8/18/2011	3:20:48 PM	H2 valve closed
8/18/2011	3:20:48 PM	BCl3 valve closed
8/18/2011	3:20:48 PM	PH3 valve closed
8/18/2011	3:20:48 PM	SiCl4 pre valve closed
8/18/2011	3:20:48 PM	SiCl4 post valve closed
8/18/2011	3:20:48 PM	Bypass valve closed
8/18/2011	3:20:48 PM	Bubbler valve closed
8/18/2011	3:20:48 PM	Main Vac valve opened
8/18/2011	3:20:48 PM	Helium MFC set to  0.000000
8/18/2011	3:20:48 PM	H2 MFC set to  0.000000
8/18/2011	3:20:48 PM	BCl3 MFC set to  0.000000
8/18/2011	3:20:48 PM	PHl3 MFC set to  0.000000
8/18/2011	3:20:48 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:20:48 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:20:48 PM	Tube furnace set to 150
8/18/2011	3:21:18 PM	H2 valve closed
8/18/2011	3:21:18 PM	BCl3 valve closed
8/18/2011	3:21:18 PM	PH3 valve closed
8/18/2011	3:21:18 PM	SiCl4 pre valve closed
8/18/2011	3:21:18 PM	SiCl4 post valve closed
8/18/2011	3:21:18 PM	Bypass valve closed
8/18/2011	3:21:18 PM	Bubbler valve closed
8/18/2011	3:21:18 PM	Helium valve opened
8/18/2011	3:21:18 PM	Main Vac valve opened
8/18/2011	3:21:18 PM	Helium MFC set to  20.000000
8/18/2011	3:21:18 PM	H2 MFC set to  0.000000
8/18/2011	3:21:18 PM	BCl3 MFC set to  0.000000
8/18/2011	3:21:18 PM	PHl3 MFC set to  0.000000
8/18/2011	3:21:18 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:21:18 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:21:19 PM	Tube furnace set to 150
8/18/2011	3:21:49 PM	Helium valve closed
8/18/2011	3:21:49 PM	H2 valve closed
8/18/2011	3:21:49 PM	BCl3 valve closed
8/18/2011	3:21:49 PM	PH3 valve closed
8/18/2011	3:21:49 PM	SiCl4 pre valve closed
8/18/2011	3:21:49 PM	SiCl4 post valve closed
8/18/2011	3:21:49 PM	Bypass valve closed
8/18/2011	3:21:49 PM	Bubbler valve closed
8/18/2011	3:21:49 PM	Main Vac valve opened
8/18/2011	3:21:49 PM	Helium MFC set to  0.000000
8/18/2011	3:21:49 PM	H2 MFC set to  0.000000
8/18/2011	3:21:49 PM	BCl3 MFC set to  0.000000
8/18/2011	3:21:49 PM	PHl3 MFC set to  0.000000
8/18/2011	3:21:49 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:21:49 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:21:49 PM	Tube furnace set to 150
8/18/2011	3:22:19 PM	H2 valve closed
8/18/2011	3:22:19 PM	BCl3 valve closed
8/18/2011	3:22:19 PM	PH3 valve closed
8/18/2011	3:22:19 PM	SiCl4 pre valve closed
8/18/2011	3:22:19 PM	SiCl4 post valve closed
8/18/2011	3:22:19 PM	Bypass valve closed
8/18/2011	3:22:19 PM	Bubbler valve closed
8/18/2011	3:22:19 PM	Helium valve opened
8/18/2011	3:22:19 PM	Main Vac valve opened
8/18/2011	3:22:19 PM	Helium MFC set to  20.000000
8/18/2011	3:22:19 PM	H2 MFC set to  0.000000
8/18/2011	3:22:19 PM	BCl3 MFC set to  0.000000
8/18/2011	3:22:19 PM	PHl3 MFC set to  0.000000
8/18/2011	3:22:19 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:22:19 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:22:19 PM	Tube furnace set to 150
8/18/2011	3:22:49 PM	Helium valve closed
8/18/2011	3:22:49 PM	H2 valve closed
8/18/2011	3:22:49 PM	BCl3 valve closed
8/18/2011	3:22:49 PM	PH3 valve closed
8/18/2011	3:22:49 PM	SiCl4 pre valve closed
8/18/2011	3:22:49 PM	SiCl4 post valve closed
8/18/2011	3:22:49 PM	Bypass valve closed
8/18/2011	3:22:49 PM	Bubbler valve closed
8/18/2011	3:22:49 PM	Main Vac valve opened
8/18/2011	3:22:49 PM	Helium MFC set to  0.000000
8/18/2011	3:22:49 PM	H2 MFC set to  0.000000
8/18/2011	3:22:49 PM	BCl3 MFC set to  0.000000
8/18/2011	3:22:49 PM	PHl3 MFC set to  0.000000
8/18/2011	3:22:49 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:22:49 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:22:49 PM	Tube furnace set to 150
8/18/2011	3:23:19 PM	H2 valve closed
8/18/2011	3:23:19 PM	BCl3 valve closed
8/18/2011	3:23:19 PM	PH3 valve closed
8/18/2011	3:23:19 PM	SiCl4 pre valve closed
8/18/2011	3:23:19 PM	SiCl4 post valve closed
8/18/2011	3:23:19 PM	Bypass valve closed
8/18/2011	3:23:19 PM	Bubbler valve closed
8/18/2011	3:23:19 PM	Helium valve opened
8/18/2011	3:23:19 PM	Main Vac valve opened
8/18/2011	3:23:19 PM	Helium MFC set to  20.000000
8/18/2011	3:23:19 PM	H2 MFC set to  0.000000
8/18/2011	3:23:19 PM	BCl3 MFC set to  0.000000
8/18/2011	3:23:19 PM	PHl3 MFC set to  0.000000
8/18/2011	3:23:19 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:23:19 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:23:19 PM	Tube furnace set to 150
8/18/2011	3:23:50 PM	Helium valve closed
8/18/2011	3:23:50 PM	H2 valve closed
8/18/2011	3:23:50 PM	BCl3 valve closed
8/18/2011	3:23:50 PM	PH3 valve closed
8/18/2011	3:23:50 PM	SiCl4 pre valve closed
8/18/2011	3:23:50 PM	SiCl4 post valve closed
8/18/2011	3:23:50 PM	Bypass valve closed
8/18/2011	3:23:50 PM	Bubbler valve closed
8/18/2011	3:23:50 PM	Main Vac valve opened
8/18/2011	3:23:50 PM	Helium MFC set to  0.000000
8/18/2011	3:23:50 PM	H2 MFC set to  0.000000
8/18/2011	3:23:50 PM	BCl3 MFC set to  0.000000
8/18/2011	3:23:50 PM	PHl3 MFC set to  0.000000
8/18/2011	3:23:50 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:23:50 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:23:50 PM	Tube furnace set to 150
8/18/2011	3:24:20 PM	H2 valve closed
8/18/2011	3:24:20 PM	BCl3 valve closed
8/18/2011	3:24:20 PM	PH3 valve closed
8/18/2011	3:24:20 PM	SiCl4 pre valve closed
8/18/2011	3:24:20 PM	SiCl4 post valve closed
8/18/2011	3:24:20 PM	Bypass valve closed
8/18/2011	3:24:20 PM	Bubbler valve closed
8/18/2011	3:24:20 PM	Helium valve opened
8/18/2011	3:24:20 PM	Main Vac valve opened
8/18/2011	3:24:20 PM	Helium MFC set to  20.000000
8/18/2011	3:24:20 PM	H2 MFC set to  0.000000
8/18/2011	3:24:20 PM	BCl3 MFC set to  0.000000
8/18/2011	3:24:20 PM	PHl3 MFC set to  0.000000
8/18/2011	3:24:20 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:24:20 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:24:20 PM	Tube furnace set to 150
8/18/2011	3:24:50 PM	Helium valve closed
8/18/2011	3:24:50 PM	H2 valve closed
8/18/2011	3:24:50 PM	BCl3 valve closed
8/18/2011	3:24:50 PM	PH3 valve closed
8/18/2011	3:24:50 PM	SiCl4 pre valve closed
8/18/2011	3:24:50 PM	SiCl4 post valve closed
8/18/2011	3:24:50 PM	Bypass valve closed
8/18/2011	3:24:50 PM	Bubbler valve closed
8/18/2011	3:24:50 PM	Main Vac valve opened
8/18/2011	3:24:50 PM	Helium MFC set to  0.000000
8/18/2011	3:24:50 PM	H2 MFC set to  0.000000
8/18/2011	3:24:50 PM	BCl3 MFC set to  0.000000
8/18/2011	3:24:50 PM	PHl3 MFC set to  0.000000
8/18/2011	3:24:50 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:24:50 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:24:50 PM	Tube furnace set to 150
8/18/2011	3:25:20 PM	H2 valve closed
8/18/2011	3:25:20 PM	BCl3 valve closed
8/18/2011	3:25:20 PM	PH3 valve closed
8/18/2011	3:25:20 PM	SiCl4 pre valve closed
8/18/2011	3:25:20 PM	SiCl4 post valve closed
8/18/2011	3:25:20 PM	Bypass valve closed
8/18/2011	3:25:20 PM	Bubbler valve closed
8/18/2011	3:25:20 PM	Helium valve opened
8/18/2011	3:25:20 PM	Main Vac valve opened
8/18/2011	3:25:20 PM	Helium MFC set to  20.000000
8/18/2011	3:25:20 PM	H2 MFC set to  0.000000
8/18/2011	3:25:20 PM	BCl3 MFC set to  0.000000
8/18/2011	3:25:20 PM	PHl3 MFC set to  0.000000
8/18/2011	3:25:20 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:25:20 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:25:20 PM	Tube furnace set to 150
8/18/2011	3:25:50 PM	Helium valve closed
8/18/2011	3:25:50 PM	H2 valve closed
8/18/2011	3:25:50 PM	BCl3 valve closed
8/18/2011	3:25:50 PM	PH3 valve closed
8/18/2011	3:25:50 PM	SiCl4 pre valve closed
8/18/2011	3:25:50 PM	SiCl4 post valve closed
8/18/2011	3:25:50 PM	Bypass valve closed
8/18/2011	3:25:50 PM	Bubbler valve closed
8/18/2011	3:25:50 PM	Main Vac valve opened
8/18/2011	3:25:50 PM	Helium MFC set to  0.000000
8/18/2011	3:25:50 PM	H2 MFC set to  0.000000
8/18/2011	3:25:50 PM	BCl3 MFC set to  0.000000
8/18/2011	3:25:50 PM	PHl3 MFC set to  0.000000
8/18/2011	3:25:50 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:25:50 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:25:51 PM	Tube furnace set to 150
8/18/2011	3:25:52 PM	Run finished at 3:25 PM
8/18/2011	3:49:18 PM	Main Vac valve closed
8/18/2011	3:49:25 PM	Main Vac valve opened
8/18/2011	3:49:42 PM	Recipe started at 3:49 PM
8/18/2011	3:49:42 PM	Helium valve closed
8/18/2011	3:49:42 PM	H2 valve closed
8/18/2011	3:49:42 PM	BCl3 valve closed
8/18/2011	3:49:42 PM	PH3 valve closed
8/18/2011	3:49:42 PM	SiCl4 pre valve closed
8/18/2011	3:49:42 PM	SiCl4 post valve closed
8/18/2011	3:49:42 PM	Main Vac valve closed
8/18/2011	3:49:42 PM	Bypass valve closed
8/18/2011	3:49:43 PM	Bubbler valve closed
8/18/2011	3:49:43 PM	Helium MFC set to  0.000000
8/18/2011	3:49:43 PM	H2 MFC set to  0.000000
8/18/2011	3:49:43 PM	BCl3 MFC set to  0.000000
8/18/2011	3:49:43 PM	PHl3 MFC set to  0.000000
8/18/2011	3:49:43 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:49:43 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:49:43 PM	Tube furnace set to 0
8/18/2011	3:49:46 PM	Helium valve closed
8/18/2011	3:49:46 PM	BCl3 valve closed
8/18/2011	3:49:46 PM	PH3 valve closed
8/18/2011	3:49:46 PM	SiCl4 pre valve closed
8/18/2011	3:49:46 PM	SiCl4 post valve closed
8/18/2011	3:49:46 PM	Main Vac valve closed
8/18/2011	3:49:46 PM	Bypass valve closed
8/18/2011	3:49:46 PM	Bubbler valve closed
8/18/2011	3:49:46 PM	H2 valve opened
8/18/2011	3:49:46 PM	Helium MFC set to  0.000000
8/18/2011	3:49:46 PM	H2 MFC set to  500.000000
8/18/2011	3:49:46 PM	BCl3 MFC set to  0.000000
8/18/2011	3:49:46 PM	PHl3 MFC set to  0.000000
8/18/2011	3:49:46 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:49:46 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:49:46 PM	Tube furnace set to 0
8/18/2011	3:50:49 PM	Helium valve closed
8/18/2011	3:50:49 PM	BCl3 valve closed
8/18/2011	3:50:49 PM	PH3 valve closed
8/18/2011	3:50:49 PM	SiCl4 pre valve closed
8/18/2011	3:50:49 PM	SiCl4 post valve closed
8/18/2011	3:50:49 PM	Main Vac valve closed
8/18/2011	3:50:49 PM	Bypass valve closed
8/18/2011	3:50:49 PM	H2 valve opened
8/18/2011	3:50:49 PM	Bubbler valve opened
8/18/2011	3:50:49 PM	Helium MFC set to  0.000000
8/18/2011	3:50:49 PM	H2 MFC set to  500.000000
8/18/2011	3:50:49 PM	BCl3 MFC set to  0.000000
8/18/2011	3:50:49 PM	PHl3 MFC set to  0.000000
8/18/2011	3:50:49 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:50:49 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:50:49 PM	Tube furnace set to 0
8/18/2011	3:50:50 PM	Helium valve closed
8/18/2011	3:50:50 PM	BCl3 valve closed
8/18/2011	3:50:50 PM	PH3 valve closed
8/18/2011	3:50:50 PM	SiCl4 pre valve closed
8/18/2011	3:50:50 PM	SiCl4 post valve closed
8/18/2011	3:50:50 PM	Main Vac valve closed
8/18/2011	3:50:50 PM	Bypass valve closed
8/18/2011	3:50:50 PM	H2 valve opened
8/18/2011	3:50:50 PM	Bubbler valve opened
8/18/2011	3:50:50 PM	Helium MFC set to  0.000000
8/18/2011	3:50:50 PM	H2 MFC set to  500.000000
8/18/2011	3:50:50 PM	BCl3 MFC set to  0.000000
8/18/2011	3:50:50 PM	PHl3 MFC set to  0.000000
8/18/2011	3:50:50 PM	SiCl4 MFC set to  0.000000
8/18/2011	3:50:50 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	3:50:50 PM	Tube furnace set to 1000
8/18/2011	4:10:50 PM	Helium valve closed
8/18/2011	4:10:50 PM	PH3 valve closed
8/18/2011	4:10:50 PM	Main Vac valve closed
8/18/2011	4:10:50 PM	Bypass valve closed
8/18/2011	4:10:50 PM	H2 valve opened
8/18/2011	4:10:50 PM	BCl3 valve opened
8/18/2011	4:10:50 PM	SiCl4 pre valve opened
8/18/2011	4:10:50 PM	SiCl4 post valve opened
8/18/2011	4:10:50 PM	Bubbler valve opened
8/18/2011	4:10:50 PM	Helium MFC set to  0.000000
8/18/2011	4:10:50 PM	H2 MFC set to  500.000000
8/18/2011	4:10:50 PM	BCl3 MFC set to  2.300000
8/18/2011	4:10:50 PM	PHl3 MFC set to  0.000000
8/18/2011	4:10:50 PM	SiCl4 MFC set to  50.000000
8/18/2011	4:10:50 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	4:10:50 PM	Tube furnace set to 1000
8/18/2011	4:23:50 PM	Helium valve closed
8/18/2011	4:23:50 PM	BCl3 valve closed
8/18/2011	4:23:50 PM	Main Vac valve closed
8/18/2011	4:23:50 PM	Bypass valve closed
8/18/2011	4:23:50 PM	H2 valve opened
8/18/2011	4:23:50 PM	PH3 valve opened
8/18/2011	4:23:50 PM	SiCl4 pre valve opened
8/18/2011	4:23:50 PM	SiCl4 post valve opened
8/18/2011	4:23:50 PM	Bubbler valve opened
8/18/2011	4:23:50 PM	Helium MFC set to  0.000000
8/18/2011	4:23:50 PM	H2 MFC set to  500.000000
8/18/2011	4:23:50 PM	BCl3 MFC set to  0.000000
8/18/2011	4:23:50 PM	PHl3 MFC set to  20.000000
8/18/2011	4:23:50 PM	SiCl4 MFC set to  50.000000
8/18/2011	4:23:50 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	4:23:51 PM	Tube furnace set to 1000
8/18/2011	4:28:51 PM	Helium valve closed
8/18/2011	4:28:51 PM	BCl3 valve closed
8/18/2011	4:28:51 PM	PH3 valve closed
8/18/2011	4:28:51 PM	SiCl4 pre valve closed
8/18/2011	4:28:51 PM	SiCl4 post valve closed
8/18/2011	4:28:51 PM	Main Vac valve closed
8/18/2011	4:28:51 PM	Bypass valve closed
8/18/2011	4:28:51 PM	H2 valve opened
8/18/2011	4:28:51 PM	Bubbler valve opened
8/18/2011	4:28:51 PM	Helium MFC set to  0.000000
8/18/2011	4:28:51 PM	H2 MFC set to  500.000000
8/18/2011	4:28:51 PM	BCl3 MFC set to  0.000000
8/18/2011	4:28:51 PM	PHl3 MFC set to  0.000000
8/18/2011	4:28:51 PM	SiCl4 MFC set to  0.000000
8/18/2011	4:28:51 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	4:28:51 PM	Tube furnace set to 950
8/18/2011	4:31:51 PM	H2 valve closed
8/18/2011	4:31:51 PM	BCl3 valve closed
8/18/2011	4:31:51 PM	PH3 valve closed
8/18/2011	4:31:51 PM	SiCl4 pre valve closed
8/18/2011	4:31:51 PM	SiCl4 post valve closed
8/18/2011	4:31:51 PM	Main Vac valve closed
8/18/2011	4:31:51 PM	Bypass valve closed
8/18/2011	4:31:51 PM	Helium valve opened
8/18/2011	4:31:51 PM	Bubbler valve opened
8/18/2011	4:31:51 PM	Helium MFC set to  500.000000
8/18/2011	4:31:51 PM	H2 MFC set to  0.000000
8/18/2011	4:31:51 PM	BCl3 MFC set to  0.000000
8/18/2011	4:31:51 PM	PHl3 MFC set to  0.000000
8/18/2011	4:31:51 PM	SiCl4 MFC set to  0.000000
8/18/2011	4:31:51 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	4:31:51 PM	Tube furnace set to 900
8/18/2011	4:34:51 PM	H2 valve closed
8/18/2011	4:34:51 PM	BCl3 valve closed
8/18/2011	4:34:51 PM	PH3 valve closed
8/18/2011	4:34:51 PM	SiCl4 pre valve closed
8/18/2011	4:34:51 PM	SiCl4 post valve closed
8/18/2011	4:34:51 PM	Main Vac valve closed
8/18/2011	4:34:51 PM	Bypass valve closed
8/18/2011	4:34:51 PM	Helium valve opened
8/18/2011	4:34:51 PM	Bubbler valve opened
8/18/2011	4:34:51 PM	Helium MFC set to  500.000000
8/18/2011	4:34:51 PM	H2 MFC set to  0.000000
8/18/2011	4:34:51 PM	BCl3 MFC set to  0.000000
8/18/2011	4:34:51 PM	PHl3 MFC set to  0.000000
8/18/2011	4:34:51 PM	SiCl4 MFC set to  0.000000
8/18/2011	4:34:51 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	4:34:51 PM	Tube furnace set to 850
8/18/2011	4:37:51 PM	H2 valve closed
8/18/2011	4:37:51 PM	BCl3 valve closed
8/18/2011	4:37:51 PM	PH3 valve closed
8/18/2011	4:37:51 PM	SiCl4 pre valve closed
8/18/2011	4:37:51 PM	SiCl4 post valve closed
8/18/2011	4:37:51 PM	Main Vac valve closed
8/18/2011	4:37:51 PM	Bypass valve closed
8/18/2011	4:37:51 PM	Helium valve opened
8/18/2011	4:37:51 PM	Bubbler valve opened
8/18/2011	4:37:51 PM	Helium MFC set to  500.000000
8/18/2011	4:37:51 PM	H2 MFC set to  0.000000
8/18/2011	4:37:51 PM	BCl3 MFC set to  0.000000
8/18/2011	4:37:51 PM	PHl3 MFC set to  0.000000
8/18/2011	4:37:51 PM	SiCl4 MFC set to  0.000000
8/18/2011	4:37:51 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	4:37:51 PM	Tube furnace set to 800
8/18/2011	4:40:51 PM	H2 valve closed
8/18/2011	4:40:51 PM	BCl3 valve closed
8/18/2011	4:40:51 PM	PH3 valve closed
8/18/2011	4:40:51 PM	SiCl4 pre valve closed
8/18/2011	4:40:51 PM	SiCl4 post valve closed
8/18/2011	4:40:51 PM	Main Vac valve closed
8/18/2011	4:40:51 PM	Bypass valve closed
8/18/2011	4:40:51 PM	Helium valve opened
8/18/2011	4:40:51 PM	Bubbler valve opened
8/18/2011	4:40:51 PM	Helium MFC set to  500.000000
8/18/2011	4:40:51 PM	H2 MFC set to  0.000000
8/18/2011	4:40:51 PM	BCl3 MFC set to  0.000000
8/18/2011	4:40:51 PM	PHl3 MFC set to  0.000000
8/18/2011	4:40:51 PM	SiCl4 MFC set to  0.000000
8/18/2011	4:40:51 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	4:40:52 PM	Tube furnace set to 750
8/18/2011	4:43:52 PM	H2 valve closed
8/18/2011	4:43:52 PM	BCl3 valve closed
8/18/2011	4:43:52 PM	PH3 valve closed
8/18/2011	4:43:52 PM	SiCl4 pre valve closed
8/18/2011	4:43:52 PM	SiCl4 post valve closed
8/18/2011	4:43:52 PM	Main Vac valve closed
8/18/2011	4:43:52 PM	Bypass valve closed
8/18/2011	4:43:52 PM	Helium valve opened
8/18/2011	4:43:52 PM	Bubbler valve opened
8/18/2011	4:43:52 PM	Helium MFC set to  500.000000
8/18/2011	4:43:52 PM	H2 MFC set to  0.000000
8/18/2011	4:43:52 PM	BCl3 MFC set to  0.000000
8/18/2011	4:43:52 PM	PHl3 MFC set to  0.000000
8/18/2011	4:43:52 PM	SiCl4 MFC set to  0.000000
8/18/2011	4:43:52 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	4:43:52 PM	Tube furnace set to 0
8/18/2011	5:03:52 PM	Helium valve closed
8/18/2011	5:03:52 PM	H2 valve closed
8/18/2011	5:03:52 PM	BCl3 valve closed
8/18/2011	5:03:52 PM	PH3 valve closed
8/18/2011	5:03:52 PM	SiCl4 pre valve closed
8/18/2011	5:03:52 PM	SiCl4 post valve closed
8/18/2011	5:03:52 PM	Main Vac valve closed
8/18/2011	5:03:52 PM	Bypass valve closed
8/18/2011	5:03:52 PM	Bubbler valve closed
8/18/2011	5:03:52 PM	Helium MFC set to  0.000000
8/18/2011	5:03:52 PM	H2 MFC set to  0.000000
8/18/2011	5:03:52 PM	BCl3 MFC set to  0.000000
8/18/2011	5:03:52 PM	PHl3 MFC set to  0.000000
8/18/2011	5:03:52 PM	SiCl4 MFC set to  0.000000
8/18/2011	5:03:52 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	5:03:52 PM	Tube furnace set to 0
8/18/2011	5:03:53 PM	Run finished at 5:03 PM
8/18/2011	5:28:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2011	5:28:14 PM	Recipe started at 5:28 PM
8/18/2011	5:28:14 PM	Helium valve closed
8/18/2011	5:28:14 PM	H2 valve closed
8/18/2011	5:28:14 PM	BCl3 valve closed
8/18/2011	5:28:14 PM	PH3 valve closed
8/18/2011	5:28:14 PM	SiCl4 pre valve closed
8/18/2011	5:28:14 PM	SiCl4 post valve closed
8/18/2011	5:28:14 PM	Main Vac valve closed
8/18/2011	5:28:14 PM	Bubbler valve closed
8/18/2011	5:28:14 PM	Bypass valve opened
8/18/2011	5:28:14 PM	Helium MFC set to  0.000000
8/18/2011	5:28:14 PM	H2 MFC set to  0.000000
8/18/2011	5:28:14 PM	BCl3 MFC set to  0.000000
8/18/2011	5:28:14 PM	PHl3 MFC set to  0.000000
8/18/2011	5:28:14 PM	SiCl4 MFC set to  0.000000
8/18/2011	5:28:14 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	5:28:14 PM	Tube furnace set to 0
8/18/2011	5:28:20 PM	Run aborted at 5:28 PM
8/18/2011	5:28:20 PM	Helium valve closed
8/18/2011	5:28:21 PM	H2 valve closed
8/18/2011	5:28:21 PM	BCl3 valve closed
8/18/2011	5:28:21 PM	PH3 valve closed
8/18/2011	5:28:21 PM	SiCl4 pre valve closed
8/18/2011	5:28:21 PM	SiCl4 post valve closed
8/18/2011	5:28:21 PM	Bypass valve closed
8/18/2011	5:28:21 PM	Main Vac valve closed
8/18/2011	5:28:21 PM	Bubbler valve closed
8/18/2011	5:28:21 PM	Helium MFC set to  0.000000
8/18/2011	5:28:21 PM	H2 MFC set to  0.000000
8/18/2011	5:28:21 PM	BCl3 MFC set to  0.000000
8/18/2011	5:28:21 PM	PHl3 MFC set to  0.000000
8/18/2011	5:28:21 PM	SiCl4 MFC set to  0.000000
8/18/2011	5:28:21 PM	Tube furnace set to 0
8/18/2011	5:28:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2011	5:28:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/18/2011	5:28:41 PM	Recipe started at 5:28 PM
8/18/2011	5:28:41 PM	Helium valve closed
8/18/2011	5:28:41 PM	H2 valve closed
8/18/2011	5:28:41 PM	BCl3 valve closed
8/18/2011	5:28:41 PM	PH3 valve closed
8/18/2011	5:28:41 PM	SiCl4 pre valve closed
8/18/2011	5:28:41 PM	SiCl4 post valve closed
8/18/2011	5:28:41 PM	Main Vac valve closed
8/18/2011	5:28:41 PM	Bubbler valve closed
8/18/2011	5:28:41 PM	Bypass valve opened
8/18/2011	5:28:41 PM	Helium MFC set to  0.000000
8/18/2011	5:28:41 PM	H2 MFC set to  0.000000
8/18/2011	5:28:41 PM	BCl3 MFC set to  0.000000
8/18/2011	5:28:41 PM	PHl3 MFC set to  0.000000
8/18/2011	5:28:41 PM	SiCl4 MFC set to  0.000000
8/18/2011	5:28:41 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	5:28:41 PM	Tube furnace set to 0
8/18/2011	5:29:47 PM	Helium valve closed
8/18/2011	5:29:47 PM	H2 valve closed
8/18/2011	5:29:47 PM	BCl3 valve closed
8/18/2011	5:29:47 PM	PH3 valve closed
8/18/2011	5:29:47 PM	SiCl4 pre valve closed
8/18/2011	5:29:47 PM	SiCl4 post valve closed
8/18/2011	5:29:47 PM	Main Vac valve closed
8/18/2011	5:29:47 PM	Bubbler valve closed
8/18/2011	5:29:47 PM	Bypass valve opened
8/18/2011	5:29:47 PM	Helium MFC set to  0.000000
8/18/2011	5:29:47 PM	H2 MFC set to  0.000000
8/18/2011	5:29:47 PM	BCl3 MFC set to  0.000000
8/18/2011	5:29:47 PM	PHl3 MFC set to  0.000000
8/18/2011	5:29:47 PM	SiCl4 MFC set to  0.000000
8/18/2011	5:29:47 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	5:29:47 PM	Tube furnace set to 0
8/18/2011	5:30:47 PM	Helium valve closed
8/18/2011	5:30:47 PM	H2 valve closed
8/18/2011	5:30:47 PM	BCl3 valve closed
8/18/2011	5:30:47 PM	PH3 valve closed
8/18/2011	5:30:47 PM	SiCl4 pre valve closed
8/18/2011	5:30:47 PM	SiCl4 post valve closed
8/18/2011	5:30:47 PM	Bypass valve closed
8/18/2011	5:30:47 PM	Bubbler valve closed
8/18/2011	5:30:47 PM	Main Vac valve opened
8/18/2011	5:30:47 PM	Helium MFC set to  0.000000
8/18/2011	5:30:47 PM	H2 MFC set to  0.000000
8/18/2011	5:30:47 PM	BCl3 MFC set to  0.000000
8/18/2011	5:30:47 PM	PHl3 MFC set to  0.000000
8/18/2011	5:30:47 PM	SiCl4 MFC set to  0.000000
8/18/2011	5:30:47 PM	Bypass solenoid MFC set to  0.000000
8/18/2011	5:30:47 PM	Tube furnace set to 0
8/18/2011	5:30:48 PM	Run finished at 5:30 PM
8/18/2011	5:30:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
